A semiconductor device having a low on-voltage of IGBT and a small reverse recovery current of the diode is provided. The semiconductor device includes a semiconductor substrate having a gate trench and a dummy trench. The semiconductor substrate includes emitter, body, barrier and pillar regions between the gate trench and the dummy trench. The emitter region is an n-type region being in contact with the gate insulating film and exposed on a front surface. The body region is a p-type region being in contact with the gate insulating film at a rear surface side of the emitter region. The barrier region is an n-type region being in contact with the gate insulating film at a rear surface side of the body region and in contact with the dummy insulating film. The pillar region is an n-type region connected to the front surface electrode and the barrier region.

A semiconductor package in an embodiment includes a semiconductor device which has a first semiconductor element, a second semiconductor element, and a common first electrode between the first and second semiconductor elements. A second electrode is electrically connected to the first semiconductor element. A third electrode extends through the second semiconductor element and electrically connects to the first electrode. A fourth electrode is electrically connected to the second semiconductor element. A first terminal of the package is electrically connected to the third electrode. A second terminal of the package is electrically connected to the second electrode and the fourth electrode. An insulating material surrounds the semiconductor device.

A method is provided for forming a metal-insulator-metal capacitor in a replacement metal gate module. The method includes providing a gate cap formed on a gate. The method further includes removing a portion of the gate cap and forming a recess in the gate. A remaining portion of the gate forms a first electrode of the capacitor. The method also includes depositing a dielectric on remaining portions of the gate cap and the remaining portion of the gate. The method additionally includes depositing a conductive material on the dielectric. The method further includes removing a portion of the conductive material and portions of the dielectric to expose a remaining portion of the conductive material and a remaining portion of the dielectric. The remaining portion of the conductive material forms a second electrode of the capacitor. The remaining portion of the dielectric forms an insulator of the capacitor.

A switched-capacitor DC-to-DC converter includes a logic cell and a capacitor cell vertically overlapping with the logic cell. The logic cell has a plurality of active elements disposed over a first substrate. The capacitor cell has a capacitor over a second substrate. A first interlayer insulation layer disposed over the first substrate is bonded to a second interlayer insulation layer disposed over the second substrate. A first through via connected to any one of interconnection patterns of the logic cell and a second through via connected to a lower electrode pattern of the capacitor cell are connected to each other through a first external circuit pattern. A third through via connected to an upper electrode pattern of the capacitor cell and a fourth through via connected to another one of the interconnection patterns of the logic cell are connected to each other through a second external circuit pattern.

A semiconductor structure is provided that includes an electrostatic discharge (ESD) device integrated on the same semiconductor substrate as semiconductor fin field effect transistors (FinFETs). The ESD device includes a three-dimension (3D) wrap-around PN diode connected to the semiconductor substrate. The three-dimension (3D) wrap-around PN diode has an increased junction area and, in some applications, improved heat dissipation.

The improvement of the reliability of a semiconductor device having a split gate type MONOS memory is implemented. An ONO film and a second polysilicon film are sequentially formed so as to fill between a first polysilicon film and a dummy gate electrode. Then, the dummy gate electrode is removed. Then, the top surfaces of the first and second polysilicon films are polished, thereby to form a memory gate electrode formed of the second polysilicon film at the sidewall of a control gate electrode formed of the first polysilicon film via the ONO film. As a result, the memory gate electrode high in perpendicularity of the sidewall, and uniform in film thickness is formed.

A semiconductor integrated circuit includes a substrate, a multi-gate transistor device positioned on the substrate, and an LDMOS device positioned on the substrate. The substrate includes a plurality of first isolation structures and a plurality of second isolation structures. A depth of the first isolation structures is smaller than a depth of the second isolation structures. The multi-gate transistor device includes a plurality of first fin structures and a first gate electrode. The first fin structures are parallel with each other and spaced apart from each other by the first isolation structures. The first gate electrode is intersectionally arranged with the first fin structures, and covers a portion of each first fin structure. The LDMOS device includes a second gate electrode covering on the substrate. The LDMOS device is electrically isolated from the multi-gate transistor device by another second isolation structure.

The disclosed technology relates to semiconductors, and more particularly to a junction field effect transistor (JFET). In one aspect, a method of fabricating a JFET includes forming a well of a first dopant type in a substrate, wherein the well is isolated from the substrate by an isolation region of a second dopant type. The method additionally includes implanting a dopant of the second dopant type at a surface of the well to form a source, a drain and a channel of the JFET, and implanting a dopant of the first dopant type at the surface of the well to form a gate of the JFET. The method additionally includes, prior to implanting the dopant of the first type and the dopant of the second type, forming a pre-metal dielectric (PMD) layer on the well and forming contact openings in the PMD layer above the source, the drain and the gate. The PMD layer has a thickness such that the channel is formed by implanting the dopant of the first type and the dopant of the second type through the PMD layer. The method further includes, after implanting the dopant of the first type and the dopant of the second type, siliciding the source, the drain and the gate, and forming metal contacts in the contact openings.

Field-plate structures are disclosed for electrical field management in semiconductor devices. A field-plate semiconductor device comprises a semiconductor substrate, a first ohmic contact and a second ohmic contact disposed over the semiconductor substrate, one or more coupling capacitors, and one or more capacitively-coupled field plates disposed over the semiconductor substrate between the first ohmic contact and the second ohmic contact. Each of the capacitively-coupled field plates is capacitively coupled to the first ohmic contact through one of the coupling capacitors, the coupling capacitor having a first terminal electrically connected to the first ohmic contact and a second terminal electrically connected to the capacitively-coupled field plate.

Integrated circuits and methods of producing the same are provided. In an exemplary embodiment, an integrated circuit includes a substrate with an active layer overlying a buried insulator layer that in turn overlies a handle layer, where the active layer includes a first active well. A first source, a first drain, and a first channel are defined within the first active well, where the first channel is between the first source and the first drain. A first gate dielectric directly overlies the first channel, and a first gate directly overlies the first gate dielectric, where a first capacitor includes the first source, the first drain, the first channel, the first gate dielectric, and the first gate. A first handle well is defined within the handle layer directly underlying the first channel and the buried insulator layer.