A transistor device includes: a first source region and a first drain region spaced apart from each other in a first direction of a semiconductor body; at least two gate regions arranged between the first source region and the first drain region and spaced apart from each other in a second direction of the semiconductor body; at least one drift region adjoining the first source region and electrically coupled to the first drain region; at least one compensation region adjoining the at least one drift region and the at least two gate regions; a MOSFET including a drain node connected to the first source region, a source node connected to the at least two gate region, and a gate node. Active regions of the MOSFET are integrated in the semiconductor body in a device region that is spaced apart from the at least two gate regions.

A device includes a semiconductor substrate, a buried doped isolation layer disposed in the semiconductor substrate to isolate the device, a drain region disposed in the semiconductor substrate and to which a voltage is applied during operation, and a depletion region disposed in the semiconductor substrate and having a conductivity type in common with the buried doped isolation barrier and the drain region. The depletion region reaches a depth in the semiconductor substrate to be in contact with the buried doped isolation layer. The depletion region establishes an electrical link between the buried doped isolation layer and the drain region such that the buried doped isolation layer is biased at a voltage level lower than the voltage applied to the drain region.

A field oxide film lies extending from the underpart of a gate electrode to a drain region. A plurality of projection parts projects from the side face of the gate electrode from a source region side toward a drain region side. The projection parts are arranged side by side along a second direction (direction orthogonal to a first direction along which the source region and the drain region are laid) in plan view. A plurality of openings is formed in the field oxide film. Each of the openings is located between projection parts adjacent to each other when seen from the first direction. The edge of the opening on the drain region side is located closer to the source region than the drain region. The edge of the opening on the source region side is located closer to the drain region than the side face of the gate electrode.

A gate-all around fin double diffused metal oxide semiconductor (DMOS) devices and methods of manufacture are disclosed. The method includes forming a plurality of fin structures from a substrate. The method further includes forming a well of a first conductivity type and a second conductivity type within the substrate and corresponding fin structures of the plurality of fin structures. The method further includes forming a source contact on an exposed portion of a first fin structure. The method further comprises forming drain contacts on exposed portions of adjacent fin structures to the first fin structure. The method further includes forming a gate structure in a dielectric fill material about the first fin structure and extending over the well of the first conductivity type.

A lateral trench MOSFET comprises an insulating layer buried in a substrate, a body region in the substrate, an isolation region in the substrate, a first drain/source region over the body region, a second drain/source region in the substrate, wherein the first drain/source region and the second drain/source region are on opposing sides of the isolation region, a drift region comprising a first drift region of a first doping density formed between the second drain/source region and the insulating layer, wherein the first drift region comprises an upper portion surrounded by isolation regions and a lower portion and a second drift region of a second doping density formed between the isolation region and the insulating layer, wherein a height of the second drift region is equal to a height of the lower portion of the first drift region.

High voltage devices and methods for forming a high voltage device are disclosed. The method includes providing a substrate having top and bottom surfaces. The substrate is defined with a device region and a recessed region disposed within the device region. The recessed region includes a recessed surface disposed lower than the top surface of the substrate. A transistor is formed over the substrate. Forming the transistor includes forming a gate at least over the recessed surface and forming a source region adjacent to a first side of the gate below the recessed surface. Forming the transistor also includes forming a drain region displaced away from a second side of the gate. First and second device wells are formed in the substrate within the device region. The first device well encompasses the drain region and the second device well encompasses the source region.

One embodiment is directed towards a method. The method includes forming a drift region of a first conductivity type above or in a substrate. The substrate has first and second surfaces. A first insulator is formed over a first portion of the channel, and which has a first thickness. A second insulator is formed over the second portion of the channel, and which has a second thickness that is less than the first thickness. A first gate is formed over the first insulator. A second gate is formed over the second insulator. A body region of a second conductivity type is formed above or in the substrate.

A lateral power integrated device includes a source region and a drain region disposed in a semiconductor layer and spaced apart from each other in a first direction, a drift region disposed in the semiconductor layer and surrounding the drain region, a channel region arranged between the source region and the drift region in the first direction, a plurality of planar insulation field plates disposed over the drift region and spaced apart from each other in a second direction, a plurality of trench insulation field plates disposed in the drift region, a gate insulation layer formed over the channel region, and a gate electrode formed over the gate insulation layer. Each of the trench insulation field plates is disposed between the planar insulation field plates in the second direction.

The present invention provides a FinFET device, including at least one fin structure, wherein the fin structure has a first-type well region, and a second-type well region adjacent to the first-type well region, a trench located in the fin structure and disposed between the first-type well region and the second-type well region, an insulating layer disposed in the trench, and a metal gate crossing over and disposed on the insulating layer.

A well of a first type of conductivity is formed in a semiconductor substrate, and wells of a second type of conductivity are formed in the well of the first type of conductivity at a distance from one another. By an implantation of dopants, a doped region of the second type of conductivity is formed in the well of the first type of conductivity between the wells of the second type of conductivity and at a distance from the wells of the second type of conductivity. Source/drain contacts are applied to the wells of the second type of conductivity, and a gate dielectric and a gate electrode are arranged above regions of the well of the first type of conductivity that are located between the wells of the second type of conductivity and the doped region of the second type of conductivity.