A charge amplifier includes: an input line through which an electric charge signal is propagated; an integration circuit including an input terminal coupled to the input line and an output terminal that outputs the voltage signal; a reset switch configured to reset the voltage signal by closing between the input terminal and the output terminal; a leakage current correction circuit including a first resistance circuit and a first switch coupled in series in this order between a first node, which has a first potential different from a potential of the input line, and the input line; and a control circuit configured to control the first switch based on the voltage signal so as to cancel at least a part of a leakage current flowing through the integration circuit.

A remote control robot system includes a slave arm, a master main body imitating the shape of an object handled by the slave arm, a manipulation receiving device configured to receive manipulation of an operator based on the position and posture of the master main body, and a control device configured to control operation of the slave arm based on the manipulation received by the manipulation receiving device so that behavior of the object corresponds to behavior of the master main body.

A remote-control manipulator system includes a manipulator configured to receive a manipulating instruction from an operator, a slave arm configured to perform a series of works comprised of a plurality of processes, a camera configured to image operation of the slave arm, a display device configured to display an image captured by the camera, a storage device configured to store information related to environment in a workspace as an environment model, and a control device. The control device is configured, while operating the slave arm manually or hybridly, to acquire circumference information that is information related to a circumference area of an area imaged by the camera based on the environment model stored in the storage device, and display on the display device so that the image captured by the camera and the circumference information are interlocked.

A force detecting device having a first axis and a second axis orthogonal to each other, the first axis being a force detection axis, the force detecting device including a laminated body formed by laminating a first electrode, a first quartz plate, a second electrode, a second quartz plate, a third electrode, a third quartz plate, a fourth electrode, a fourth quartz plate, and a fifth electrode in this order and a force detection circuit configured to detect a force in a direction of the first axis based on an electric charge output from the second electrode and an electric charge output from the fourth electrode.

A procedure for measuring a measured variable in a process step of a manufacturing process uses a measurement chain with an evaluation unit and a plurality of measurement units having a sensor, a converter unit and a secondary antenna. The evaluation unit has a primary antenna. A measurement unit is positioned for measuring the measured variable and automatically coupled to the evaluation unit by establishing a transmission connection between the secondary antenna and the primary antenna. The sensor automatically generates measurement signals indicative of the measured variable. The converter unit automatically converts the measurement signals into measurement data, which the secondary antenna automatically transmits to the primary antenna.

A remote control robot system includes a master arm, and a slave arm having a plurality of control modes of an automatic mode in which the slave arm operates based on a prestored task program and a manual mode in which the slave arm operates based on manipulation of an operator received by the master arm. The master arm includes one or more motors configured to drive joints of the master arm, and a motor actuator configured to generate a torque instruction value that operates the joints according to an external force applied to the master arm and gives drive current corresponding to the torque instruction value to the motor. The motor actuator generates, when the control mode is the manual mode, the torque instruction value so that the joints operate according to the external force while resisting a frictional force of the motor.

A remote-control manipulator system which includes a manipulator, a slave arm installed in a workspace and configured to perform a series of works comprised of a plurality of processes, a situation information acquisition device configured to acquire situation information indicating a situation of the slave arm, an environment reproducing device configured to reproduce, in a space where the manipulator is installed, environment information relating to an environment in the workspace, and a control device. The control device is configured to cause the environment reproducing device to reproduce the environment information corresponding to the situation information outputted from the situation information acquisition device.

A remote control robot system is provided, which includes robotic arm configured to perform a given work, remote control device for an operator to remotely manipulate operation of robotic arm, plurality of cameras configured to image the work of robotic arm, monitor configured to display a captured image that is sent, camera selecting device configured to generate, in response to receiving an operator's selection of one camera from the plurality of cameras, camera selection information for switching captured image displayed on monitor to captured image from selected camera, storage device configured to store information where operational information related to operation of robotic arm in work is associated with camera selection information, as automatic switching information, and an image processor configured to send to monitor the captured image from camera selected from plurality of cameras based on automatic switching information stored in storage device.

A sensor device includes a base body including a recess, a lid body configured to close an opening of the recess, a force detection element disposed in the recess and configured to output an electric charge according to a received external force, and an electronic component disposed in the recess and electrically connected to the force detection element. A separation distance between the electronic component and the lid body is larger than a separation distance between the force detection element and the lid body in the thickness direction of the lid body.

A sensor device includes a base body including a recess, a lid body configured to close an opening of the recess, a force detection element disposed in the recess and including a first element that outputs a first signal according to an external force in a first axis and a second element that stacks on the first element and outputs a second signal according to an external force in a second axis; a first circuit disposed in the recess and configured to process the first signal, and a second circuit disposed in the recess and configured to process the second signal.