A method of making a capacitor with reduced variance comprises providing a bottom plate in a first metal layer, a first dielectric material over the bottom plate, and a middle plate in a second metal layer to form a first capacitor. The method also comprises measuring the capacitance of the first capacitor, and determining whether to couple none, one, or both of a second capacitor and a third capacitor in parallel with the first capacitor. The method may further comprise the steps of providing a second dielectric material over the middle plate, and providing a first top plate and a second top plate in a third metal layer to form the second capacitor, and a third capacitor. Electrical connections may be formed to couple one or both of the second capacitor and the third capacitor in parallel with the first capacitor based on the measured value of the first capacitor.

A capacitor includes an elevationally inner capacitor electrode, an elevationally outer capacitor electrode, and capacitor insulator between the elevationally inner and outer capacitor electrodes. The elevationally inner capacitor electrode comprises a hollow longitudinally-elongated conductive cylinder-like portion and a non-hollow longitudinally-elongated conductive cylinder-like portion electrically coupled with the hollow cylinder-like portion. The non-hollow cylinder-like portion is radially of and extends longitudinally along a longitudinal side surface of the hollow cylinder-like portion. Additional embodiments and aspects are disclosed.

Various embodiments of the present disclosure are directed towards an integrated chip including a substrate comprising first opposing sidewalls defining a first trench and second opposing sidewalls defining a second trench laterally offset from the first trench. A stack of layers comprises a plurality of conductive layers and a plurality of dielectric layers alternatingly stacked with the conductive layers. The stack of layers comprises a first segment in the first trench and a second segment in the second trench. A first lateral distance between the first segment and the second segment aligned with a first surface of the substrate is greater than a second lateral distance between the first segment and the second segment below the first surface of the substrate.

Example embodiments relate to vertically stacked capacitors. One capacitor assembly includes a vertical stacking of a first capacitor and a second capacitor on a substrate. The first capacitor includes a first terminal and a second terminal. The second terminal is formed by a first conductive layer that includes stress relief openings. The second capacitor includes a first terminal and a second terminal. The second terminal of the first capacitor lies below the first terminal of the first capacitor. The second terminal of the second capacitor lies below the first terminal of the second capacitor. The second capacitor lies below the first capacitor. The capacitor assembly further includes a ground layer. The second terminal of the second capacitor is electrically connected to the ground layer and to the first conductive layer. The ground layer includes stress relief openings. The ground layer is configured to be electrically grounded during operation.

Some implementations described herein provide techniques and apparatuses for an integrated circuit device including a trench capacitor structure that has a merged region. A material filling the merged region is different than a material that is included in electrode layers of the trench capacitor structure. Furthermore, the material filling the merged region includes a coefficient of thermal expansion and a modulus of elasticity that, in combination with the architecture of the trench capacitor structure, reduce thermally induced stresses and/or strains within the integrated circuit device relative to another integrated circuit device having a trench capacitor structure including a merged region and electrode layers of a same material.

A semiconductor device including a switching element on a substrate, a pad isolation layer on the switching element, a conductive pad passing through the pad isolation layer and connected to the switching element, an insulating pattern on the pad isolation layer and having a height greater than a horizontal width, a lower electrode on side surfaces of the insulating pattern on side surfaces of the insulating pattern and in contact with the conductive pad, a capacitor dielectric layer on the lower electrode and having a monocrystalline dielectric layer and a polycrystalline dielectric layer, the monocrystalline dielectric layer being relatively close to side surfaces of the insulating pattern compared to the polycrystalline dielectric layer an upper electrode on the capacitor dielectric layer may be provided.

A method for manufacturing a stacked capacitor structure includes: forming a first patterned structure over a substrate; forming a first bottom electrode over the first patterned structure; depositing a first dielectric film over the first bottom electrode; depositing a first top electrode layer over the first dielectric film; forming a first vertical interconnect structure; forming a second patterned structure over the first top electrode layer; forming a second bottom electrode over the second patterned structure and electrically connected to the first bottom electrode through the first vertical interconnect structure; depositing a second dielectric film over the second bottom electrode; depositing a second top electrode layer over the second dielectric film; and forming a second vertical interconnect structure extending from the first top electrode layer. The second top electrode layer is electrically connected to the first top electrode layer through the second vertical interconnect structure.

Semiconductor devices, integrated circuits and methods of forming the same are provided. In one embodiment, a semiconductor device includes a metal-insulator-metal structure which includes a bottom conductor plate layer including a first opening and a second opening, a first dielectric layer over the bottom conductor plate layer, a middle conductor plate layer over the first dielectric layer and including a third opening, a first dummy plate disposed within the third opening, and a fourth opening, a second dielectric layer over the middle conductor plate layer, and a top conductor plate layer over the second dielectric layer and including a fifth opening, a second dummy plate disposed within the fifth opening, a sixth opening, and a third dummy plate disposed within the sixth opening. The first opening, the first dummy plate, and the second dummy plate are vertically aligned.

The memory capacity of a DRAM is enhanced. A semiconductor memory device includes a driver circuit including part of a single crystal semiconductor substrate, a multilayer wiring layer provided over the driver circuit, and a memory cell array layer provided over the multilayer wiring layer. That is, the memory cell array overlaps with the driver circuit. Accordingly, the integration degree of the semiconductor memory device can be increased as compared to the case where a driver circuit and a memory cell array are provided in the same plane of a substrate containing a singe crystal semiconductor material.

A method of fabricating a metal-insulator-metal (MIM) capacitor structure on a substrate includes forming a patterned metal layer over the substrate; forming an insulator layer over the patterned metal layer; forming a second metal layer over the insulator layer; removing part of the insulating layer and part of the second metal layer thereby forming a substantially coplanar surface that is formed by the patterned metal layer, the insulator layer, and the second metal layer; removing a portion of the second metal layer and a portion of the patterned metal layer to form a fin from the insulator layer that protrudes beyond the first metal layer and the second metal layer; and forming an inter-metal dielectric layer over the fin.