A semiconductor device includes a semiconductor layer disposed at a substrate and a plurality of active cells disposed at the semiconductor layer. Each active cell includes a trench extending into the semiconductor layer and a body region disposed in the semiconductor layer adjacent to a sidewall of the trench and at a first depth below the surface of the semiconductor layer. The semiconductor device further includes a termination cell disposed at the semiconductor layer adjacent to an edge of the plurality of active cells. The termination cell includes a trench extending into the semiconductor layer, and further includes a body region disposed in the semiconductor layer adjacent to a sidewall of the trench of the termination cell and at a second depth less than the first depth. The body regions of the active cells and of the termination cell have a conductivity type different than that of the semiconductor layer.

A semiconductor device includes a semiconductor substrate; a first semiconductor region that includes an extension portion extending in a specific direction at a specific width as viewed along a direction orthogonal to the main surface; a second semiconductor region that is shaped to include a portion running along the extension portion of the first semiconductor region as viewed along the direction orthogonal to the main surface; a field relaxation layer that relaxes a field generated between the first semiconductor region and the second semiconductor region, that is formed on the second semiconductor region side of the main surface, and that is formed by a semiconductor layer; and a conductor that is connected to the second semiconductor region, and that has an end portion on the first conductor region side positioned within the range of the field relaxation layer.

In order to reduce electric field concentration in a semiconductor device including a main transistor section and a sense transistor section, the semiconductor device is provided, the semiconductor device including a semiconductor substrate of a first conductivity type, a main transistor section in an active region on the semiconductor substrate, and a sense transistor section outside the active region on the semiconductor substrate, wherein the active region is provided with a main well region of a second conductivity type, and wherein the sense transistor section has a sense gate trench section formed extending from the outside of the active region to the main well region on the front surface of the semiconductor substrate.

A semiconductor device of the present invention includes a semiconductor layer made of a wide bandgap semiconductor and a Schottky electrode being in contact with a surface of the semiconductor layer. The semiconductor layer includes a drift layer that forms the surface of the semiconductor layer and a high-resistance layer that is formed on a surface layer portion of the drift layer and that has higher resistance than the drift layer. The high-resistance layer is formed by implanting impurity ions from the surface of the semiconductor layer and then undergoing annealing treatment at less than 1500 C.

Provided is a semiconductor and method of manufacturing the same, and a method of forming even doping concentration of respective semiconductor device when manufacturing multiple semiconductor devices. When a concentration balance is disrupted due to an increase in doping region size, doping concentration is still controllable in example by using ion injected blocking pattern. Thus, the examples relate to a semiconductor and manufacture device with even doping, and high breakdown voltage obtainable as a result of such doping.

A semiconductor device is provided. The semiconductor device includes a substrate having a first conductivity type. An epitaxial layer having the first conductivity type is disposed on the substrate, and a trench is formed in the epitaxial layer. A polysilicon layer having the first conductivity type fills the trench, and a first doping region having a second conductivity type that is different from the first conductivity type is disposed in the epitaxial layer and on sidewalls of the trench. A method for forming the semiconductor device is also provided.

A technique achieving a higher voltage resistance by a depletion layer extending quickly within a circumferential region is provided. A semiconductor device includes an element region in which an insulated gate type switching element is provided and a circumferential region adjacent to the element region. First and second trenches are provided in the circumferential region. A front surface region of the second-conductivity-type is provided between the first and second trenches. First and second bottom surface regions of the second-conductivity-type are provided in bottom surface ranges of the first and second trenches. First and second side surface regions of the second-conductivity-type connecting the front surface region and the first or second bottom surface region is provided along side surfaces of the first and second trenches. Low area density regions are provided in at least parts of the first and second side surface regions.

An SiC semiconductor device has a p type region including a low concentration region and a high concentration region filled in a trench formed in a cell region. A p type column is provided by the low concentration region, and a p.sup.+ type deep layer is provided by the high concentration region. Thus, since a SJ structure can be made by the p type column and the n type column provided by the n type drift layer, an on-state resistance can be reduced. As a drain potential can be blocked by the p.sup.+ type deep layer, at turnoff, an electric field applied to the gate insulation film can be alleviated and thus breakage of the gate insulation film can be restricted. Therefore, the SiC semiconductor device can realize the reduction of the on-state resistance and the restriction of breakage of the gate insulation film.

A high voltage LDMOS device having high side source voltage, an n type buried layer and a p type buried layer situated on the interface between a p type substrate and an n type epitaxial layer; a lateral surface of the n type buried layer and a lateral surface of the p type buried layer not in contact, and are distant from one another with a distance, thereby increasing the withstand voltage between the n type buried layer and the p type buried layer; the p type buried layer and the drain overlap at least partially in a vertical direction, enabling the p type buried layer to exert a reduced surface field action on the drain, to increase the withstand voltage of the drain against the source; the source and the body terminal centrally on top of the n type buried layer.

A device includes a semiconductor substrate, source and drain regions disposed in the semiconductor substrate and having a first conductivity type, a body region disposed in the semiconductor substrate, having a second conductivity type, and in which the source region is disposed, a drift region disposed in the semiconductor substrate, having the first conductivity type, and through which charge carriers drift during operation upon application of a bias voltage between the source and drain regions, a device isolation region disposed in the semiconductor substrate and laterally surrounding the body region and the drift region, and a breakdown protection region disposed between the device isolation region and the body region and having the first conductivity type.