A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

A capacitive sensor for characterizing force or torque includes a first plurality of non-patterned conductive regions and a first plurality of patterned conductive regions, and a second plurality of non-patterned conductive regions and a second plurality of patterned conductive regions. The first and second pluralities of non-patterned conductive regions are facing and the first and second pluralities of patterned conductive regions are facing.

A capacitive sensor for characterizing force or torque includes a first plurality of non-patterned conductive regions and a first plurality of patterned conductive regions, and a second plurality of non-patterned conductive regions and a second plurality of patterned conductive regions. The first and second pluralities of non-patterned conductive regions are facing and the first and second pluralities of patterned conductive regions are facing.

A robot that includes a base that is provided with a flat installation surface member that is disposed on an installation target surface and a columnar member that extends upward from the installation surface member; and a first arm, one end of which is supported so as to be rotatable about a first horizontal axis located above the columnar member of the base and that has a motion range below the first horizontal axis. The columnar member has a length that is equal to or longer than the length of the first arm and has a uniform transverse sectional area that is the same as the first arm.

A robot that includes a base that is provided with a flat installation surface member that is disposed on an installation target surface and a columnar member that extends upward from the installation surface member; and a first arm, one end of which is supported so as to be rotatable about a first horizontal axis located above the columnar member of the base and that has a motion range below the first horizontal axis. The columnar member has a length that is equal to or longer than the length of the first arm and has a uniform transverse sectional area that is the same as the first arm.

A workpiece delivery device includes: a base; a turning center part; a turning arm; a workpiece hand; a track turning mechanism; and a rotation control mechanism, in which the track turning mechanism has a turning drive part, a track turning transmission part, and a track guide part, the rotation control mechanism has a rotation restriction transmission part, a rotation control part, and a rotation restriction receiving part, the turning center part, the turning drive part, the track turning transmission part, the rotation restriction transmission part, and the rotation restriction receiving part are provided on the turning arm, the track guide part and the rotation control part are provided on the base, the rotation restriction receiving part is provided on a workpiece hand support shaft, and the rotation restriction transmission part and the rotation restriction receiving part are connected to each other by a connection part.

A workpiece delivery device includes: a base; a turning center part; a turning arm; a workpiece hand; a track turning mechanism; and a rotation control mechanism, in which the track turning mechanism has a turning drive part, a track turning transmission part, and a track guide part, the rotation control mechanism has a rotation restriction transmission part, a rotation control part, and a rotation restriction receiving part, the turning center part, the turning drive part, the track turning transmission part, the rotation restriction transmission part, and the rotation restriction receiving part are provided on the turning arm, the track guide part and the rotation control part are provided on the base, the rotation restriction receiving part is provided on a workpiece hand support shaft, and the rotation restriction transmission part and the rotation restriction receiving part are connected to each other by a connection part.

A transport apparatus including a frame, a drive section connected to the frame, the drive section having at least one drive axis, at least one arm having an end effector configured for holding a substrate, the at least one arm being connected to the drive section by a transmission link and having at least one degree of freedom axis effecting extension and retraction of the end effector with respect to the at least one arm, and a bearing connected to the frame and the end effector, the bearing defining a guideway that defines the at least one degree of freedom axis.

A transport apparatus including a frame, a drive section connected to the frame, the drive section having at least one drive axis, at least one arm having an end effector configured for holding a substrate, the at least one arm being connected to the drive section by a transmission link and having at least one degree of freedom axis effecting extension and retraction of the end effector with respect to the at least one arm, and a bearing connected to the frame and the end effector, the bearing defining a guideway that defines the at least one degree of freedom axis.

An automatic staged object feeding and discharging system includes a table, feeding device, staged feeding and discharging device and robotic arm; the staged feeding and discharging device has a feeder and distributing device in such a way to adjust a feeding and discharging angle of the distributer in a two-stage manner upon object feeding and discharging, allowing the robotic arm to grip material pieces conveniently, thereby decreasing the cost and increasing the processing speed.