A high electron mobility transistor (HEMT) includes a semiconductor channel layer, a semiconductor barrier layer, a patterned semiconductor capping layer, and a patterned semiconductor protection layer disposed on a substrate in sequence. The HEMT further includes an interlayer dielectric layer and a gate electrode. The interlayer dielectric layer covers the patterned semiconductor capping layer and the patterned semiconductor protection layer, and includes a gate contact hole. The gate electrode is disposed in the gate contact hole and electrically coupled to the patterned semiconductor capping layer, where the patterned semiconductor protection layer is disposed between the gate electrode and the patterned semiconductor capping layer. The resistivity of the patterned semiconductor protection layer is between the resistivity of the patterned semiconductor capping layer and the resistivity of the interlayer dielectric layer.

The present disclosure provides a high electron mobility transistor including a channel layer; a barrier layer on the channel layer and configured to induce formation of a 2-dimensional electron gas (2DEG) to the channel layer; a p-type semiconductor layer on the barrier layer; a first passivation layer on the barrier layer and including a quaternary material of Al, Ga, O, and N; a gate electrode on the p-type semiconductor layer; and a source electrode and a drain electrode provided on both sides of the barrier layer and separated from the gate electrode.

An epitaxial structure includes a composite base unit and an emitter unit. The composite base unit includes a first base layer and a second base layer formed on the first base layer. The first base layer is made of a material of In.sub.xGa.sub.(1-x)As.sub.(1-y)N.sub.y, in which 0<x0.2, and 0y0.035, and when y is not 0, x=3y. The second base layer is made of a material In.sub.mGa.sub.(1-m)As, in which 0.03m0.2. The emitter unit is formed on the second base layer 12 opposite to the first base layer 11, and is made of an indium gallium phosphide-based material. A transistor including the epitaxial structure is also disclosed.

The semiconductor device structure includes a substrate, a first nitride semiconductor layer, a second nitride semiconductor layer, a first electrode, a second electrode, a gate structure and a temperature sensitive component. The first nitride semiconductor layer is disposed on the substrate. The second nitride semiconductor layer is disposed on the first nitride semiconductor layer and has a bandgap greater than that of the first nitride semiconductor layer. The first electrode is disposed on the second nitride semiconductor layer. The second electrode is disposed on the second nitride semiconductor layer. The gate structure is disposed on the second nitride semiconductor layer and between the first electrode and the second electrode. The temperature sensitive component is disposed external to a region between the gate structure and the first electrode along a first direction in parallel to an interface of the first nitride semiconductor layer and the second nitride semiconductor layer.

A bonding layer including a first metal region is disposed on at least a portion of an upper surface of a support substrate. An underlying layer including a sub-collector region that is made of a conductive semiconductor material and is electrically connected to the first metal region is disposed on the bonding layer. A first transistor including a collector layer electrically connected to the sub-collector region, a base layer disposed on the collector layer, and an emitter layer disposed on the base layer is disposed on the sub-collector region. On the sub-collector region, a collector electrode electrically connected to the sub-collector region is located outward of the first transistor to overlap the first metal region in plan view.

A method for manufacturing a HEMT device includes forming, on a heterostructure, a dielectric layer, forming a through opening through the dielectric layer, and forming a gate electrode in the through opening. Forming the gate electrode includes forming a sacrificial structure, depositing by evaporation a first gate metal layer layer, carrying out a lift-off of the sacrificial structure, depositing a second gate metal layer by sputtering, and depositing a third gate metal layer. The second gate metal layer layer forms a barrier against the diffusion of metal atoms towards the heterostructure.

Semiconductor device structures and methods for manufacturing the same are provided. The semiconductor device structure includes a substrate, a first nitride semiconductor layer, a second nitride semiconductor layer, a gate electrode, a first electrode, a first via and a second via. The substrate has a first surface and a second surface. The first nitride semiconductor layer is disposed on the first surface of the substrate. The second nitride semiconductor layer is disposed on the first nitride semiconductor layer and has a bandgap exceeding that of the first nitride semiconductor layer. The gate electrode and the first electrode are disposed on the second nitride semiconductor layer. The first via extends from the second surface and is electrically connected to the first electrode. The second via extends from the second surface. The depth of the first via is different from the depth of the second via.

A laminate includes a group 13 nitride single crystal substrate composed of a group 13 nitride single crystal and having a first main face and a second main face, a buffer layer provided on the first main face of the group 13 nitride single crystal substrate, a channel layer provided on the buffer layer and a barrier layer provided on the channel layer. The channel layer has a thickness of 700 nm or smaller, and the first main face of the group 13 nitride single crystal substrate has an off-angle of 0.4 or more and 1.0 or less.

Techniques of integrating lateral HBT devices into a silicon on insulator (SOI) CMOS process. Similar approaches could also be applied to Fin Field-Effect Transistors (FinFETs). A first technique makes use of a CMOS replacement gate process that is typically associated with a partially depleted SOI (PDSOI) or fully depleted SOI (FDSOI) process. A second technique is independent of the CMOS process. Both techniques can accommodate silicon germanium (SiGe) and/or III-V materials, include a self-aligned base contact, and can be used to construct both NPN and PNP transistors with varied peak fT and breakdown voltages.

A method for forming a high electron mobility transistor is disclosed. A mesa structure having a channel layer and a barrier layer is formed on a substrate. The mesa structure has two first edges extending along a first direction and two second edges extending along a second direction. A passivation layer is formed on the substrate and the mesa structure. A first opening and a plurality of second openings connected to a bottom surface of the first opening are formed and through the passivation layer, the barrier layer and a portion of the channel layer. In a top view, the first opening exposes the two first edges of the mesa structure without exposing the two second edges of the mesa structure. A metal layer is formed in the first opening and the second openings thereby forming a contact structure.