A method includes applying a polymer to a mold, the mold having microstructures with the polymer flowing into the microstructures when applied to the mold. The method includes pressing an inorganic substrate onto the polymer. The method includes curing the polymer to fix the polymer to the inorganic substrate to form an optical element from the polymer and the inorganic substrate, the optical element having microstructures formed by the microstructures in the mold. The method includes releasing the optical element from the mold.

Methods are disclosed for fabricating molds for forming eyepieces having waveguides with integrated spacers. The molds are formed by etching deep holes (e.g., 5 μm to 1000 μm deep) into a substrate using a wet etch or dry etch. The etch masks for defining the holes may be formed with a thick metal layer and/or multiple layers of different metals. A resist layer may be disposed over the etch mask. The resist layer may be patterned to form a pattern of holes, the pattern may be transferred to the etch mask, and the etch mask may be used to transfer the pattern into the underlying substrate. The patterned substrate may be utilized as a mold onto which a flowable polymer may be introduced and allowed to harden. Hardened polymer in the holes may form integrated spacers. The hardened polymer may be removed from the mold to form a waveguide with integrated spacers.

An optical device comprising an optical hydrogel with select regions that have been irradiated with laser light having a pulse energy from 0.01 nJ to 50 nJ and a wavelength from 600 nm to 900 nm. The irradiated regions are characterized by a positive change in refractive index of from 0.01 to 0.06, and exhibit little or no scattering loss. The optical hydrogel is prepared with a hydrophilic monomer.

A method for manufacturing an optical element includes the steps of: providing a first material including a precursor of a first energy curable resin which contains fine particles of a transparent conductive material on a transparent substrate, curing the first material by light irradiation, and performing a heat treatment on the cured first material. In the method described above, the cured first material processed by the heat treatment is again processed by light irradiation.

The invention concerns a method of manufacturing a height-modulated optically diffractive grating. The method comprises providing a substrate and manufacturing a plurality of temporary elements of first material onto the substrate, the elements being separated by gaps and arranged as a periodic structure comprising at least two periods having different element heights. A coating layer of second material is deposited on the plurality of temporary elements such that the coating layer fills said gaps and covers said temporary elements. Then, a uniform layer of the second material is removed in order to expose said temporary elements and the first material is removed in order to form a height modulated pattern of the second material onto the substrate as the optically diffractive grating. The invention relaxes manufacturing constraints when manufacturing gratings with locally varying diffraction efficiency.

The invention concerns a method of manufacturing a master plate for fabrication of diffractive structures, and a corresponding master plate. The method comprises providing a substrate comprising a stack of selective etch layers and providing an etch mask layer on the substrate. Further, the method comprises etching the substrate in a multi-step etching process by exposing the substrate piecewise at different mask zones of the mask layer and using said selective etch layers to produce to the substrate a height-modulated surface profile defined by the mask zones in lateral dimensions and by said stack in height dimension of the substrate, and, finally, providing a height-modulated master grating onto the surface profile, the height modulation of the master grating being at least partly defined by said surface profile of the substrate.

A method of manufacturing an optical component having micro-structures is described. The method detects a crystallization temperature within a crystallization temperature interval for fully filling the molding material into a mold cavity to rapidly produce the optical element having a micro-structure with a large area.

A diffractive optical element is provided that includes at least two layers with different etching speeds for dry etching process. The diffractive optical element has a substrate of glass and a microstructure layer arranged on the substrate. The ratio of dry etching speed in thickness direction of the substrate to that of the microstructure layer is no more than 1:2 so that the substrate functions as an etching stop layer. The ratio of dry etching speed in horizontal direction of the substrate is substantially equal to that of the microstructure layer. The composition of glass includes, but is not limited to, Al.sub.2O3, alkaline material (M.sub.2O) and alkaline earth material (MO), where the weight percentage of Al.sub.2O.sub.3+M.sub.2O+MO>=5%.

Color-selective waveguides, methods for fabricating color-selective waveguides, and augmented reality (AR)/mixed reality (MR) applications including color-selective waveguides are described. The color-selective waveguides can advantageously reduce or block stray light entering a waveguide (e.g., red, green, or blue waveguide), thereby reducing or eliminating back-reflection or back-scattering into the eyepiece.

Methods of producing gratings with trenches having variable height are provided. In one example, a method of forming a diffracted optical element may include providing an optical grating layer over a substrate, patterning a hardmask over the optical grating layer, and forming a sacrificial layer over the hardmask, the sacrificial layer having a non-uniform height measured from a top surface of the optical grating layer. The method may further include etching a plurality of angled trenches into the optical grating layer to form an optical grating, wherein a first depth of a first trench of the plurality of trenches is different than a second depth of a second trench of the plurality of trenches.