Trenches and n.sup.+ high impurity concentration regions are formed in a first principal surface side of a silicon carbide semiconductor substrate. In the n.sup.+ high impurity concentration regions, third n-type regions that respectively surround first p.sup.+ base regions contacting a p-type base layer and have a higher impurity concentration than the n.sup.+ high impurity concentration regions, as well as fourth n-type regions that respectively surround second p.sup.+ base regions formed at the bottoms of the trenches and also have a higher impurity concentration than the n.sup.+ high impurity concentration regions, are formed.

In a method of further enhancing the performance of a narrow active cell IE type trench gate IGBT having the width of active cells narrower than that of inactive cells, it is effective to shrink the cells so that the IE effects are enhanced. However, when the cells are shrunk simply, the switching speed is reduced due to increased gate capacitance. A cell formation area of the IE type trench gate IGBT is basically composed of first linear unit cell areas having linear active cell areas, second linear unit cell areas having linear hole collector areas and linear inactive cell areas disposed therebetween.

A gate-all around fin double diffused metal oxide semiconductor (DMOS) devices and methods of manufacture are disclosed. The method includes forming a plurality of fin structures from a substrate. The method further includes forming a well of a first conductivity type and a second conductivity type within the substrate and corresponding fin structures of the plurality of fin structures. The method further includes forming a source contact on an exposed portion of a first fin structure. The method further comprises forming drain contacts on exposed portions of adjacent fin structures to the first fin structure. The method further includes forming a gate structure in a dielectric fill material about the first fin structure and extending over the well of the first conductivity type.

Disclosed is a method for producing a transistor device and a transistor device. The method includes: forming a source region of a first doping type in a body region of a second doping type in a semiconductor body; and forming a low-resistance region of the second doping type adjoining the source region in the body region. Forming the source region includes implanting dopant particles of the first doping type using an implantation mask via a first surface of the semiconductor body into the body region. Implanting the doping particles of the first doping type includes a tilted implantation.

A semiconductor device includes a split-gate lateral extended drain MOS transistor, which includes a first gate and a second gate laterally adjacent to the first gate. The first gate is laterally separated from the second gate by a gap of 10 nanometers to 250 nanometers. The first gate extends at least partially over the body, and the second gate extends at least partially over a drain drift region. The drain drift region abuts the body at a top surface of the substrate. A boundary between the drain drift region and the body at the top surface of the substrate is located under at least one of the first gate, the second gate and the gap between the first gate and the second gate. The second gate may be coupled to a gate bias voltage node or a gate signal node.

A semiconductor device with improved characteristics is provided. The semiconductor device includes a LDMOS, a source plug electrically coupled to a source region of the LDMOS, a source wiring disposed over the source plug, a drain plug electrically coupled to a drain region of the LDMOS, and a drain wiring disposed over the drain plug. The structure of the source plug of the semiconductor device is devised. The semiconductor device is structured such that the drain plug is linearly disposed to extend in a direction Y, and the source plug includes a plurality of separated source plugs arranged at predetermined intervals in the direction Y. In this way, the separation of the source plug decreases an opposed area between the source plug and the drain plug, and can thus decrease the parasitic capacitance therebetween.

A MOS transistor structure for matched operation in weak-inversion or sub-threshold range (e.g. input-pair of operational amplifier, comparator, and/or current-mirror) is disclosed. The transistor structure may include a well region of any impurity type in a substrate (SOI is included). The well-region can even be represented by the substrate itself. At least one transistor is located in the well region, whereby the active channel-region of the transistor is independent from lateral isolation interfaces between GOX (gate oxide) and FOX (field oxide; including STI-shallow trench isolation).

A power semiconductor transistor includes a semiconductor body coupled to a load terminal, a drift region, a first trench extending into the semiconductor body and including a control electrode electrically insulated from the semiconductor body by an insulator, a source region arranged laterally adjacent to a sidewall of the first trench and electrically connected to the load terminal, a channel region arranged laterally adjacent to the same trench sidewall as the source region, a second trench extending into the semiconductor body, and a guidance zone electrically connected to the load terminal and extending deeper into the semiconductor body than the first trench. The guidance zone is adjacent the opposite sidewall of the first trench as the source region and adjacent one sidewall of the second trench. In a section arranged deeper than the bottom of the first trench, the guidance zone extends laterally towards the channel region.

In a semiconductor device, a lightly doped second semiconductor layer of a first conductive type is joined with a heavily doped first semiconductor layer of the first conductive type. A power transistor having a first conductive type channel and a transistor are formed in surface regions of the second semiconductor layer, respectively. A first diffusion layer of a second conductive type is formed in a surface region of the second semiconductor layer to provide a boundary between the power transistor and the transistor. The first semiconductor layer functions as a drain of the power transistor. The first diffusion layer region is set to the same voltage as that of the drain.

A semiconductor structure is disclosed. The semiconductor structure includes a source trench in a drift region, the source trench having a source trench dielectric liner and a source trench conductive filler surrounded by the source trench dielectric liner, a source region in a body region over the drift region. The semiconductor structure also includes a patterned source trench dielectric cap forming an insulated portion and an exposed portion of the source trench conductive filler, and a source contact layer coupling the source region to the exposed portion of the source trench conductive filler, the insulated portion of the source trench conductive filler increasing resistance between the source contact layer and the source trench conductive filler under the patterned source trench dielectric cap. The source trench is a serpentine source trench having a plurality of parallel portions connected by a plurality of curved portions.