Patent classifications
H10D84/08
SEMICONDUCTOR NANOWIRE DEVICE AND FABRICATION METHOD THEREOF
A method for fabricating a semiconductor nanowire device includes forming a base including a plurality of PMOS regions, forming a plurality of first openings in the base of the PMOS regions, forming a plurality of first epitaxial wires by filling the first openings with a germanium-containing material, and forming a plurality of second openings in the base by etching a portion of the base under each first epitaxial wire. Each first epitaxial wire is connected to both sidewalls of a corresponding second opening and is hung above a bottom surface of the corresponding second opening. The method also includes performing a thermal oxidation treatment process on the plurality of first epitaxial wires to form an oxide layer on each first epitaxial wire, forming a plurality of first nanowires by removing the oxide layer from each first epitaxial wire, and forming a first wrap-gate structure to surround each first nanowire.
INTEGRATED CMOS WAFERS
The present disclosure relates to semiconductor structures and, more particularly, to integrated CMOS wafers and methods of manufacture. The structure includes: a chip of a first technology type comprising a trench structure on a front side; a chip of a second technology type positioned within the trench structure and embedded therein with an interlevel dielectric material; and a common wiring layer on the front side connecting to both the chip of the first technology type and the chip of the second technology type.
Complementary Transistor Pair Comprising Field Effect Transistor Having Metal Oxide Channel Layer
A complementary transistor pair with an n-type enhancement-mode field effect transistor and a p-type field effect transistor is disclosed. The n-type enhancement-mode field effect transistor uses a metal oxide channel layer having a material selected from SnO.sub.2, ITO, ZnO, SnO.sub.2 and In.sub.2O.sub.3 while the p-type field effect transistor uses a germanium-containing channel layer.
Integration of III-V devices on Si wafers
An insulating layer is conformally deposited on a plurality of mesa structures in a trench on a substrate. The insulating layer fills a space outside the mesa structures. A nucleation layer is deposited on the mesa structures. A III-V material layer is deposited on the nucleation layer. The III-V material layer is laterally grown over the insulating layer.
Fabrication of a CMOS structure
A first channel structure includes Si.sub.xGe.sub.1-x and a second channel structure includes a group III-V compound material. First and second gate stacks are formed on the first and second channel structures. An insulating layer is formed on the gate stacks and the channel structures and is removed from the first channel structure to form a spacer on sidewalls of the first gate stack. First raised source and drain layers are formed on the first channel structure. The insulating layer is removed from the second channel structure to form a spacer on sidewalls of the second gate stack. The surfaces of the first and second channel structures and first source and drain layers are oxidized. The oxide layers are treated by a cleaning process that selectively removes the second native oxide layer only. Second raised source and drain layers are formed on the second channel structure. A CMOS structure is disclosed.
SEMICONDUCTOR DEVICE
A semiconductor device in which a memory region at each level of a memory device can be changed is provided. The semiconductor device includes a memory device including a first and a second memory circuit and a control circuit. The first memory circuit includes a first capacitor and a first transistor which has a function of holding charges held in the first capacitor. The second memory circuit includes a second transistor, a second capacitor which is electrically connected to a gate of the second transistor, and a third transistor which has a function of holding charges held in the second capacitor. The first and the third transistors each have a semiconductor layer including an oxide semiconductor, a gate, and a back gate. The voltage applied to the back gate of the first or the third transistor is adjusted, whereby the memory region of each of the first and the second memory circuit is changed.
METHOD FOR PRODUCING SEMICONDUCTOR COMPONENTS FROM A WAFER WITH SELECTIVE APPLICATION OF EDGE INSULATION
A method for producing a plurality of semiconductor components, in particular power semiconductor components, from a wafer. The method includes: providing a wafer substrate, processing a structured wafer surface, applying edge insulation to the wafer surface, and separating the wafer into individual semiconductor components.
Imaging device and electronic device
An imaging device that has an image processing function and is capable of a high-speed operation is provided. The imaging device has an additional function such as image processing, and can retain analog data obtained by an image capturing operation in pixels and extract data obtained by multiplying the analog data by a given weight coefficient. In the imaging device, the data is stored in a memory cell and pooling processing of data stored in a plurality of memory cells can be performed. The pixels are provided so as to have a region overlapping with at least one of the memory cells, a pooling processing circuit, and a reading circuit of the pixels; thus, an increase in the area of the imaging device can be inhibited even with an additional function.
Oxide semiconductor device
A semiconductor device including: a first insulator in which an opening is formed; a first conductor positioned in the opening; a first oxide over the first insulator; a second oxide over the first oxide; a third oxide and a fourth oxide over the second oxide; a second conductor over the third oxide and the first conductor; a third conductor over the fourth oxide; a fifth oxide over the second oxide; a second insulator over the fifth oxide; and a fourth conductor positioned over the second insulator and overlapping with the fifth oxide. The fifth oxide is in contact with each of a side surface of the third oxide and a side surface of the fourth oxide. The conductivity of the third oxide is higher than the conductivity of the second oxide. The second conductor is in contact with the top surface of the first conductor.
Method of forming semiconductor device
A method of forming a semiconductor device includes following steps. Firstly, a first transistor is formed on a first surface of a substrate. Next, a thinning process is performed on the second surface of the substrate which is opposite to the first surface, to form a third surface. Then, a second transistor is formed on the third surface, in which the second transistor and the first transistor are electrically connected to each other through a through-silicon via penetrating through the first surface and the third surface.