A collar may be provided having an aperture through it through which the turret of a wafer handling robot may be extended or retracted. The collar may have one or more radial gas passages. Gas directed inwards towards the turret from the radial passage(s) may turn downward when it strikes the turret. A bellows may be optionally affixed to the bottom of the turret and to the bottom of the base such that the volume of the base occupied by the turret and the bellows remains generally fixed regardless of the degree to which the turret is extended from the base.

A collar may be provided having an aperture through it through which the turret of a wafer handling robot may be extended or retracted. The collar may have one or more radial gas passages. Gas directed inwards towards the turret from the radial passage(s) may turn downward when it strikes the turret. A bellows may be optionally affixed to the bottom of the turret and to the bottom of the base such that the volume of the base occupied by the turret and the bellows remains generally fixed regardless of the degree to which the turret is extended from the base.

A robot arm comprising a joint mechanism for articulating one limb of the arm relative to another limb of the arm about two non-parallel rotation axes, the mechanism comprising: an intermediate carrier attached to a first one of the limbs by a first revolute joint having a first rotation axis and to a second one of the limbs by a second revolute joint having a second rotation axis; a first drive gear disposed about the first rotation axis, the first drive gear being fast with the carrier; a second drive gear disposed about the second rotation axis, the second drive gear being fast with the second one of the limbs; a first drive shaft for driving the first drive gear to rotate about the first rotation axis, the first drive shaft extending along the first one of the limbs and having a first shaft gear thereon, the first shaft gear being arranged to engage the first drive gear; a second drive shaft for driving the second drive gear to rotate about the second rotation axis, the second drive shaft extending along the first one of the limbs and having a second shaft gear thereon; and an intermediate gear train borne by the carrier and coupling the second shaft gear to the second drive gear, the intermediate gear train comprising an intermediate shaft arranged to rotate about an axis parallel with the first rotation axis, the intermediate shaft having a third shaft gear thereon, the third shaft gear being arranged to engage the second drive gear.

A robot arm comprising a joint mechanism for articulating one limb of the arm relative to another limb of the arm about two non-parallel rotation axes, the mechanism comprising: an intermediate carrier attached to a first one of the limbs by a first revolute joint having a first rotation axis and to a second one of the limbs by a second revolute joint having a second rotation axis; a first drive gear disposed about the first rotation axis, the first drive gear being fast with the carrier; a second drive gear disposed about the second rotation axis, the second drive gear being fast with the second one of the limbs; a first drive shaft for driving the first drive gear to rotate about the first rotation axis, the first drive shaft extending along the first one of the limbs and having a first shaft gear thereon, the first shaft gear being arranged to engage the first drive gear; a second drive shaft for driving the second drive gear to rotate about the second rotation axis, the second drive shaft extending along the first one of the limbs and having a second shaft gear thereon; and an intermediate gear train borne by the carrier and coupling the second shaft gear to the second drive gear, the intermediate gear train comprising an intermediate shaft arranged to rotate about an axis parallel with the first rotation axis, the intermediate shaft having a third shaft gear thereon, the third shaft gear being arranged to engage the second drive gear.

A robot includes an articulated arm; and a base unit to which the articulated arm is operably coupled. The base unit includes: a rotating portion; an actuator mounted on the rotating portion and configured to rotate the rotating portion about a first axis; an arm connector attached to a first portion of the rotating portion. The articulated arm is connected to the arm connector to swing about a second axis; and a rib straddling the actuator and connecting the arm connector to a second portion of the rotating portion. The actuator is located between the first portion and the second portion of the rotating portion.

A robot includes an articulated arm; and a base unit to which the articulated arm is operably coupled. The base unit includes: a rotating portion; an actuator mounted on the rotating portion and configured to rotate the rotating portion about a first axis; an arm connector attached to a first portion of the rotating portion. The articulated arm is connected to the arm connector to swing about a second axis; and a rib straddling the actuator and connecting the arm connector to a second portion of the rotating portion. The actuator is located between the first portion and the second portion of the rotating portion.

A substrate transport apparatus including a frame, at least one arm link rotatably connected to the frame and a shaftless drive section. The shaftless drive section including stacked drive motors for rotating the at least one arm link relative to the frame through a shaftless interface, each of the stacked drive motors including a stator having stator coils disposed on a fixed post fixed relative to the frame and a rotor substantially peripherally surrounding the stator such that the rotor is connected to a respective one of the at least one arm link for rotating the one of the at least one arm link relative to the frame causing an extension or retraction of the one of the at least one arm link, where the stacked drive motors are disposed in the at least one arm link so that part of each stator is within a common arm link.

A substrate transport apparatus including a frame, at least one arm link rotatably connected to the frame and a shaftless drive section. The shaftless drive section including stacked drive motors for rotating the at least one arm link relative to the frame through a shaftless interface, each of the stacked drive motors including a stator having stator coils disposed on a fixed post fixed relative to the frame and a rotor substantially peripherally surrounding the stator such that the rotor is connected to a respective one of the at least one arm link for rotating the one of the at least one arm link relative to the frame causing an extension or retraction of the one of the at least one arm link, where the stacked drive motors are disposed in the at least one arm link so that part of each stator is within a common arm link.

A capacitive sensor for characterizing force or torque includes a first plurality of non-patterned conductive regions and a first plurality of patterned conductive regions, and a second plurality of non-patterned conductive regions and a second plurality of patterned conductive regions. The first and second pluralities of non-patterned conductive regions are facing and the first and second pluralities of patterned conductive regions are facing.

A capacitive sensor for characterizing force or torque includes a first plurality of non-patterned conductive regions and a first plurality of patterned conductive regions, and a second plurality of non-patterned conductive regions and a second plurality of patterned conductive regions. The first and second pluralities of non-patterned conductive regions are facing and the first and second pluralities of patterned conductive regions are facing.