A method for fabricating a semiconductor device includes the steps of first providing a substrate having a non-metal-oxide semiconductor capacitor (non-MOSCAP) region and a MOSCAP region, forming a first fin-shaped structure on the MOSCAP region, performing a monolayer doping (MLD) process on the first fin-shaped structure, and then performing an anneal process for driving dopants into the first fin-shaped structure. Preferably, the MLD process is further accomplished by first performing a wet chemical doping process on the first fin-shaped structure and then forming a cap layer on the non-MOSCAP region and the MOSCAP region.

A switching circuit includes a wiring into which a parallel circuit of a first IGBT and a second IGBT is inserted, and a gate control circuit. The gate control circuit has a first switching element configured to control a gate potential of the first IGBT according to a potential of a second principal electrode, and a second switching element configured to control a gate potential of the second IGBT according to a potential of a fourth principal electrode. An output terminal of the control device is connected to the first switching element through a first switch and is connected to the second switching element through a second switch. The control device applies a control signal to the output terminal in a state where the first switch and the second switch are turned on when switching both of the first IGBT and the second IGBT.

A switching circuit switches a first IGBT and a second IGBT. A control circuit is equipped with a first switching element that is configured to be able to control a gate current of the first IGBT, a second switching element that is configured to be able to control a gate current of the second IGBT, and a third switching element that is connected between an electrode of the first IGBT and an electrode of the second IGBT. The control circuit controls a turn on timing and turn off timing.

A semiconductor device includes a semiconductor substrate including, on a first surface, first trenches and a second trench linked to each of the first trenches. The semiconductor substrate includes: a p-type end layer extending from the first surface to a position closer to a second surface of the semiconductor substrate than an end of each of the first trenches on a second surface side and including a longitudinal end of each of the first trenches in a plan view of the first surface; a first p-type layer provided in a region between adjacent first trenches, and contacting the first electrode provided on the first surface; an n-type barrier layer; a second p-type layer. The second trench separates the p-type end layer from the first p-type layer and the second p-type layer.

Described herein are semiconductor devices and methods of forming the same. In some aspects, methods of forming a semiconductor device includes forming a gate stack having a self-aligning cap and a gate metal on a substrate, depositing a resist mask onto the semiconductor device, and patterning the resist mask such that the gate stack is exposed. Additionally, methods include removing the self-aligning cap and the gate metal from the exposed gate stack, depositing a resistor metal on the semiconductor device such that a metal resistor is formed within the exposed gate stack, and forming a bar contact and contact via above the metal resistor.

Described herein are semiconductor devices and methods of forming the same. In some aspects, methods of forming a semiconductor device includes forming a gate stack having a self-aligning cap and a gate metal on a substrate, depositing a resist mask onto the semiconductor device, and patterning the resist mask such that the gate stack is exposed. Additionally, methods include removing the self-aligning cap and the gate metal from the exposed gate stack, depositing a resistor metal on the semiconductor device such that a metal resistor is formed within the exposed gate stack, and forming a bar contact and contact via above the metal resistor.

The betas of the bipolar transistors in a BiCMOS semiconductor structure are increased by forming the emitters of the bipolar transistors with two implants: a source-drain implant that forms a first emitter region at the same time that the source and drain regions are formed, and an additional implant that forms a second emitter region at the same time that another region is formed. The additional implant has an implant energy that is greater than the implant energy of the source-drain implant.

The present disclosure provides a semiconductor structure. The semiconductor structure includes a substrate having a first region and a second region; a first fin feature formed on the substrate within the first region; and a second fin feature formed on the substrate within the second region. The first fin feature includes a first semiconductor feature of a first semiconductor material formed on a dielectric feature that is an oxide of a second semiconductor material. The second fin feature includes a second semiconductor feature of the first semiconductor material formed on a third semiconductor feature of the second semiconductor material.

A semiconductor device includes: a depletion-type field-effect transistor including a gate terminal, a drain terminal and a source terminal; a group III-V heterojunction bipolar transistor including a base terminal, an emitter terminal electrically connected to the gate terminal and a collector terminal connected to same potential as that of the source terminal; a first resistor connected between the base terminal and the emitter terminal; and a second resistor connected between the base terminal and the collector terminal.

According to an embodiment of the invention there may be provided a die that may include a first capacitor layer that comprises (a) a first capacitor conductive plate, and (b) a first capacitor layer dielectric material that partially surrounds the first capacitor conductive plate; a first conductor; an intermediate metal layer that comprises (a) an intermediate metal layer conductor that is made of Copper, and (b) an intermediate metal layer dielectric material that partially surrounds the intermediate metal layer conductor; wherein the first conductor is positioned between a substrate of the die and the intermediate metal layer; a redistribution layer that comprises (a) a redistribution layer conductor that is electrically coupled to an interface pad of the die, (b) a second capacitor conductive plate, and (c) a redistribution layer dielectric material that partially surrounds the redistribution layer conductor and the second capacitor conductive plate; wherein a certain portion of the intermediate metal layer dielectric material is positioned between the first and second capacitor conductive plates; wherein at least the certain portion of the intermediate metal layer dielectric material, the first capacitor conductive plate and the second capacitor conductive plate form a high voltage capacitor; and wherein the intermediate metal layer conductor is configured to supply power to a group of transistors of the die while the first conductor is configured to supply power only to a sub-group of the transistors of the die.