According to one embodiment of the present invention, an electronic device includes: a carbon layer including graphene, a thin film layer formed on the carbon layer, a channel layer formed on the thin film layer, a current cutoff layer formed between the thin film layer and the channel layer so as to cut off the flow of current between the thin film layer and the channel layer, and a source electrode and a drain electrode formed on the channel layer.

A power semiconductor module includes: a plurality of semiconductor element substrates disposed on the same plane, each of which includes an insulating substrate with a front-side electrode formed on one of the surfaces of an insulator plate and a back-side electrode formed on the other surface of the insulator plate and a power semiconductor element fixed on a surface of the front-side electrode; and a wiring member that electrically connects with each other the semiconductor element substrates adjacent to each other; and the semiconductor element substrates and the wiring member are molded with mold resin; wherein the mold resin is provided with a recessed part, between the insulating substrates adjacent to each other, which is not filled with the resin constituting the mold resin to a predetermined depth from the side of the back-side electrode.

A laminated body includes: a substrate portion composed of silicon carbide; and a graphene film disposed on a first main surface of the substrate portion, the graphene film having an atomic arrangement oriented with respect to an atomic arrangement of the silicon carbide of the substrate portion. A region in which a value of G/G in Raman spectrometry is not less than 1.2 is not less than 10% in an area ratio in an exposed surface of the graphene film, the exposed surface being a main surface of the graphene film opposite to the substrate portion.

A semiconductor device of the present invention includes a semiconductor layer of a first conductivity type having a cell portion and an outer peripheral portion disposed around the cell portion, and a surface insulating film disposed in a manner extending across the cell portion and the outer peripheral portion, and in the cell portion, formed to be thinner than a part in the outer peripheral portion.

A method of manufacturing a semiconductor device includes: forming a first trench in a first area of a drift layer that has a surface including the first area and a second area; growing a crystal of a p-type base layer on a surface of the drift layer after forming the first trench; and growing a crystal of an n-type source layer on a surface of the base layer. Material of the drift layer, the base layer, and the source layer are a wide-gap semiconductor.

A graphene layer, a method of forming the graphene layer, a device including the graphene layer, and a method of manufacturing the device are provided. The method of forming the graphene layer may include forming a first graphene at a first temperature using a first source gas and forming a second graphene at a second temperature using a second source gas. One of the first and second graphenes may be a P-type graphene, and the other one of the first and second graphenes may be an N-type graphene. The first graphene and the second graphene together form a PN junction.

A top-gated graphene field effect transistor can be fabricated by forming a layer of graphene on a substrate, and applying an electrochemical deposition process to deposit a layer of dielectric polymer on the graphene layer. An electric potential between the graphene layer and a reference electrode is cycled between a lower potential and a higher potential. A top gate is formed above the polymer.

A FinFET including a substrate, a plurality of insulators disposed on the substrate, a gate stack and a strained material is provided. The substrate includes a plurality of semiconductor fins. The semiconductor fins include at least one active fin and a plurality of dummy fins disposed at two opposite sides of the active fin. The insulators are disposed on the substrate and the semiconductor fins are insulated by the insulators. The gate stack is disposed over portions of the semiconductor fins and over portions of the insulators. The strained material covers portions of the active fin that are revealed by the gate stack. In addition, a method for fabricating the FinFET is provided.

Disclosed herein is a new and improved system and method for fabricating diamond semiconductors. The method may include the steps of selecting a diamond semiconductor material having a surface, exposing the surface to a source gas in an etching chamber, forming a carbide interface contact layer on the surface; and forming a metal layer on the interface layer.

A method for forming a graphene FET includes providing a graphene layer having a surface. A first metal layer having a work function <4.3 eV is deposited on the graphene surface. The first metal layer is oxidized to form a first metal oxide layer. The first metal oxide layer is etched to provide open surface contact regions including a first and a second region of the graphene layer for providing a graphene surface source and drain contact. A second metal layer is deposited including a second metal layer portion providing a source with a source contact over the graphene surface source contact and a second metal layer portion providing a drain with a drain contact over the graphene surface drain contact. A grown-in graphitic interface layer is formed at an interface between the source contact and graphene surface source contact and the drain contact and graphene surface drain contact.