Patent classifications
H10D62/8325
Solid body and multi-component arrangement
A solid body is disclosed. The solid body includes: a detachment plane in an interior space of the solid body, the detachment plane including laser radiation-induced modifications; and a region including layers and/or components. A multi-component arrangement is also disclosed. The multi-component arrangement includes: a solid-body layer including more than 50% SiC and modifications or modification components generating pressure tensions in a region of a first surface, the modifications being amorphized components of the solid-body layer, the modifications being spaced closer to the first surface than to a second surface opposite the first surface, the first surface being essentially level; and a metal layer on the first surface of the solid-body layer.
Planar JFET Device with Reduced Gate Resistance
A junction field effect transistor (JFET) includes a drift region disposed on a substrate that includes a drain region of the JFET. A lower gate region is disposed on the drift region, a source region is disposed above the lower gate region, and an upper gate region at least partially surrounding the source region and extending laterally beyond the lower gate region is disposed above the source region. The upper gate region extends laterally beyond the lower gate region by a distance defining a gate offset width between the upper gate region and the lower gate region.
CONDUCTIVE MATERIAL DEPOSITION ON SEMICONDUCTOR WITH PHASE TRANSITION AND OHMIC CONTACT IN SITU
A method for a photon induced conductive material deposition on a substrate is provided. The method includes steps as follows: preparing a first solution comprising metalate, metal ions, or combinations thereof; preparing a first suspension comprising nanoparticles, a light sensitive reducing agent, an electron providing solvent, or combinations thereof; mixing the first solution and the first suspension to form a first reagent on a first substrate; and emitting a light beam provided by a light source and focusing the same onto the first reagent kept on a first region of the first substrate, so as to form a mechanically rigid conductive deposition in contact with the first substrate in a focus point of the light source, wherein the first substrate has a second region exposed to surrounding gas or an air environment.
SILICON CARBIDE POWER DEVICE WITH IMPROVED ROBUSTNESS AND CORRESPONDING MANUFACTURING PROCESS
An electronic power device includes a substrate of silicon carbide (SiC) having a front surface and a rear surface which lie in a horizontal plane and are opposite to one another along a vertical axis. The substrate includes an active area, provided in which are a number of doped regions, and an edge area, which is not active, distinct from and surrounding the active area. A dielectric region is arranged above the front surface, in at least the edge area. A passivation layer is arranged above the front surface of the substrate, and is in contact with the dielectric region in the edge area. The passivation layer includes at least one anchorage region that extends through the thickness of the dielectric region at the edge area, such as to define a mechanical anchorage for the passivation layer.
SiC SEMICONDUCTOR DEVICE
An SiC semiconductor device includes an SiC semiconductor layer of a first conductivity type having a main surface, a source trench formed in the main surface and having a side wall and a bottom wall, a source electrode embedded in the source trench and having a side wall contact portion in contact with a region of the side wall of the source trench at an opening side of the source trench, a body region of a second conductivity type formed in a region of a surface layer portion of the main surface along the source trench, and a source region of the first conductivity type electrically connected to the side wall contact portion of the source electrode in a surface layer portion of the body region.
METAL OXIDE SEMICONDUCTOR FIELD EFFECT TRANSISTORS (MOSFET) AND METHODS OF FORMING SAME
A field effect transistor includes first section and second sections. The first section includes a drift layer. A first P-well is disposed over the drift layer. A first N-source is disposed over the first P-well. A first channel is disposed in an upper portion of the first P-well. The second section includes an area P-well disposed within the drift layer and formed integral with the first P-well. The area P-well includes sidewalls that extend upwards from the drift layer to form an enclosed structure with an outer perimeter and an inner perimeter. An area N-source surrounds the outer perimeter and is formed integral with the first N-source. An upwardly extending intermediate portion of the drift layer extends upwards though the inner perimeter. A second channel is disposed in an upper portion of the sidewalls and is bounded by the inner perimeter and outer perimeter of the sidewalls.
Schottky diode with reduced forward voltage
A semiconductor component includes a semiconductor body of a first conduction type and a metal layer on the semiconductor body, wherein the metal layer forms with the semiconductor body a Schottky contact along a contact surface. A doping concentration of the first conduction type on the contact surface varies along a direction of the contact surface.
Semiconductor device comprising regions of different current drive capabilities
An object of the present invention is to provide a semiconductor device capable of eliminating unevenness of current distribution in a plane. A semiconductor device according to the present invention is a semiconductor device including a transistor cell region where a plurality of transistor cells is arranged on a semiconductor substrate, the semiconductor device including an electrode pad which is arranged avoiding the transistor cell region on the semiconductor substrate and is electrically connected to a one-side current electrode of each of the cells, in which the transistor cell region contains a plurality of regions each of which has a different current drive capability from each other depending on a distance from the electrode pad.
SiC-based superjunction semiconductor device
A semiconductor device includes a semiconductor body having a semiconductor body material with a dopant diffusion coefficient that is smaller than the corresponding dopant diffusion coefficient of silicon, at least one first semiconductor region doped with dopants of a first conductivity type and having a columnar shape that extends into the semiconductor body along an extension direction, wherein a respective width of the at least one first semiconductor region continuously increases along the extension direction; and at least one second semiconductor region included in the semiconductor body. The at least one second semiconductor region is arranged adjacent to the at least one first semiconductor region, and is doped with dopants of a second conductivity type complementary to the first conductivity type.
Processing a semiconductor wafer
A semiconductor wafer processing system for processing a semiconductor wafer is presented. The semiconductor wafer processing system comprises: a trench production apparatus configured to produce trenches in the semiconductor wafer, the trenches being arranged next to each other along a first lateral direction (X); a trench filling apparatus configured to epitaxially fill the trenches with a doped semiconductor material; and a controller operatively coupled to at least one of the trench production apparatus and the trench filling apparatus, wherein the controller is configured to control at least one of the trench production apparatus and the trench filling apparatus in dependence of a parameter, the parameter being indicative of at least one of a variation of dopant concentrations of the doped semiconductor material along the first lateral direction (X) that is to be expected when carrying out the epitaxially filling and a deviation of an expected average of the dopant concentrations from a predetermined nominal value.