A process for manufacturing a microelectromechanical mirror device includes, in a semiconductor wafer, defining a support frame, a plate connected to the support frame so as to be orientable around at least one rotation axis, and cantilever structures extending from the support frame and coupled to the plate so that bending of the cantilever structures causes rotations of the plate around the at least one rotation axis. The process further includes forming piezoelectric actuators on the cantilever structures, forming pads on the support frame, and forming spacer structures protruding from the support frame more than both the pads and the stacks of layers forming the piezoelectric actuators.

A vibration module is disclosed. The vibration module includes a film, a piezoelectricity device, and a substrate. The film has a first surface. The piezoelectricity device is disposed on the first surface. The substrate is disposed on the first surface by in-mold injection method, which contacts and surrounds the piezoelectricity device.

There is provided liquid discharging head having unit heads. Each of the unit heads includes: first piezoelectric layer, driving electrodes arranged on surface of the first piezoelectric layer and to each of which one of first and second potentials is to be applied, and common electrode. The common electrode includes: potential receiving part configured to receive one of the first and second potentials; and extending part extending in extending direction orthogonal to the first direction, so as to overlap with the driving electrodes in the first direction. The unit heads are arranged so that the common electrodes of the plurality of unit heads are adjacent to each other in second direction orthogonal to the first direction. The extending directions of two of the common electrodes adjacent to each other in the second direction are opposite to each other.

A juicer having improved juicing performance, including: a housing in which a motor is built in; a screw housing detachably coupled to the housing; and a driving screw exposed to one side of the housing and received in the screw housing so as to rotate by being coupled to a driving shaft rotatably driven by the motor. The driving screw includes: a driving screw main body in which an installation groove opened toward the housing is formed; one or more piezoelectric element provided in the installation groove of the driving screw main body; and a contact terminal electrically connected to the piezoelectric element and electrically contacting a contact electrode provided in the housing.

A piezoelectric driving device includes a piezoelectric vibrating body and a driving circuit. The piezoelectric vibrating body includes a contact which extends in a first direction and comes into contact with a driven member, a first piezoelectric element which generates bending vibration in a direction intersecting with the first direction in accordance with a first driving voltage, and a second piezoelectric element which generates longitudinal vibration in the first direction in accordance with a second driving voltage. The piezoelectric vibrating body is configured such that a resonance frequency of the longitudinal vibration is higher than a resonance frequency of the bending vibration. The driving circuit sets a driving frequency of each of the first driving voltage and the second driving voltage to be equal to or higher than the resonance frequency of the longitudinal vibration.

Various embodiments of the present disclosure provide a read/write device for a hard-disk memory system. The read/write device includes a fixed structure; a membrane region including a first and a second membrane, which are constrained to the fixed structure, and a central portion, interposed between the first and second membranes; a first and a second piezoelectric actuator, mechanically coupled, respectively, to the first and second membranes; and a read/write head, which is fixed to the central portion of the membrane region. The first and second piezoelectric actuators can be controlled so as to cause corresponding deformations of the first and second membranes, said deformations of the first and second membranes causing corresponding movements of the read/write head with respect to the fixed structure.

A piezoelectric actuator including an upper piezoelectric bimorph beam having a first upper piezoelectric layer, a second upper piezoelectric layer and at least three upper electrode layers extending between a first end and a second end of the upper piezoelectric bimorph beam; a lower piezoelectric bimorph beam having a first lower piezoelectric layer, a second lower piezoelectric layer and at least three lower electrode layers extending between a first end and a second end of the lower piezoelectric bimorph beam, and wherein the first end of the lower piezoelectric bimorph beam is coupled to the first end of the upper piezoelectric bimorph beam by a first joint, and the second end of the lower piezoelectric bimorph beam is coupled to second end of the upper piezoelectric bimorph beam; and a base member coupled to a center region of the lower piezoelectric bimorph beam.

Provided are a display device. The display device comprises a display panel displaying an image, a main circuit board disposed under the display panel, a first vibration element attached to a lower surface of the display panel and providing first vibration in accordance with a first vibration signal, a second vibration element disposed on the main circuit board and providing second vibration in accordance with a second vibration signal, and a first vibration driver circuit providing the first vibration signal to the first vibration element, wherein a phase of the second vibration signal is opposite to a phase of the first vibration signal.

A metal stack for templating the growth of AlN and ScAlN films is disclosed. The metal stack comprises one, two, or three layers of metal, each of which is compatible with CMOS post-processing. The metal stack provides a template that promotes the growth of highly textured c-axis {002} AlN and ScAlN films. The metal stacks include one or more metal layers with each metal layer having either a hexagonal {002} orientation or a cubic {111} orientation. If the metal stack includes two or more metal layers, the layers can alternate between hexagonal {002} and cubic {111} orientations. The use of ScAlN results in a higher piezoelectric constant compared to that of AlN for ScAlN alloys up to approximately 44% Sc. The disclosed metal stacks resulted in ScAlN films having XRD FWHM values of less than approximately 1.1° while significantly reducing the formation of secondary grains in the ScAlN films.

A bulk-acoustic resonator module includes: a module substrate; a bulk-acoustic resonator connected to the module substrate by a connection terminal and disposed spaced apart from the module substrate; and a sealing portion sealing the bulk-acoustic resonator. The bulk-acoustic resonator includes a resonating portion disposed opposite to an upper surface of the module substrate. A space is disposed between the resonating portion and the upper surface of the module substrate.