In order to reduce the negative influence of reactive hydrogen on the lifetime of a reflective optical element, particularly inside an EUV lithography device, there is proposed for the extreme ultraviolet and soft X-ray wavelength region a reflective optical element (50) having a reflective surface (60) with a multilayer system (51) and in the case of which the reflective surface (60) has a protective layer system (59) with an uppermost layer (56) composed of silicon carbide or ruthenium, the protective layer system (59) having a thickness of between 5 nm and 25 nm.

An optical film to be arranged on a display surface is adapted so as to allow uniform application of an interlayer filler and thus also is applicable to an image display device equipped with a front plate. Preferably, such optical film is for use in an image display device. The optical film is adapted so that a relationship of the following formula (1) is satisfied:
b0.2a+1.8(1), where a is the viscosity (Pa.Math.s) of an interlayer filler at the time of attaching the front plate to a surface of the optical film via the interlayer filler, and b is the atomic percentage (atm %) of silicon atoms on the surface of the optical film. The atomic percentage of oxygen atoms on the surface of the optical film is at least 26 atm %.

This invention relates to a highly optically clear, composite film having a predominantly thermoplastic polyester base layer and a primer layer of a polyester and polyurethane blend composition. The base layer preferably has an A/B/C layered structure with a substantially particle-free core layer B of polyester and outer layers A and C of polyester containing nonpolyester, organic and/or inorganic particles. The primer layer is preferably applied to the base layer from solution that is organic solvent-free and is crosslinked using a carbodiimide crosslinking agent. The primer layer and base layer composite can be laminated with a protective layer of primarily acrylic polymer for a solar control film. Various layers of the composite and solar control films can contain effective amounts of functional additives, such as UV light blockers. Polyurethane in the primer, especially in combination with crosslinking by the carbodiimide, provides the acrylic coated polyester base solar control film with notably reduced iridescence and durable adhesion between polyester and acrylic layers in moist and warm service conditions.

A protective film for polarizing plate made by laminating k layers (k being an integer of 2 to 7) of thermoplastic resin, in which a refractive index n.sub.i() at a wavelength X in the range of 380 to 780 nm of the i th thermoplastic resin layer as well as a refractive index n.sub.i+1() at a wavelength in the range of 380 to 780 nm of the i+1 th thermoplastic resin layer have a relationship of In |n.sub.i()n.sub.i+1()|0.045 (i being an integer of 1 to kl); and a polarizing plate comprising the protective film and a polarizer. The protective film has an in-plane retardation Re at a wavelength of 550 nm of 50 nm or less, and is obtained by coextruding at least one layer (A) of thermoplastic resin having of a negative photoelastic coefficient with at least one layer (B) of thermoplastic resin having a positive photoelastic coefficient.

A method for producing a capping layer (18) composed of silicon oxide SiO.sub.x on a coating (16) of a mirror (13), the coating reflecting EUV radiation (6) e.g. for use in an EUV lithography apparatus or in an EUV mask metrology system. The method includes irradiating a capping layer (18) composed of silicon nitride SiN.sub.x or composed of silicon oxynitride SiN.sub.xO.sub.y for converting the silicon nitride SiN.sub.x or the silicon oxynitride SiN.sub.xO.sub.y of the capping layer (18) into silicon oxide SiO.sub.x. An associated mirror (13) includes a capping layer comprised of silicon oxide SiO.sub.X, and can be provided in an associated EUV lithography apparatus.

A laminated body includes: an antireflection film; and a protection film bonded onto the antireflection film. The adhesive layer is a layer with a material formed by cross-linking, with a cross-linking agent (B), and a (meth)acrylic acid ester copolymer. The (meth)acrylic acid ester copolymer (A) is a copolymer formed by polymerizing monomer components including, in relation to the total amount of the monomer components set at 100% by mass, 70 to 98% by mass of a (meth)acrylic acid alkyl ester monomer (a) including a noncyclic alkyl group containing 4 to 9 carbon atoms, 1.5 to 25% by mass of a (meth)acrylic acid ester monomer (b) containing an aliphatic ring, and 0.5 to 5% by mass of a (meth)acrylic-based monomer (c) containing a functional group exhibiting reactivity with the cross-linking agent (B). The area proportion of the components each having a molecular weight of 100,000 or less, is less than 3.0%.

A process for manufacturing a transparent body for use in a touch panel is provided. The process includes: The process includes depositing a first transparent layer stack over a substrate with a first silicon-containing dielectric film, a second silicon-containing dielectric film, and a third silicon-containing dielectric film. The first and the third silicon-containing dielectric films have a low refractive index and the second silicon-containing dielectric film has a high refractive index. The process further includes depositing a transparent conductive film in a manner such that the first transparent layer stack and the transparent conductive film are disposed over the substrate in this order. At least one of the first silicon-containing dielectric film, the second silicon-containing dielectric film, the silicon-containing third dielectric film, or the transparent conductive film is deposited by sputtering from a target. Further thereto, a deposition apparatus (300) for manufacturing a transparent body for use in a touch panel and a transparent body for use in a touch panel are provided.

The problem is to provide a front plate of a TN liquid crystal display device capable of reducing occurrence of color unevenness caused by retardation of a polycarbonate resin sheet, even when the liquid crystal panel is observed through polarizing glasses or liquid crystal shutter glasses for 3D, while having excellent impact resistance, heat resistance and transparency. The solution means are that the direction of the slow axis or the fast axis of a polycarbonate resin sheet is parallel to the lengthwise direction of a TN liquid crystal panel, and that retardation is not less than 5000 nm.

A touching display panel and a display device using the same are provided. The touching display panel includes a liquid crystal layer, a first substrate having a hard surface structure, a second substrate, a touch sensor layer, a thin-film transistor layer, and a color filter layer. The first and second substrates are respectively disposed at two sides of the liquid crystal layer. The touch sensor layer is disposed between the first substrate and the liquid crystal layer, and is formed on the first substrate. The thin-film transistor layer and the color filter layer are both disposed between the first substrate and the second substrate. At least one of the thin-film transistor layer and the color filter layer is formed on the first substrate.

Embodiments of this disclosure pertain to articles that exhibit scratch-resistance and improved optical properties. In some examples, the article exhibits a color shift of about 2 or less, when viewed at an incident illumination angle in the range from about 0 degrees to about 60 degrees from normal under an illuminant. In one or more embodiments, the articles include a substrate, and an optical film disposed on the substrate. The optical film includes a scratch-resistant layer and a refractive index gradient. In one or more embodiments, the refractive index includes a refractive index that increases from a first surface at the interface between the substrate and the optical film to a second surface. The refractive index gradient may be formed from a compositional gradient and/or a porosity gradient.