A substrate transport apparatus including a frame, at least one arm link rotatably connected to the frame and a shaftless drive section. The shaftless drive section including stacked drive motors for rotating the at least one arm link relative to the frame through a shaftless interface, each of the stacked drive motors including a stator having stator coils disposed on a fixed post fixed relative to the frame and a rotor substantially peripherally surrounding the stator such that the rotor is connected to a respective one of the at least one arm link for rotating the one of the at least one arm link relative to the frame causing an extension or retraction of the one of the at least one arm link, where the stacked drive motors are disposed in the at least one arm link so that part of each stator is within a common arm link.

A substrate transport apparatus including a frame, at least one arm link rotatably connected to the frame and a shaftless drive section. The shaftless drive section including stacked drive motors for rotating the at least one arm link relative to the frame through a shaftless interface, each of the stacked drive motors including a stator having stator coils disposed on a fixed post fixed relative to the frame and a rotor substantially peripherally surrounding the stator such that the rotor is connected to a respective one of the at least one arm link for rotating the one of the at least one arm link relative to the frame causing an extension or retraction of the one of the at least one arm link, where the stacked drive motors are disposed in the at least one arm link so that part of each stator is within a common arm link.

A hermetically sealed multi-axis articulated arm apparatus for use within a sealable isolator chamber comprises a rotational shaft that passes through an opening in the chamber, a sealing member disposed within the chamber for sealing the shaft to an inner surface of the chamber, a plurality of interconnected hermetically sealed arm segments, operably attached to the linear motion shaft; an end effector operably attached to a terminal arm segment among the plurality of arm segments, and at least one fully enclosed drive system for driving and controlling the shaft and the plurality of arm segments. The linear motion shaft may have a sealing member in the form of a bellows. The materials for the parts of the apparatus exposed to the atmosphere of the chamber are compatible with an aseptic and cleanable environment and the surfaces of the arm segments are shaped to avoid pooling of contaminants.

A hermetically sealed multi-axis articulated arm apparatus for use within a sealable isolator chamber comprises a rotational shaft that passes through an opening in the chamber, a sealing member disposed within the chamber for sealing the shaft to an inner surface of the chamber, a plurality of interconnected hermetically sealed arm segments, operably attached to the linear motion shaft; an end effector operably attached to a terminal arm segment among the plurality of arm segments, and at least one fully enclosed drive system for driving and controlling the shaft and the plurality of arm segments. The linear motion shaft may have a sealing member in the form of a bellows. The materials for the parts of the apparatus exposed to the atmosphere of the chamber are compatible with an aseptic and cleanable environment and the surfaces of the arm segments are shaped to avoid pooling of contaminants.

A method of operating a robot includes providing a robot having a plurality of independently operable links that rotate and translate the robot. The links comprise a first link having a first distal end, a first proximal end, and a first longitudinal axis extending between the first distal end and the first proximal end and a second link having a second proximal end, a second distal end operatively coupled to the first proximal end, and a second longitudinal axis extending between the second proximal end and the second distal end. The method further comprises inserting the robot through a first opening into the space and advancing the robot through the space by performing at least one of the following operations: axially elongating the robot; pivoting the first longitudinal axis relative to the second longitudinal axis; and rotating the first longitudinal axis relative to the second longitudinal axis.

A method of operating a robot includes providing a robot having a plurality of independently operable links that rotate and translate the robot. The links comprise a first link having a first distal end, a first proximal end, and a first longitudinal axis extending between the first distal end and the first proximal end and a second link having a second proximal end, a second distal end operatively coupled to the first proximal end, and a second longitudinal axis extending between the second proximal end and the second distal end. The method further comprises inserting the robot through a first opening into the space and advancing the robot through the space by performing at least one of the following operations: axially elongating the robot; pivoting the first longitudinal axis relative to the second longitudinal axis; and rotating the first longitudinal axis relative to the second longitudinal axis.

A transport apparatus including a frame, a drive section connected to the frame, the drive section having at least one drive axis, at least one arm having an end effector configured for holding a substrate, the at least one arm being connected to the drive section by a transmission link and having at least one degree of freedom axis effecting extension and retraction of the end effector with respect to the at least one arm, and a bearing connected to the frame and the end effector, the bearing defining a guideway that defines the at least one degree of freedom axis.

A transport apparatus including a frame, a drive section connected to the frame, the drive section having at least one drive axis, at least one arm having an end effector configured for holding a substrate, the at least one arm being connected to the drive section by a transmission link and having at least one degree of freedom axis effecting extension and retraction of the end effector with respect to the at least one arm, and a bearing connected to the frame and the end effector, the bearing defining a guideway that defines the at least one degree of freedom axis.

A horizontal articulated robot includes a base, a first arm, a second arm, and a cable unit connected to the base and the second arm. The cable unit includes an arm conduit having one end connected to the second arm, and the other end attached to a first plate-shaped member fixed to an upper surface of the base, a number of cables passing through the arm conduit, a second plate-shaped member that closes a back-side opening made in the back surface of the base. The first plate-shaped member is configured to close a top surface opening made in the upper surface of the base, and the top surface opening is continuous with the back-side opening.

A horizontal articulated robot includes a base, a first arm, a second arm, and a cable unit connected to the base and the second arm. The cable unit includes an arm conduit having one end connected to the second arm, and the other end attached to a first plate-shaped member fixed to an upper surface of the base, a number of cables passing through the arm conduit, a second plate-shaped member that closes a back-side opening made in the back surface of the base. The first plate-shaped member is configured to close a top surface opening made in the upper surface of the base, and the top surface opening is continuous with the back-side opening.