Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a memory cell included in a memory cell string; the memory cell including charge storage structure and channel structure separated from the charge storage structure by a dielectric structure; a first control gate associated with the memory cell and located on a first side of the charge storage structure and a first side of the channel structure; and a second control gate associated with the memory cell and electrically separated from the first control gate, the second control gate located on a second side of the charge storage structure and a second side of the channel structure.

A memory cell of a charge-trapping non-volatile memory includes a semiconductor substrate, a well region, a first doped region, a second doped region, a gate structure, a protecting layer, a charge trapping layer, a dielectric layer, a first conducting line and a second conducting line. The first doped region and the second doped region are formed under a surface of the well region. The gate structure is formed over the surface of the well region. The protecting layer formed on the surface of the well region. The charge trapping layer covers the surface of the well region, the gate structure and the protecting layer. The dielectric layer covers the charge trapping layer. The first conducting line is connected with the first doped region. The second conducting line is connected with the second doped region.

A memory can have a stacked memory array that can have a plurality of levels of memory cells. Each respective level of memory cells can be commonly coupled to a respective access line. A plurality of drivers can be above the stacked memory array. Each respective driver can have a monocrystalline semiconductor with a conductive region coupled to a respective access line.

A semiconductor device includes: a fin that is a portion of a semiconductor substrate, protrudes from a main surface of the semiconductor substrate, has a width in a first direction, and extends in a second direction; a control gate electrode that is arranged on the fin via a first gate insulating film and extends in the first direction; and a memory gate electrode that is arranged on the fin via a second gate insulating film and extends in the first direction. Further, a width of the fin in a region in which the memory gate electrode is arranged via the second gate insulating film having a film thickness larger than the first gate insulating film is smaller than a width of the fin in a region in which the control gate electrode is arranged via the first gate insulating film.

A semiconductor device is provided. The semiconductor device includes a stack structure that includes a plurality of dielectric layers spaced apart from each other on a substrate, a plurality of electrodes interposed between the plurality of dielectric layers, and a plurality of stopper layers interposed between the plurality of dielectric layers; and a vertical channel structure that penetrates the stack structure. Each of the plurality of electrodes and the plurality of stopper layers is disposed in a corresponding empty space interposed between the plurality of dielectric layers, the plurality of stopper layers includes a first stopper layer and a second stopper layer that is interposed between the first stopper layer and the substrate, and at least one of the plurality of electrodes is interposed between the first stopper layer and the second stopper layer.

Some embodiments include apparatuses and methods forming the apparatuses. One of the apparatuses includes a first memory cell including a first transistor including a first channel region and a first charge storage structure, and a second transistor including a second channel region formed over the charge storage structure; a second memory cell adjacent the first memory cell, the second memory cell including a third transistor including a third channel region and a second charge storage structure, and a fourth transistor including a fourth channel region formed over the second charge storage structure; a first access line adjacent a side of the first memory cell; a second access line adjacent a side of the second memory cell; a first dielectric material adjacent the first channel region; a second dielectric material adjacent the third channel region; and a conductive structure between the first and second dielectric materials and adjacent the first and second dielectric materials.

A semiconductor storage device includes a first stacked body including first insulating films and first conductive films that are alternately stacked in a first direction. A first columnar body and a second columnar body extend within the first stacked body in the first direction. A second conductive film is provided above the first stacked body, and extends in a third direction intersecting the first direction and the second direction. A third insulator is adjacent to the second conductive film and extends in the third direction. A third conductive film is adjacent to the third insulator and extends in the third direction. A third columnar body is provided on the first columnar body. A fourth columnar body is provided on the second columnar body. A thickness of a third semiconductor portion in the first direction is greater than a thickness of the second conductive film in the first direction.

Methods for forming semiconductor structures are provided. The method for forming the semiconductor structure includes forming a word line cell over a substrate and forming a dielectric layer over the word line cell. The method further includes forming a conductive layer over the dielectric layer and polishing the conductive layer until the dielectric layer is exposed. The method further includes forming an oxide layer on a top surface of the conductive layer and removing portions of the conductive layer not covered by the oxide layer to form a memory gate.

Techniques for fabricating a memory device which has reduced neighboring word line interference, and a corresponding memory device. The memory device comprises a stack of alternating conductive and dielectric layers, where the conductive layers form word lines or control gates of memory cells. In one aspect, rounding off of the control gate layers due to inadvertent oxidation during fabrication is avoided. An amorphous silicon layer is deposited along the sidewall of the memory holes, adjacent to the control gate layers. Si.sub.3N.sub.4 is deposited along the amorphous silicon layer and oxidized in the memory hole to form SiO.sub.2. The amorphous silicon layer acts as an oxidation barrier for the sacrificial material of the control gate layers. The amorphous silicon layer is subsequently oxidized to also form SiO.sub.2. The two SiO.sub.2 layers together form a blocking oxide layer.

According to one embodiment, a non-volatile semiconductor memory device includes: a tunnel insulation film provided on a semiconductor substrate; a floating gate electrode provided on the tunnel insulation film; an inter-electrode insulation film provided on the floating gate electrode; and a control gate electrode provided on the inter-electrode insulation film. The inter-electrode insulation film includes: a lower insulation film provided on the floating gate electrode side; and an upper insulation film provided on the control gate electrode side. The lower insulation film includes: N (N is an integer of 2 or larger) electric charge accumulation layers; and boundary insulation films provided between the electric charge accumulation layers.