The present invention provides a method of manufacturing nanowire semiconductor device. In the active region of the PMOS the first nanowire is formed with high hole mobility and in the active region of the NMOS the second nanowire is formed with high electron mobility to achieve the objective of improving the performance of nanowire semiconductor device.

Semiconductor devices and methods of making the same include forming a first channel region on a first semiconductor region. A second channel region is formed on a second semiconductor region, the second semiconductor region being formed from a semiconductor material that is different from a semiconductor material of the first semiconductor region. A gate dielectric layer is formed over one or more of the first and second channel regions. A nitrogen-containing layer is formed on the gate dielectric layer. A gate is formed on the gate dielectric.

A method provides a first substrate supporting an insulator layer having trenches formed therein; filling the trenches using an epitaxial growth process with at least semiconductor material; planarizing tops of the filled trenches; forming a first layer of dielectric material on a resulting planarized surface; inverting the first substrate wafer to place the first layer of dielectric material in contact with a second layer of dielectric material on a second substrate; bonding the first substrate to the second substrate through the first and second layers of dielectric material to form a common layer of dielectric material; and removing the first substrate and a first portion of the filled trenches to leave a second portion of the filled trenches disposed upon the common dielectric layer. The removed first portion of the filled trenches contains dislocation defects. The method then removes the insulator layer to leave a plurality of Fin structures.

A plurality of gate structures are formed straddling nFET semiconductor fins and pFET semiconductor fins which extend upwards from a surface of a semiconductor substrate. A boron-doped silicon germanium alloy material is epitaxially grown from exposed surfaces of both the nFET semiconductor fins and the pFET semiconductor fins not protected by the gate structures. An anneal is then performed. During the anneal, silicon and germanium from the boron-doped silicon germanium alloy material diffuse into the nFET semiconductor fins and act as an n-type dopant forming a junction in the nFET semiconductor fins. Since boron is a Group IIIA element it does not have any adverse effect. During the same anneal, boron from the boron-doped silicon germanium alloy material will diffuse into the pFET semiconductor fins to form a junction therein.

A hybrid transistor circuit is disclosed for use in III-Nitride (III-N) semiconductor devices, comprising a Silicon (Si)-based Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET), a Group III-Nitride (III-N)-based Field-Effect Transistor (FET), and a driver unit. A source terminal of the III-N-based FET is connected to a drain terminal of the Si-based MOSFET. The driver unit has at least one input terminal, and two output terminals connected to the gate terminals of the transistors respectively. The hybrid transistor circuit is turned on through the driver unit by switching on the Silicon-based MOSFET first before switching on the III-N-based FET, and is turned off through the driver unit by switching off the III-N-based FET before switching off the Silicon-based MOSFET. Also disclosed are integrated circuit packages and semiconductor structures for forming such hybrid transistor circuits. The resulting hybrid circuit provides power-efficient and robust use of III-Nitride semiconductor devices.

Trenches (and processes for forming the trenches) are provided that reduce or prevent crystaline defects in selective epitaxial growth of type III-V or Germanium (Ge) material (e.g., a buffer material) from a top surface of a substrate material. The defects may result from collision of selective epitaxial sidewall growth with oxide trench sidewalls. Such trenches include (1) a trench having sloped sidewalls at an angle of between 40 degrees and 70 degrees (e.g., such as 55 degrees) with respect to a substrate surface; and/or (2) a combined trench having an upper trench over and surrounding the opening of a lower trench (e.g., the lower trench may have the sloped sidewalls, short vertical walls, or tall vertical walls). These trenches reduce or prevent defects in the epitaxial sidewall growth where the growth touches or grows against vertical sidewalls of a trench it is grown in.

Present embodiments provide for a complementary nanowire semiconductor device and fabrication method thereof. The fabrication method comprises providing a substrate, wherein the substrate has a NMOS active region, a PMOS active region and a shallow trench isolation (STI) region; forming a plurality of first hexagonal epitaxial wires on the NMOS active region and the PMOS active region by selective epitaxially growing a germanium (Ge) crystal material; selectively etching the substrate to suspend the pluralities of first hexagonal epitaxial wires on the substrate; forming a plurality of second hexagonal epitaxial wires on the NMOS active region by selective epitaxially growing a III-V semiconductor crystal material surrounding the pluralities of first hexagonal epitaxial wires on the NMOS active region; depositing a dielectric material on the pluralities of first hexagonal epitaxial wires and the pluralities of second hexagonal epitaxial wires, wherein the dielectric material covers the pluralities of first hexagonal epitaxial wires and the pluralities of second hexagonal epitaxial wires; and depositing a conducting material on the dielectric material for forming a gate electrode surrounding the pluralities of first hexagonal epitaxial wires and the pluralities of second hexagonal epitaxial wires, wherein the pluralities of first hexagonal epitaxial wires are a plurality of first nanowires and the pluralities of second hexagonal epitaxial wires are a plurality of second nanowires.

Present embodiments provide for a complementary nanowire semiconductor device and fabrication method thereof. The fabrication method comprises providing a substrate, wherein the substrate has a NMOS active region, a PMOS active region and a shallow trench isolation (STI) region; forming a plurality of first hexagonal epitaxial wires on the NMOS active region and the PMOS active region by selective epitaxially growing a germanium (Ge) crystal material; selectively etching the substrate to suspend the pluralities of first hexagonal epitaxial wires on the substrate; forming a plurality of second hexagonal epitaxial wires on the NMOS active region by selective epitaxially growing a III-V semiconductor crystal material surrounding the pluralities of first hexagonal epitaxial wires on the NMOS active region; depositing a dielectric material on the pluralities of first hexagonal epitaxial wires and the pluralities of second hexagonal epitaxial wires, wherein the dielectric material covers the pluralities of first hexagonal epitaxial wires and the pluralities of second hexagonal epitaxial wires; and depositing a conducting material on the dielectric material for forming a gate electrode surrounding the pluralities of first hexagonal epitaxial wires and the pluralities of second hexagonal epitaxial wires, wherein the pluralities of first hexagonal epitaxial wires are a plurality of first nanowires and the pluralities of second hexagonal epitaxial wires are a plurality of second nanowires.

Techniques are disclosed for forming low contact resistance transistor devices. A p-type germanium layer is provided between p-type source/drain regions and their respective contact metals, and an n-type III-V semiconductor material layer is provided between n-type source/drain regions and their respective contact metals. The n-type III-V semiconductor material layer may have a small bandgap (e.g., <0.5 eV) and/or otherwise be doped to provide desired conductivity, and the p-type germanium layer can be doped, for example, with boron. After deposition of the III-V material over both the n-type source/drain regions and the germanium covered p-type source/drain regions, an etch-back process can be performed to take advantage of the height differential between n and p type regions to self-align contact types and expose the p-type germanium over p-type regions and thin the n-type III-V material over the n-type regions. The techniques can be used on planar and non-planar transistor architectures.

To provide a semiconductor device that inhibits unexpected output of a high-level signal immediately after the rise of a power supply voltage. The semiconductor device includes a first buffer circuit, a level shifter circuit, and a second buffer circuit. A first potential is supplied to the first buffer circuit, and a second potential is supplied to the level shifter circuit and the second buffer circuit; consequently, the semiconductor device returns to a normal state. When the semiconductor device returns to a normal state, the second potential is supplied, so that the potential of a node in the level shifter circuit increases. To utilize the increase in the second potential or suppress malfunction due to the increase in the potential, capacitors are provided in the level shifter circuit. This inhibits unexpected operation of a transistor in the level shifter circuit.