A manipulator includes a base body, a first link supported to be capable of advancing and retracting with respect to the base body, a first leaf spring connected to a tip of the first link as a rotation pair by a first base end pin, a second link that is arranged with the first link side by side and is supported to be capable of advancing and retracting with respect to the base body, a second leaf spring connected to a tip of the second link as a rotation pair by a second base end pin in the same direction as the first base end pin, and a driven link that is connected to tips of the first and second leaf springs as rotation pairs by first and second tip pins in the same direction as the first and second base end pins, respectively.

An object processing system is disclosed that includes a plurality of track sections, and a plurality of remotely actuatable carriers for controlled movement along at least portions of the plurality of track sections, each of the actuatable carriers being instructed at any time to move a limited number of track section only.

A bin exchange system is disclosed that includes a plurality of automated carriers, each of which is adapted to be remotely movable on an array of track sections, at least one input station by which bins may be introduced to the array of track sections, at least one processing station in communication with the array of track sections wherein objects may be moved between bins, and at least one output station by which bins may be removed from the array of track sections.

An automated carrier system is disclosed for moving objects to be processed. The automated carrier system includes a discontinuous plurality of track sections on which an automated carrier may be directed to move, and the automated carrier includes a base structure on which an object may be supported, and at least two wheels assemblies being pivotally supported on the base structure for pivoting movement from a first position to a second position to effect a change in direction of movement of the carrier.

An automated carrier system is disclosed for moving objects to be processed. The automated carrier system includes a base structure of a carrier on which an object may be supported, and at least two wheels mounted to at least two motors to provide at least two wheel assemblies, the at least two wheel assemblies being pivotally supported on the base structure for pivoting movement from a first position to a second position to effect a change in direction of movement of the carrier.

A maintenance system is disclosed for assisting in maintaining an automated carrier system for moving objects to be processed. The maintenance system includes a plurality of automated carriers that are adapted to move on an array of discontinuous standard track sections, each said automated carrier including a carrier body that is no larger in either a length or width direction that a standard track section, and an automated maintenance carrier that is adapted to move on the array of discontinuous track sections, said automated maintenance system including a maintenance body that is larger in at least one of a length or width direction than the standard track section.

A work device includes a work device body and a contact preventer. The work device body includes a linear motion unit having three degrees of freedom and a rotary unit having three degrees of freedom. An end effector is mounted on an output portion of the rotary unit. The contact preventer separates a working region in which the work device body is installed, from a non-working region outside the working region. The contact preventer includes: an entry allowing portion allowing an object to enter the working region therethrough; and an entry allowing portion entry detection sensor configured to detect entry of an object into the working region through the entry allowing portions.

In the link operating device, a distal-end-side link hub is connected to a proximal-end-side link hub so as to be changeable in position relative thereto via at least three link mechanisms. Each link mechanism includes a proximal-side end link member, a distal-side end link member, and a center link member. Position-controlling actuators and speed reduction mechanisms are provided to two or more of the link mechanisms. The proximal-side end link member includes a bent portion and a pair of rotational connection bodies disposed at one end of the bent portion. The speed reduction mechanism is disposed between the pair of rotational connection bodies, and includes an output shaft fixed to one of the rotational connection bodies, and an input shaft rotatably supported by the other one of the rotational connection bodies.

A substrate transport apparatus including; a frame, a substrate transport arm connected to the frame, the substrate transport arm having an end effector, and a drive section having at least one motor coupled to the substrate transport arm, wherein the at least one motor defines a kinematic portion of the drive section configured to effect kinematic motion of the substrate transport arm, and the drive section includes an accessory portion adjacent the kinematic portion, wherein the accessory portion has another motor, different and distinct from the at least one motor, the another motor of the accessory portion is operably coupled to and configured to drive one or more accessory device independent of the kinematic motion of the substrate transport arm.

An example robot includes: a leg having an upper leg member and a lower leg member coupled to the upper leg member at a knee joint; a screw actuator disposed within the upper leg member, where the screw actuator has a screw shaft and a nut mounted coaxial to the screw shaft such that the screw shaft is rotatable within the nut; a motor mounted at an upper portion of the upper leg member and coupled to the screw shaft; a carrier coupled and mounted coaxial to the nut such that the nut is disposed at a proximal end of the carrier; and a linkage coupled to the carrier, where the linkage is coupled to the lower leg member at the knee joint.