There is provided an MEMS device in which a first substrate provided with a driving element and a second substrate protecting the driving element are bonded to each other with an adhesive, in which the driving element is formed inside the space surrounded by the adhesive between the first substrate and the second substrate, an open hole which communicates with the space and the outside of the adhesive is formed on the adhesive, and an end of the outside of the open hole is provided to be with an end of the first substrate and an end of the second substrate.

A head chip, a liquid jet head, and a liquid jet recording device each capable of increasing pressure generated while achieving power saving are provided. The head chip according to an aspect of the present disclosure includes a flow channel member, an actuator plate, and drive electrodes. The drive electrodes include a first electrode disposed on a first surface of the actuator plate so as to overlap one of a pressure chamber and a partition wall when viewed from a first direction, a second electrode which is disposed on the first surface of the actuator plate so as to be adjacent to the first electrode, and which generates a potential difference from the first electrode, and a first opposed electrode which is individually disposed on a second surface of the actuator plate at a position opposed to the first electrode, and which generates a potential difference from the first electrode.

A liquid discharge head includes a pressure chamber substrate that is provided with a plurality of pressure chambers, a piezoelectric body that is driven to apply pressure to liquid in the pressure chambers, an upper electrode that is provided above the piezoelectric body for applying a voltage to the piezoelectric body, a lower electrode that is provided below the piezoelectric body for applying a voltage to the piezoelectric body, a detection resistor that is provided below the piezoelectric body for detecting temperature of the liquid in the pressure chambers, and a first wiring portion that is electrically coupled to the detection resistor. The first wiring portion includes a first part that is extended above the piezoelectric body, and a second part that is provided in at least a part of a through hole penetrating the piezoelectric body and electrically coupled to the detection resistor.

According to an example, a base, a diaphragm, and a driving element are provided. The driving element includes a first electrode disposed on a second surface of the diaphragm, a second electrode opposing the first electrode, and a piezoelectric body interposed between the first electrode and the second electrode. In addition, an inter-wiring insulating film that covers the second surface of the diaphragm and the driving element, and an extracting electrode which is on the inter-wiring insulating film, are further provided. The inter-wiring insulating film includes a contact hole that exposes a part of the second electrode and through which the second electrode and the extracting electrode contact each other. The contact hole is disposed at a position which aligned with a solid portion of a circumferential wall of the pressure chamber in the base.

An ink jet apparatus includes: a head that discharges liquid; a circuit substrate that has a drive circuit for driving the head; a heat sink which has a part that is in direct or indirect contact with the circuit substrate and is able to dissipate heat generated in the circuit substrate; and a fan that generates air flow capable of cooling the heat sink. The heat sink is configured such that the air flow is not directly blown against the drive circuit and such that the air flow having changed a direction after blown against the heat sink is not blown against the drive circuit.

Provided is a liquid ejecting head which includes a head main body which has liquid ejection surface through which liquid is ejected, a flexible wiring substrate which is connected to the head main body, and a flow-path member having flow path through which liquid is supplied to the head main body. The flow-path member has an opening portion through which the substrate is inserted. The substrate extends to the flow-path member, with respect to the head main body. The substrate is inclined in a direction directed toward a first surface side of both surfaces of the substrate. In an area on a second surface side of both surfaces of the substrate, the flow path has a portion extending along the head main body.

Provided is a liquid ejecting head which includes a head main body which has liquid ejection surface through which liquid is ejected, a flexible wiring substrate which is connected to the head main body, and a flow-path member having flow path through which liquid is supplied to the head main body. The flow-path member has an opening portion through which the substrate is inserted. The substrate extends to the flow-path member, with respect to the head main body. The substrate is inclined in a direction directed toward a first surface side of both surfaces of the substrate. In an area on a second surface side of both surfaces of the substrate, the flow path has a portion extending along the head main body.

A fluidic die includes fluid chambers, each including an electrode exposed to an interior of the fluid chamber and each having a corresponding fluid actuator operating at a high voltage. The fluidic die further includes monitoring circuitry, operating at a low voltage relative to the fluid actuator, to monitor a condition of each fluid chamber, for each chamber the monitoring circuitry including a connection structure and a select transistor and a pulldown transistor connected to the electrode via the connection structure. The connection structure and select and pulldown transistors together structured to form electrically conductive paths with electrical resistances to protect at least the select transistor from fault damage if the high voltage fluid actuator short-circuits to the electrode.

A liquid discharge head includes: individual channel rows; a common channel; a supply port via which liquid is supplied to the common channel; and a discharge port via which the liquid is discharged from the common channel. Each of the individual channel rows is formed of individual channels aligned in a first direction, each of the individual channels includes a nozzle, and the individual channel rows are arranged in a second direction crossing the first direction. The common channel extends in the first direction, and extends in the second direction over an entire length of an area in which the individual channel rows are arranged. The common channel overlaps with the individual channel rows in a third direction orthogonal to both of the first and second directions, and communicates with the individual channels constructing each of the individual channel rows.

Aspects are directed to techniques for fabricating a microfluidic device on a substrate. In a particular example, a method of manufacturing a microfluidic device includes growing a thermal oxide layer on a substrate and depositing a dielectric layer, including doped a dielectric film, over the thermal oxide layer. Next, an aperture defined by a dielectric wall which forms part of the dielectric layer is formed in the dielectric layer by selectively removing the dielectric film. Finally, the aperture is sealed with a sealing film to prevent the dielectric film from being exposed to a fluid contained in the aperture. The sealing film may be of an electrically insulating material resistive to corrosive attributes of the fluid contained in the aperture.