An apparatus including at least one drive; a first robot arm having a first upper arm, a first forearm and a first end effector. The first upper arm is connected to the at least one drive at a first axis of rotation. A second robot arm has a second upper arm, a second forearm and a second end effector. The second upper arm is connected to the at least one drive at a second axis of rotation which is spaced from the first axis of rotation. The first and second robot arms are configured to locate the end effectors in first retracted positions for stacking substrates located on the end effectors at least partially one above the another. The first and second robot arms are configured to extend the end effectors from the first retracted positions in a first direction along parallel first paths located at least partially directly one above the other. The first and second robot arms are configured to extend the end effectors in at least one second direction along second paths spaced from one another which are not located above one another. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths.

An apparatus including at least one drive; a first robot arm having a first upper arm, a first forearm and a first end effector. The first upper arm is connected to the at least one drive at a first axis of rotation. A second robot arm has a second upper arm, a second forearm and a second end effector. The second upper arm is connected to the at least one drive at a second axis of rotation which is spaced from the first axis of rotation. The first and second robot arms are configured to locate the end effectors in first retracted positions for stacking substrates located on the end effectors at least partially one above the another. The first and second robot arms are configured to extend the end effectors from the first retracted positions in a first direction along parallel first paths located at least partially directly one above the other. The first and second robot arms are configured to extend the end effectors in at least one second direction along second paths spaced from one another which are not located above one another. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths.

A method for automatically attaching a surface treatment medium to a head of a surface treatment tool mounted on an articulated arm of a robot is disclosed. The method comprises placing the head on a surface and applying a predefined force to press the head towards the surface when no surface treatment medium is attached to the head, measuring the distance between the head and the surface using one or more positioning sensors of the robot arm or the surface treatment tool, attaching a surface treatment medium to the head, placing the head on the surface when the surface treatment medium is attached to the head, and measuring the distance between the head and the surface using one or more positioning sensors of the robot arm or the surface treatment tool when the surface treatment medium is attached to the head.

A method for automatically attaching a surface treatment medium to a head of a surface treatment tool mounted on an articulated arm of a robot is disclosed. The method comprises placing the head on a surface and applying a predefined force to press the head towards the surface when no surface treatment medium is attached to the head, measuring the distance between the head and the surface using one or more positioning sensors of the robot arm or the surface treatment tool, attaching a surface treatment medium to the head, placing the head on the surface when the surface treatment medium is attached to the head, and measuring the distance between the head and the surface using one or more positioning sensors of the robot arm or the surface treatment tool when the surface treatment medium is attached to the head.

A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

An articulating assembly of a robotic system has an extruded connector arm including a longitudinally-extending body portion and a connection portion. The body portion has an axial base member, a perimeter wall, and a plurality of webs extending radially from the base member to the perimeter wall. The robotic system may also have an actuatable joint secured to the connection portion of the connector arm. The connector arm may be cut-to-size and replaceable, thereby forming a modular component for the robotic system.

An articulating assembly of a robotic system has an extruded connector arm including a longitudinally-extending body portion and a connection portion. The body portion has an axial base member, a perimeter wall, and a plurality of webs extending radially from the base member to the perimeter wall. The robotic system may also have an actuatable joint secured to the connection portion of the connector arm. The connector arm may be cut-to-size and replaceable, thereby forming a modular component for the robotic system.

A wearable cable-driven robotic arm system includes a wearing mechanism, two robotic arms located on two sides of the wearing mechanism, cable driving devices, a load trolley, and a motor controller, where the cable driving devices are divided into driving portions and driven portions, heavy objects, such as electric motors, of the driving portions are arranged in the load trolley, thereby reducing loads born by the wearable robotic arms, the load trolley can travel with a person by means of sleeves or can be controlled by the motor controller to move by means of signals measured by following modules, the driven portions are combined with the robotic arms, and are double-cable driven, thereby reducing weight of the robotic arms, and a brain-computer interface module is used for controlling the driving devices, thereby controlling the robotic arms more accurately.

A wearable cable-driven robotic arm system includes a wearing mechanism, two robotic arms located on two sides of the wearing mechanism, cable driving devices, a load trolley, and a motor controller, where the cable driving devices are divided into driving portions and driven portions, heavy objects, such as electric motors, of the driving portions are arranged in the load trolley, thereby reducing loads born by the wearable robotic arms, the load trolley can travel with a person by means of sleeves or can be controlled by the motor controller to move by means of signals measured by following modules, the driven portions are combined with the robotic arms, and are double-cable driven, thereby reducing weight of the robotic arms, and a brain-computer interface module is used for controlling the driving devices, thereby controlling the robotic arms more accurately.