The invention provides a substrate support arranged to support a substrate, comprising piezo a actuator, further comprising a first pair of electrodes, a second pair of electrodes and a piezo material having a first surface and a second surface. The first surface is arranged along a first direction and second direction. The first pair of electrodes comprises a first electrode arranged on the first surface and a second electrode arranged on the second surface. The second pair of electrodes is arranged to shear the piezo material. The first pair of electrodes is arranged to elongate the piezo material in a third direction perpendicular to the first direction and second direction. The first electrode is divided into at least two parts and is arranged to rotate the first surface and the second surface relatively to each other about the first direction wherein the piezo actuator is arranged to support the substrate.

A piezoelectric actuator 10 includes: a piezoelectric element 11; an external electrode 12 covering partially a first surface 11a of the piezoelectric element 11 in a first direction; a wiring member 14; and a conductive joining member 20 joining the wiring member 14 to the external electrode 12, wherein the conductive joining member 20 has an air gap 70 formed between the external electrode 12 and the wiring member 14 in a region overlapping with the wiring member 14 as viewed in the first direction, and wherein the conductive joining member 20 extends to an edge 21 of the external electrode 12 or extends to the first surface 11a of the piezoelectric element 11 beyond the edge 21 of the external electrode 12.

A PMUT ultrasound transducer includes a number of PMUT transmitting elements in a membrane layer. Behind each PMUT transmitting element is a cavity in the membrane layer. The cavities are partially or completely filled with a damping material to reduce ringing of the PMUT transmitting elements. Suitable damping materials include polymers, e.g., soft epoxies, benzocyclobutene or polyimide that are dispersed into the cavities or a phase changing material such as Parylene that precipitates out of a gas phase as a polymer when cured.

A piezoelectric microelectromechanical system microphone comprises a piezoelectric element configured to deform and generate an electrical potential responsive to impingement of sound waves on the piezoelectric microelectromechanical system microphone, a sensing electrode disposed on the piezoelectric element and configured to sense the electrical potential, and a passive membrane mechanically coupled to the surface of the piezoelectric element to increase sensitivity of the piezoelectric microelectromechanical system microphone.

An ultrasonic device, comprising an ultrasonic transducer (400) comprising: a membrane (405) suspended above a cavity (403) arranged on the upper surface side of a substrate (401); a piezoelectric layer (407) attached to a surface of the membrane (405); a first electrode (E1) arranged on the lower surface side of the cavity (403); and a second electrode (E3) arranged on the upper surface side of the cavity (403), in contact with the piezoelectric layer (407), the device further comprising a control circuit (CTRL) connected to the first (E1) and second (E3) electrodes and capable of applying a first control voltage (VDC) on the first electrode (E1), and a second control voltage (VAC) different from the first voltage on the second electrode (E3).

Provided is a piezoelectric actuator that can reduce a risk of air leakage due to weakening of pressing force of a valve element against a valve seat surface and airtightness. The piezoelectric actuator is used for a piezoelectric valve that opens and closes a valve utilizing displacement of a laminated piezoelectric element. The piezoelectric actuator includes: a valve element; a laminated piezoelectric element that generates a driving force, required for operation of the valve element, as a displacement; and a displacement enlargement mechanism that enlarges a displacement of a laminated piezoelectric element and causes the enlarged displacement to act on the valve element. In the piezoelectric actuator, a surface of the valve element to be in contact with a valve seat of the piezoelectric valve is made flat and smooth in a state in which a tensile load is applied to the laminated piezoelectric element.

A piezoelectric band (10) includes: a base sheet (11) that has flexibility and is formed into a sheet shape; a piezoelectric sheet (20) that has flexibility and is formed into a sheet shape and placed over one side of the base sheet (11); and a cover sheet (12) that has flexibility and is formed into a sheet shape and placed over and in contact with one side of the piezoelectric sheet (20) that faces away from the base sheet (11). Upon reception of a drive signal, the piezoelectric sheet (20) vibrates at or above a frequency of 15 kHz. The cover sheet (12) has a plurality of holes (12a) passing therethrough from one side facing the piezoelectric sheet (20) to the other side, and the plurality of holes (12a) forms respectively air layers through which vibration of the piezoelectric sheet (20) propagates toward the other side.

Piezoelectric transducers are provided. The piezoelectric transducer includes a first piezoelectric layer, a second piezoelectric layer disposed on at least a portion of the first piezoelectric layer, and a middle electrode layer disposed between the first and second piezoelectric layers, where the middle electrode layer includes an inner region and an outer region spaced apart from the inner region. Methods of making the piezoelectric transducers are also provided. The piezoelectric transducers and methods find use in a variety of applications, including devices, such as electronics devices having one or more (e.g., an array) of the piezoelectric transducers.

A piezoelectric transducer for measuring a force includes a base element; a pre-loading element; at least one effective main seismic mass aggregation of pre-loaded parts capable of producing the force when being accelerated; a main piezoelectric ceramic element including a first piezoelectric ceramic; at least one compensation seismic mass aggregation of pre-loaded parts capable of producing a compensation force when being accelerated; a compensation piezoelectric ceramic element including a second piezoelectric ceramic. The first piezoelectric ceramic has a thermal sensitivity shift smaller than the second piezoelectric ceramic. The main piezoelectric ceramic element is oriented with respect to the force to be measured and the compensation piezoelectric ceramic element is oriented with respect to the compensation force such that the main electric charge and the compensation electric charge are opposite in polarity.

An ultrasonic generator that is capable of increasing output sound pressure is provided. An ultrasonic generating element is accommodated in an accommodation space that is formed by a first case member and a second case member. The ultrasonic generating element is secured to the first case member via a plurality of first supporting members. The first supporting members are provided so that, in a first acoustic path that includes a space formed between a bottom surface of the ultrasonic generating element and a top surface of the first case member and that extends to sound-wave emission holes, a transverse section of the acoustic path has a portion that becomes smaller than another portion thereof.