Plurality of robot main bodies a remote control device including contactless action detecting part configured to detect contactless action including at least one given operation instructing action by operator, and control device communicably connected to remote control device and configured to control operations of plurality of robot main bodies, are provided. Control device includes memory part configured to store operational instruction content data defining operation mode of robot main body corresponding to the at least one operation instructing action, operational instruction content identifying module configured to identify operation mode of robot main body corresponding to one of operation instructing action detected by contactless action detecting part based on operational instruction content data, and motion controlling module configured to control operation of at least one given robot main body among plurality of robot main bodies based on operation mode identified by operational instruction content identifying module.

A robot system which is capable of reducing an operator's workload and easily correcting preset operation of a robot. The robot system includes a robot main body having a plurality of joints, a control device configured to control operation of the robot main body and an operating device including a teaching device configured to teach the control device one of positional information on the robot main body and angular information on the plurality of joints so as to execute an automatic operation of the robot main body and a manipulator configured to receive a manipulating instruction from an operator to manually operate the robot main body or correct the operation of the robot main body under the automatic operation.

Provided is a sensing device to be applied to an actuator including a shaft that is movable in an axial direction, the shaft including a hollow part formed on at least a tip side of the shaft such that an interior of the shaft is hollow, the actuator being configured to generate a negative pressure in the hollow part to suction a workpiece to a tip of the shaft, thereby picking up the workpiece. The sensing device includes a flow sensor provided in a middle of an air passage to detect a flow rate of air flowing through the air passage, the air passage being a passage through which air sucked out from the hollow part flows when the negative pressure is applied to the hollow part, and a pressure sensor provided in a middle of the air passage, to detect a pressure in the air passage.

Implementations of the disclosed subject matter provide a method of moving, using a drive system, a mobile robot within an area. Detecting, using at least one sensor of the mobile robot, at least one of air within the area, a surface within the area, and/or an object within the area. The area may be mapped in three dimensions based on the detecting of at least one of the air, the surface, and the object as the mobile robot moves within the area. Ultraviolet (UV) light may be emitted from a light source of the mobile robot to disinfect at least a portion of the area. A representation of the emission of the UV light may be plotted onto the mapped area to generate an exposure plot, where the representation is of the UV light emitted on at least one of the air, the surface, and the object in the area.

A method for recording image data of a moving, (e.g., cyclically moving), region of interest of a patient by a medical imaging system with an X-ray source and an X-ray detector, wherein a robotic device with a kinematic chain of moving components has a tactile connection with the patient, and wherein, the tactile connection is maintained at least for a prespecified period. The method includes acquiring measured values by sensors of the robotic device, evaluating the measured values and forwarding to the medical imaging system, wherein the evaluated measured values include information on the movement and/or position of the region of interest, and irradiation of the region of interest by the radiation source and recording of image data of the irradiated region of interest by the X-ray detector, and wherein the evaluated measured values are used to actuate the imaging system.

A robot system which includes a manipulator configured to receive a manipulating instruction from an operator, a slave arm having a plurality of joints, and a control device configured to control operation of the slave arm. The control device is configured, while the slave arm is operating at a speed equal to or higher than a first given the threshold, even when an operational instruction value for correcting the operation of the slave arm is inputted from the manipulator during an automatic operation of the slave arm, to prevent the correction of the operation of the slave arm.

Provided are an end effect measuring module and an end effect monitoring apparatus using the same. The end effect measuring module is installed at through holes formed between an Equipment Front End Module (EFEM) equipped with an end effector and a semiconductor processing apparatus for processing a wafer and measuring the position according to the movement path of a target passing the through holes. The measurement target is the end effector, and a sensing unit measures whether or not the end effector is shifted and changed in direction. A light receiving unit of the sensing unit outputs an electrical signal that is higher or lower than a reference value in response to shifting of the end effector, or outputs an electrical signal increasing or decreasing along a time axis in response to a directional change of the end effector.

A waste sorting robot can include a manipulator comprising a suction gripper for interacting with one or more waste objects to be sorted within a working area, and wherein the manipulator is moveable within the working area. There is a controller configured to send control instructions to the manipulator. At least one pressure sensor is in fluid communication with the suction gripper and configured to generate a pressure signal in dependence on a fluid pressure in the suction gripper. The controller is configured to receive the pressure signal and to determine manipulator instructions in dependence on the pressure signal.

A method of training a robot to pick a plurality of articles includes determining an identity of an article and determining if the article has a uniform distribution of weight. If the article has a uniform distribution of weight, a three-dimensional (3D) model of the article is created and stored in a database record associated with the identity. If the article does not have a uniform distribution of weight, a 3D model is created, two-dimensional (2D) images of each side of the article are created, and a 3D center of gravity of the article is determined. The 3D model, the 2D images, and the 3D center of gravity of the article are stored in a database record associated with the identity of the article.

In an embodiment, a system includes: an airlock; a first semiconductor processing chamber, a second semiconductor processing chamber; and a transfer module configured to move a sensor into and out of the first semiconductor processing chamber and the second semiconductor processing chamber, wherein the sensor is configured to: collect sensor data characterizing the first semiconductor processing chamber when within the first semiconductor processing chamber; and collect sensor data characterizing the second semiconductor processing chamber when within the second semiconductor processing chamber, wherein the transfer module, the first semiconductor processing chamber, and the second semiconductor processing chamber are within a controlled internal atmosphere on a first side of the airlock and separated by the airlock from an uncontrolled external atmosphere on a second side of the airlock.