A force detection apparatus includes a first member, a second member, a piezoelectric sensor device sandwiched by the first member and the second member and outputting electric charge according to an external force, and a conversion and output circuit converting an electric charge output from the piezoelectric sensor device into a voltage and outputting the voltage. When a detectable range of a component of the external force in a predetermined axis direction is a first range, the external force is detected within the first range. When the detectable range is a second range different from the first range, the external force is detected within the second range.

Robot system which includes a master device configured to receive an operating instruction from an operator, slave arm, storage device configured to store operating sequence information that defines processing carried out by slave arm, and control device configured to control operation of slave arm. Control device includes a receiver configured to receive an input signal, motion controller configured to determine whether operating mode of slave arm is to be automatic, manual or correctable automatic mode and control operation of slave arm in determined operating mode, and continuation determinator configured to determine whether continuation of automatic mode is permitted. In a process at which slave arm is scheduled to operate in automatic mode, after motion controller suspends operation of slave arm in automatic mode at a given step of process, continuation determinator determines whether continuation of automatic mode is permitted based on input signal received by receiver when operation is suspended.

A robot main body having a robotic arm, a remote control device which includes a robotic arm operational instruction input part installed outside of a working area and by which an operational instruction for the robotic arm is inputted, and a contactless action detecting part configured to detect a contactless action including at least one given operating condition parameter change instructing action by an operator, a control device communicably connected to the remote control device and configured to control operation of the robot main body.

A grasping device is shown, which includes an end of arm tool attached to a moving frame. The end of arm tool has two opposing soft tracks which are independently operated by motors. The soft tracks close and on objects being picked up and move the objects into a secure position.

A sensor arrangement for measuring at least one component of a force or a torque includes a sensor assembly having a first contact structure and a second contact structure, between which the at least one component of the force or torque is to be measured, and a plurality of sensor elements. The plurality of sensor elements are each connected by way of a first joint to the first contact structure and by way of a second joint to the second contact structure and configured to measure the component of force or torque between the first contact structure and the second contact structure. The first contact structure, the second contact structure and the plurality of sensor elements form a rolled-up structure that extends like a jacket along a surface of the sensor arrangement.

Embodiments described herein generally relate to an apparatus and method of performing a robot calibration process within a substrate processing system. In one embodiment, a calibration device is used to calibrate a robot having an end effector. The calibration device includes a body, a first side and a second side opposite to the first side. The calibration device further includes a sensor disposed on the second side of the body. In some embodiments, the sensor covers the entire second side of the body. In this configuration, because the sensor covers the entire second side of the body of the calibration device, the calibration device can be utilized to sense the contact between the sensor and various differently configured chamber components found in different types of processing chambers or stations disposed within a processing system during a calibration process performed in each of the different processing chambers or stations.

A force detection apparatus includes a plurality of piezoelectric sensor parts placed around a first axis, and two fastening portions provided in correspondence with the piezoelectric sensor parts and applying precompression to the corresponding piezoelectric sensor part, wherein the two fastening portions are placed so that the piezoelectric sensor part may be located between the portions along a direction of the first axis. Further, four of the piezoelectric sensor parts are provided around the first axis. Furthermore, the plurality of piezoelectric sensor parts has a plurality of piezoelectric substrates.

An apparatus for handling microelectronic devices comprises a pick arm having a pick surface configured for receiving a microelectronic device thereon, drives for moving the pick arm and reorienting the pick surface in the X, Y and Z planes and about a horizontal rotational axis and a vertical rotational axis, and a sensor device carried by the pick arm and configured to detect at least one of at least one magnitude of force and at least one location of force applied between the pick surface and a structure contacted by the pick surface or a structure and a microelectronic device carried on the pick surface.

A force detection device includes: a force sensor that has a piezoelectric element receiving a force and outputting a charge; a pre-compression unit that pre-compresses the force sensor; and a conversion output circuit that receives the charge from the force sensor and outputs a voltage. The pre-compression unit is short-circuited with a first ground of the conversion output circuit. The pre-compression unit has the same potential as the first ground. The force detection device includes a casing that accommodates the force sensor and the conversion output circuit. The casing is short-circuited with a second ground.

To obtain a force detection device and a robot light in weight and having excellent detection accuracy, a force detection device includes a first member, a second member joined to the first member, and a piezoelectric element joined to the second member. A material forming the first member is different from a material forming the second member. The first member is formed in a plate shape. The piezoelectric element and the second member are disposed at an end portion of the first member. A through-hole is formed in the center portion of the first member.