An apparatus including at least one drive; a first robot arm having a first upper arm, a first forearm and a first end effector. The first upper arm is connected to the at least one drive at a first axis of rotation. A second robot arm has a second upper arm, a second forearm and a second end effector. The second upper arm is connected to the at least one drive at a second axis of rotation which is spaced from the first axis of rotation. The first and second robot arms are configured to locate the end effectors in first retracted positions for stacking substrates located on the end effectors at least partially one above the another. The first and second robot arms are configured to extend the end effectors from the first retracted positions in a first direction along parallel first paths located at least partially directly one above the other. The first and second robot arms are configured to extend the end effectors in at least one second direction along second paths spaced from one another which are not located above one another. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths.

A sealed actuator including stacked motor modules. Each motor module has a motor module housing, a motor stator attached to a respective motor module housing, a motor rotor in communication with a respective motor stator, and a stator seal disposed between the motor stator and motor rotor, surrounding the motor rotor and having a sealing surface interface, that interfaces with a respective sealing housing surface of the motor module housing, facing the motor rotor to seal the motor stator from the motor rotor. The motor module housings are stacked against each other and the sealing housing surface interfaced, at the sealing surface interface facing the rotors, to the respective stacked stator seals of the motor module housings forms a substantially continuous seal interface of the stacked motor modules sealed by the stacked stator seals to form a continuous barrier seal between the motor rotors and the motor stators.

A sealed actuator including stacked motor modules. Each motor module has a motor module housing, a motor stator attached to a respective motor module housing, a motor rotor in communication with a respective motor stator, and a stator seal disposed between the motor stator and motor rotor, surrounding the motor rotor and having a sealing surface interface, that interfaces with a respective sealing housing surface of the motor module housing, facing the motor rotor to seal the motor stator from the motor rotor. The motor module housings are stacked against each other and the sealing housing surface interfaced, at the sealing surface interface facing the rotors, to the respective stacked stator seals of the motor module housings forms a substantially continuous seal interface of the stacked motor modules sealed by the stacked stator seals to form a continuous barrier seal between the motor rotors and the motor stators.

A method for operating a robotic joint of a robotic system comprising selectively operating a clutch mechanism of a clutched joint module in an engaged state to cause a quasi-passive elastic actuator to enter an elastic state, the clutched joint module operating about and defining a joint of the robotic system. The method comprising effecting a first rotation of the joint to cause the quasi-passive elastic actuator to store energy during at least a portion of the rotation of the joint. The method comprising effecting a second rotation of the joint and causing the stored energy from the quasi-passive elastic actuator to be released in the form of an augmented torque applied to an output member of the clutched joint module. The method comprising selectively operating the clutch mechanism in a disengaged state to cause the quasi-passive elastic actuator to enter an inelastic state. The method comprising effecting a third rotation of the joint, wherein the quasi-passive elastic actuator facilitates a free swing mode of the clutched joint module and the joint.

A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

A surgical robotic arm includes a first link and a second link, wherein at least one of the first link or second link is movable relative to each other. The surgical robotic arm also includes a sensor assembly coupled to at least one of the first link or the second link. The sensor assembly includes a force sensing resistor assembly configured to measure force and an interface member disposed over the force sensing resistor assembly, the interface member configured to engage the at least one force sensing resistor assembly due to the interface member contacting an obstruction.

A surgical robotic arm includes a first link and a second link, wherein at least one of the first link or second link is movable relative to each other. The surgical robotic arm also includes a sensor assembly coupled to at least one of the first link or the second link. The sensor assembly includes a force sensing resistor assembly configured to measure force and an interface member disposed over the force sensing resistor assembly, the interface member configured to engage the at least one force sensing resistor assembly due to the interface member contacting an obstruction.

A robot system includes a robot including rotary joints to be rotated and driven about axes by a motor, and a control device that controls the motor based on external force torque about the axes that acts on each of the respective rotary joints, a force point to apply external force is preset to the robot, and the control device calculates distances from the axes of the rotary joints to the force point based on angles of the rotary joints of the robot, and adjusts and increases an operation amount to the motor as the calculated distances decrease.

A robot system includes a robot including rotary joints to be rotated and driven about axes by a motor, and a control device that controls the motor based on external force torque about the axes that acts on each of the respective rotary joints, a force point to apply external force is preset to the robot, and the control device calculates distances from the axes of the rotary joints to the force point based on angles of the rotary joints of the robot, and adjusts and increases an operation amount to the motor as the calculated distances decrease.