Patent classifications
B29C43/58
Mold Compound Dispensing System and Method
A molding compound dispensing system identifies a semiconductor device strip having a substrate with a plurality of segments allocated for die stacks. The system obtains topological data of the identified semiconductor device strip for each of the segments, including data indicative of any semiconductor components in each respective segment. The system determines an amount of molding compound to be applied to each of the segments based on the topological data for each respective segment, and causes a molding compound dispenser to dispense the determined amounts of molding compound at each of the segments.
Mold Compound Dispensing System and Method
A molding compound dispensing system identifies a semiconductor device strip having a substrate with a plurality of segments allocated for die stacks. The system obtains topological data of the identified semiconductor device strip for each of the segments, including data indicative of any semiconductor components in each respective segment. The system determines an amount of molding compound to be applied to each of the segments based on the topological data for each respective segment, and causes a molding compound dispenser to dispense the determined amounts of molding compound at each of the segments.
MANAGEMENT SYSTEM AND MANAGEMENT METHOD
A management system includes: a tag given to structures including at least one of a pattern, a molding board, and a molding flask; a storage device; and a control device, wherein the control device is configured to store, in the storage device, collected data and management information being associated with each other, and when a predetermined condition is met in a case where the mold is transferred from a first position to a second position, associate the collected data with management information at the second position based on the information read from the tag, and the predetermined condition is met when the mold having been transferred to the first position along with the structure given the tag is not transferred to the second position along with the structure given the tag, or when the mold is combined with the structure given the tag at the second position.
MANAGEMENT SYSTEM AND MANAGEMENT METHOD
A management system includes: a tag given to structures including at least one of a pattern, a molding board, and a molding flask; a storage device; and a control device, wherein the control device is configured to store, in the storage device, collected data and management information being associated with each other, and when a predetermined condition is met in a case where the mold is transferred from a first position to a second position, associate the collected data with management information at the second position based on the information read from the tag, and the predetermined condition is met when the mold having been transferred to the first position along with the structure given the tag is not transferred to the second position along with the structure given the tag, or when the mold is combined with the structure given the tag at the second position.
Imprint apparatus, planarized layer forming apparatus, forming apparatus, control method, and method of manufacturing article
An imprint apparatus for bringing a mold and an imprint material on a substrate into contact with each other and performing imprint processing for forming a pattern of the imprint material is provided. The apparatus comprises a supplier configured to supply the imprint material on the substrate in accordance with a supply pattern of the imprint material, and a controller configured to control the supplier, wherein the controller obtains a contact timing as a timing at which the mold and the imprint material are brought into contact with each other at each of a plurality of positions of the mold, and determines the supply pattern based on the obtained contact timing.
Imprint apparatus, planarized layer forming apparatus, forming apparatus, control method, and method of manufacturing article
An imprint apparatus for bringing a mold and an imprint material on a substrate into contact with each other and performing imprint processing for forming a pattern of the imprint material is provided. The apparatus comprises a supplier configured to supply the imprint material on the substrate in accordance with a supply pattern of the imprint material, and a controller configured to control the supplier, wherein the controller obtains a contact timing as a timing at which the mold and the imprint material are brought into contact with each other at each of a plurality of positions of the mold, and determines the supply pattern based on the obtained contact timing.
DEVICE FOR PRODUCING AND SMOOTHING PLASTIC FILMS OR PLASTIC PLATES
The smoothing device for plastic films comprises plastic-melt-producing means (1, 5), an adjustable slit die (10) and a roller smoothing unit (16) having cooled smoothing rollers (11, 12), which form an adjustable smoothing gap (13) between each other. Optionally, further rollers (15) are arranged downstream. A thickness gauge (23) measures the thickness of the plastic-film web (22). A controller (30) for controlling the thickness of the plastic-film web (22) may set a setpoint thickness (SD) of the plastic-film web (22) and the volumetric flow rate (SS) of the plastic melt or the line speed (LS). The controller (30) captures the current torques and rotational speeds of the rollers (11, 12, 15) and the current thickness (FD, FD1-FDn) of the plastic-film web (22).
The controller (30) sends setpoint rotational speed signals (C0S, C2S-CnS, CAS) calculated from the captured torques of the rollers (11, 12, 15) to the drives of the rollers and a smoothing-gap setpoint distance signal (GW) for adjusting the smoothing gap (13), and furthermore—in the case of a specified line speed (LS)—setpoint plastic-melt volumetric flow rate signals (SS) to the plastic-melt-producing means, or—in the case of a specified plastic-melt volumetric flow rate (SS)—setpoint line speed signals (LS) to the drives of the rollers (12).
DEVICE FOR PRODUCING AND SMOOTHING PLASTIC FILMS OR PLASTIC PLATES
The smoothing device for plastic films comprises plastic-melt-producing means (1, 5), an adjustable slit die (10) and a roller smoothing unit (16) having cooled smoothing rollers (11, 12), which form an adjustable smoothing gap (13) between each other. Optionally, further rollers (15) are arranged downstream. A thickness gauge (23) measures the thickness of the plastic-film web (22). A controller (30) for controlling the thickness of the plastic-film web (22) may set a setpoint thickness (SD) of the plastic-film web (22) and the volumetric flow rate (SS) of the plastic melt or the line speed (LS). The controller (30) captures the current torques and rotational speeds of the rollers (11, 12, 15) and the current thickness (FD, FD1-FDn) of the plastic-film web (22).
The controller (30) sends setpoint rotational speed signals (C0S, C2S-CnS, CAS) calculated from the captured torques of the rollers (11, 12, 15) to the drives of the rollers and a smoothing-gap setpoint distance signal (GW) for adjusting the smoothing gap (13), and furthermore—in the case of a specified line speed (LS)—setpoint plastic-melt volumetric flow rate signals (SS) to the plastic-melt-producing means, or—in the case of a specified plastic-melt volumetric flow rate (SS)—setpoint line speed signals (LS) to the drives of the rollers (12).
Driving apparatus, lithography apparatus, and method of manufacturing an article
A driving apparatus is disclosed which has a movable part, a measuring device measuring a position of the movable part, two actuators respectively generating two thrusts which have a common axis of action thereof with respect to the movable part, and a controller that controls the position by the two actuators based on output of the measuring device. The controller obtains information of at least one of a thrust constant of one of the two actuators, a thrust constant of the other of the actuators, and rigidity of a member which supports the movable part with respect to the axis of action, based on a relationship between disturbance force estimated from thrust commands for the two actuators and an output of the measuring device in a case where the one actuator generates a thrust and the other actuator controls the position, and a thrust command for the one actuator.
Driving apparatus, lithography apparatus, and method of manufacturing an article
A driving apparatus is disclosed which has a movable part, a measuring device measuring a position of the movable part, two actuators respectively generating two thrusts which have a common axis of action thereof with respect to the movable part, and a controller that controls the position by the two actuators based on output of the measuring device. The controller obtains information of at least one of a thrust constant of one of the two actuators, a thrust constant of the other of the actuators, and rigidity of a member which supports the movable part with respect to the axis of action, based on a relationship between disturbance force estimated from thrust commands for the two actuators and an output of the measuring device in a case where the one actuator generates a thrust and the other actuator controls the position, and a thrust command for the one actuator.