An elastic wave device includes a supporting substrate, a high-acoustic-velocity film stacked on the supporting substrate and in which an acoustic velocity of a bulk wave propagating therein is higher than an acoustic velocity of an elastic wave propagating in a piezoelectric film, a low-acoustic-velocity film stacked on the high-acoustic-velocity film and in which an acoustic velocity of a bulk wave propagating therein is lower than an acoustic velocity of a bulk wave propagating in the piezoelectric film, the piezoelectric film is stacked on the low-acoustic-velocity film, and an IDT electrode stacked on a surface of the piezoelectric film.

A metal substrate supported by a wiring substrate includes a first extending portion and a first connection portion connected to the first extending portion. The first connection portion includes a first region facing a portion of a wiring substrate in a Z-axis direction, a second region being continuous from the first region, and a third region being continuous from the second region. When viewed in the Z-axis direction, in a direction perpendicular to a connection direction in which the third region is connected to the second region, a width of the second region is larger than a width of the third region. A first bonding member bonding the wiring substrate and the metal substrate includes a first portion disposed between the portion and the first region, and a second portion being continuous from the first portion. The second portion reaches the second region but does not reach the third region.

A metal substrate supported by a wiring substrate includes a movable portion, a first extending portion, a first coupling portion that couples the first extending portion and the movable portion, and a first connection portion connected to the first extending portion. The first connection portion includes a first fixing region fixed to the wiring substrate, and a first connection region connected to the first extending portion and to the first fixing region. The first connection region includes a first bent portion. The first bent portion has a first outer edge on a movable portion side, and a second outer edge opposite the movable portion, and each of the first outer edge and the second outer edge is bent toward the movable portion side when viewed in a Z-axis direction.

Technologies for a microelectromechanical system (MEMS) made up of composable piezoelectric actuators is disclosed. An elongated piezoelectric rod is disposed between a top and a bottom electrode. The top electrode runs along one edge of the top of the piezoelectric rod for a first segment, then runs along the other edge of the top of the piezoelectric rod for the a second segment. When a voltage is applied across the electrodes, the piezoelectric rod bends in a first direction for the first segment and in a second direction opposite the first for the second segment, displacing the tip of the rod. Several such rods can be joined in parallel and/or series, allowing for large-scale systems to be composed.

A medical, particularly a dental or dental surgical, ultrasonic treatment device for generating ultrasonic vibrations and transmitting the ultrasonic vibration to a tool, which can be connected to the ultrasonic treatment device, the medical ultrasonic treatment device having: an ultrasonic vibration generator with a plurality of piezoelectric elements to which an electric voltage can be applied, and a circuit board to supply the plurality of piezoelectric elements with the electric voltage. Furthermore, a method for manufacturing a corresponding medical ultrasonic treatment device is described.

A piezoelectric transformer comprises at least a laminate of a first member, a first piezoelectric element, a second piezoelectric element and a second member sequentially stacked one on the other in the above-listed order and a pressurizing mechanism for squeezing the first member and the second member together in the stacking direction. The ratio of the electromechanical coupling coefficient k.sub.33 relative to the electromechanical coupling coefficient k.sub.31 (k.sub.33/k.sub.31) of the first piezoelectric element and the second piezoelectric element is not less than 2.0.

Disclosed is a self-powered vibration damper based on piezoelectricity and a control method. The damper comprises a loading platform, an energy collecting mechanism, a curved leaf spring, a vibration control mechanism and a substrate all connected in sequence, the circuit system comprises a rectifier circuit, a DC-DC voltage conversion circuit, an energy storage circuit, a control circuit and a charging battery, a first piezoelectric stack is connected with the input end of the rectifier circuit, the output end of the rectifier circuit is connected with the input end of the DC-DC voltage conversion circuit, the output end of the DC-DC voltage conversion circuit is connected with the input ends of the energy storage circuit and the charging battery, the output end of the energy storage circuit is connected with the input end of the control circuit, the output end of the control circuit is connected with the second piezoelectric stack.

A perfusion chamber for use in a phantom includes a waterproof housing containing a porous material defining fluid paths between pores and tubular channels within the porous material. A reservoir for use in a phantom, a pump mechanism for use within the bore of an MRI scanner, a phantom for use in an MRI scanner, and a method for calibrating a scanning device are disclosed. Also disclosed is apparatus for validating images of a phantom that includes: one or more sensors for coupling to a phantom to be imaged; a control/logging system configured to: collect sensor data during imaging of the phantom and pass this as input to a computer model; compare the image data with reference image data produced using the computer model; and return a pass score depending on the comparison. A system and method for verifying images of a phantom are also disclosed.

A piezoelectric driving device includes a piezoelectric vibrating body and a driving circuit. The piezoelectric vibrating body includes a contact which extends in a first direction and comes into contact with a driven member, a first piezoelectric element which generates bending vibration in a direction intersecting with the first direction in accordance with a first driving voltage, and a second piezoelectric element which generates longitudinal vibration in the first direction in accordance with a second driving voltage. The piezoelectric vibrating body is configured such that a resonance frequency of the longitudinal vibration is higher than a resonance frequency of the bending vibration. The driving circuit sets a driving frequency of each of the first driving voltage and the second driving voltage to be equal to or higher than the resonance frequency of the longitudinal vibration.

A metal stack for templating the growth of AlN and ScAlN films is disclosed. The metal stack comprises one, two, or three layers of metal, each of which is compatible with CMOS post-processing. The metal stack provides a template that promotes the growth of highly textured c-axis {002} AlN and ScAlN films. The metal stacks include one or more metal layers with each metal layer having either a hexagonal {002} orientation or a cubic {111} orientation. If the metal stack includes two or more metal layers, the layers can alternate between hexagonal {002} and cubic {111} orientations. The use of ScAlN results in a higher piezoelectric constant compared to that of AlN for ScAlN alloys up to approximately 44% Sc. The disclosed metal stacks resulted in ScAlN films having XRD FWHM values of less than approximately 1.1° while significantly reducing the formation of secondary grains in the ScAlN films.