A bipolar junction transistor includes an intrinsic base formed on a substrate. The intrinsic base includes a superlattice stack including a plurality of alternating layers of semiconductor material. A collector and emitter are formed adjacent to the intrinsic base on opposite sides of the base. An extrinsic base structure is formed on the intrinsic base.

A horizontal current bipolar transistor comprises a substrate of first conductivity type, defining a wafer plane parallel to said substrate; a collector drift region above said substrate, having a second, opposite conductivity type, forming a first metallurgical pn-junction with said substrate; a collector contact region having second conductivity type above said substrate and adjacent to said collector drift region; a base region comprising a sidewall at an acute angle to said wafer plane, having first conductivity type, and forming a second metallurgical pn-junction with said collector drift region; and a buried region having first conductivity type between said substrate and said collector drift region forming a third metallurgical pn-junction with the collector drift region. An intercept between an isometric projection of said base region on said wafer plane and an isometric projection of said buried region on said wafer plane is smaller than said isometric projection of said base region.

A bipolar junction transistor includes a first well region having a first conductive type, a second well region disposed adjacent to the first well region and having a second conductive type, an emitter disposed on the first well region and having the second conductive type, a base disposed on the first well region and having the first conductive type, a collector disposed on the second well region and having the second conductive type, and device isolation regions disposed among the emitter, the base and the collector. Particularly, the emitter, the base and the collector are spaced apart from the device isolation regions.

A bipolar junction transistor comprises a semiconductor layer disposed on an insulating material, at least a portion of the semiconductor layer forming a base region. The bipolar junction transistor further comprises a transistor emitter laterally disposed on a first side of the base region, where in the transistor emitter is a first doping type and has a first width, and wherein the first width is a lithographic feature size. The bipolar junction transistor further comprises a transistor collector laterally disposed on a second side of the base region, wherein the transistor collector is the first doping type and the first width. The bipolar junction transistor further comprises a central base contact laterally disposed on the base region between the transistor emitter and the transistor collector, wherein the central base contact is a second doping type and has a second width, and wherein the second width is a sub-lithographic feature size.

The present invention relates to vertical integrated, quantized FET with sharp drain and BJT with sharp emitter implemented in one nano-BiCMOS process, using multiple identical single crystalline semiconductor pyramids, placed in-situ directly on the surface of diffusion regions. The devices' gate and base structures are formed at a level of 35-45 nm below the top of the pyramids. The bottom region of the pyramids contains the collector/source structures, while the top region of the pyramids contains the emitter/drain structures. The base structure for BJT is formed by selective epitaxial growth of SiSi.sub.xGe.sub.1-xSi with opposite conductivity type as COR, and interconnected by a horizontal polysilicon grid. The self-aligned gate structure for FET is formed by high dopant implantation of impurity with the same type of conductivity as COR through horizontal gate bridge, which represent a grid of horizontal stacked layers Si.sub.3N.sub.4 high-k insulatorpolysiliconhigh-k insulatorSi.sub.3N.sub.4.

A lateral bipolar junction transistor (LBJT) device that may include a dielectric stack including a pedestal of a base region passivating dielectric and a nucleation dielectric layer; and a base region composed of a germanium containing material or a type III-V semiconductor material in contact with the pedestal of the base region passivating dielectric. An emitter region and collector region may be present on opposing sides of the base region contacting a sidewall of the pedestal of the base region passivating dielectric and an upper surface of the nucleation dielectric layer.

A semiconductor device comprising an electrostatic discharge, ESD, protection device, the ESD protection device comprising a first PNP cell comprising: a substrate comprising a n-doped buried layer, NBL, extending laterally at a surface of the substrate, wherein the NBL comprises a first NBL portion, a second NBL portion and a third NBL portion laterally arranged at the surface of the substrate with the second NBL portion positioned between the first NBL portion and the third NBL portion, wherein the second NBL portion has a second n-doping level that is less than a first n-doping level of the first NBL portion and less than a third n-doping level of the third NBL portion; an epitaxial layer arranged on the surface of the substrate and comprising a PNP device comprising: a first p-doped region; a second p-doped region; and a n-doped region positioned between the first p-doped region and the second p-doped region, wherein the first p-doped region is aligned with the second NBL portion.

A bipolar junction transistor includes an intrinsic base formed on a substrate. The intrinsic base includes a superlattice stack including a plurality of alternating layers of semiconductor material. A collector and emitter are formed adjacent to the intrinsic base on opposite sides of the base. An extrinsic base structure is formed on the intrinsic base.

A bipolar junction transistor comprises a semiconductor layer disposed on an insulating material, at least a portion of the semiconductor layer forming a base region. The bipolar junction transistor further comprises a transistor emitter laterally disposed on a first side of the base region, where in the transistor emitter is a first doping type and has a first width, and wherein the first width is a lithographic feature size. The bipolar junction transistor further comprises a transistor collector laterally disposed on a second side of the base region, wherein the transistor collector is the first doping type and the first width. The bipolar junction transistor further comprises a central base contact laterally disposed on the base region between the transistor emitter and the transistor collector, wherein the central base contact is a second doping type and has a second width, and wherein the second width is a sub-lithographic feature size.

A method of forming a semiconductor structure includes providing an emitter and a collector on a surface of an insulator layer. The emitter and the collector are spaced apart and have a doping of a first conductivity type. An intrinsic base is formed between the emitter and the collector and on the insulator layer by epitaxially growing the intrinsic base from at least a vertical surface of the emitter and a vertical surface of the collector. The intrinsic base has a doping of a second conductivity type opposite to the first conductivity type, and a first heterojunction exists between the emitter and the intrinsic base and a second heterojunction exists between the collector and the intrinsic base.