A front end conveyor includes a frame having a first side and a second side, a lower deck and an upper deck. The lower deck includes a plurality of sheet supports, and upper portions of the sheet supports lie in a first plane. The upper deck includes a plurality of sheet guides, and the plurality of sheet supports and the plurality of sheet guides define therebetween a sheet transport path for moving sheets in a sheet transport direction toward the downstream end of the front end conveyor. A transverse scrap conveyor is mounted below the lower deck to carry scrap in a direction perpendicular to the sheet transport direction. The transverse scrap conveyor is secured to and supported by the frame such that the transverse scrap conveyor is movable with the frame as a unit.

A processing apparatus includes a holding table including a holding surface that holds a back surface side of a substrate and a processing unit that processes the substrate held on the holding surface. The holding surface includes a holding section that holds a central region of the substrate, a discharge groove that surrounds the holding section, and an outer circumferential groove that surrounds the discharge groove and communicates with a suction source to hold under suction the substrate. The processing apparatus uses the discharge groove to collect processing swarf produced by the processing unit.