MOSFET-based IC architectures, including SOI NEDMOS ICs and bulk semiconductor LDMOS ICs, that mitigate or eliminate the problems of edge transistors. One IC embodiment includes end-cap body contact regions angle-implanted to have a first characteristic (e.g., P+), a drift region, and a gate structure partially overlying the end-cap body contact regions and the drift region and including a conductive layer having a third characteristic (e.g., N+) and a first side angle-implanted to have the first characteristic. Steps for fabricating such an IC include implanting a dopant at an angle in the range of about 5 to about 60 within the end-cap body contact regions and within the first side of the conductive layer in a region of the gate structure overlying the end-cap body contact regions, wherein the angle-implanted dopant results in the first characteristic for the end-cap body contact regions and the first side of the conductive layer.

Methods of operating a switching device are provided. The switching device is formed in an interconnect, the interconnect including a plurality of metallization levels, and has an assembly that includes a beam held by a structure. The beam and structure are located within the same metallization level. Locations of fixing of the structure on the beam are arranged so as to define for the beam a pivot point situated between these fixing locations. The structure is substantially symmetric with respect to the beam and to a plane perpendicular to the beam in the absence of a potential difference. The beam is able to pivot in a first direction in the presence of a first potential difference applied between a first part of the structure and to pivot in a second direction in the presence of a second potential difference applied between a second part of the structure.

A semiconductor device includes a substrate having main and back surfaces, and a first transistor and a second transistor. A first end of a via hole which penetrates the substrate and is farther from the second transistor is farther from the second transistor than a second end of an active region which is farther from the second transistor in a region where a first gate electrode of the first transistor is disposed, as viewed from a first direction.

An integrated circuit which includes a field-plated FET is formed by forming a first opening in a layer of oxide mask, exposing an area for a drift region. Dopants are implanted into the substrate under the first opening. Subsequently, dielectric sidewalls are formed along a lateral boundary of the first opening. A field relief oxide is formed by thermal oxidation in the area of the first opening exposed by the dielectric sidewalls. The implanted dopants are diffused into the substrate to form the drift region, extending laterally past the layer of field relief oxide. The dielectric sidewalls and layer of oxide mask are removed after the layer of field relief oxide is formed. A gate is formed over a body of the field-plated FET and over the adjacent drift region. A field plate is formed immediately over the field relief oxide adjacent to the gate.

An apparatus including a conductive stack structure includes an M.sub.x layer interconnect on an M.sub.x layer and extending in a first direction on a first track, an M.sub.y layer interconnect on an M.sub.y layer in which the M.sub.y layer is a lower layer than the M.sub.x layer, a first via stack coupled between the M.sub.x layer interconnect and the M.sub.y layer interconnect, a second via stack coupled between the M.sub.x layer interconnect and the M.sub.y layer interconnect, a second M.sub.x layer interconnect extending in the first direction on a track immediately adjacent to the first track, and a third M.sub.x layer interconnect extending in the first direction on a track immediately adjacent to the first track. The M.sub.x layer interconnect is between the second M.sub.x layer interconnect and the third M.sub.x layer interconnect. The second M.sub.x layer interconnect and the third M.sub.x layer interconnect are uncoupled to each other.

An integrated circuit and method includes a DEMOS transistor with improved CHC reliability that has a lower resistance surface channel under the DEMOS gate that transitions to a lower resistance subsurface channel under the drain edge of the DEMOS transistor gate.

Electrical fuse (eFuse) and resistor structures and methods of manufacture are provided. The method includes forming metal gates having a capping material on a top surface thereof. The method further includes protecting the metal gates and the capping material during an etching process which forms a recess in a dielectric material. The method further includes forming an insulator material and metal material within the recess. The method further includes forming a contact in direct electrical contact with the metal material.

Electrical fuse (eFuse) and resistor structures and methods of manufacture are provided. The method includes forming metal gates having a capping material on a top surface thereof. The method further includes protecting the metal gates and the capping material during an etching process which forms a recess in a dielectric material. The method further includes forming an insulator material and metal material within the recess. The method further includes forming a contact in direct electrical contact with the metal material.

A semiconductor device includes a semiconductor body including first and second lateral surfaces. A first device region includes a drift region of a first conductivity type, and a drift current control region of a second conductivity type being spaced apart from the second lateral surface by the drift region. A second device region includes a barrier layer, and a buffer layer having a different band gap than the barrier layer so that a two-dimensional charge carrier gas channel arises along an interface between the buffer layer and the barrier layer. An electrically conductive substrate contact forms a low ohmic connection between the two-dimensional charge carrier gas channel and the drift region. A gate structure is configured to control a conduction state of the two-dimensional charge carrier gas. The drift current control region is configured to block a vertical current in the drift region via a space-charge region.

A semiconductor device includes a semiconductor body including first and second lateral surfaces. A first device region includes a drift region of a first conductivity type, and a drift current control region of a second conductivity type being spaced apart from the second lateral surface by the drift region. A second device region includes a barrier layer, and a buffer layer having a different band gap than the barrier layer so that a two-dimensional charge carrier gas channel arises along an interface between the buffer layer and the barrier layer. An electrically conductive substrate contact forms a low ohmic connection between the two-dimensional charge carrier gas channel and the drift region. A gate structure is configured to control a conduction state of the two-dimensional charge carrier gas. The drift current control region is configured to block a vertical current in the drift region via a space-charge region.