Patent classifications
H10D64/511
DUAL CHANNEL MATERIAL FOR finFET FOR HIGH PERFORMANCE CMOS
Silicon fins are formed in a bulk silicon substrate and thereafter trench isolation regions are formed between each silicon fin. The silicon fins in nFET and pFET device regions are then recessed. A relaxed silicon germanium alloy fin portion is formed on a topmost surface of each recessed silicon fin portion or on exposed surface of the substrate. A compressively strained silicon germanium alloy fin portion is formed on each relaxed silicon germanium alloy fin portion within the pFET device region, and a strained silicon-containing fin portion is formed on each relaxed silicon germanium alloy fin portion within the nFET device region. Sidewall surfaces of each compressively strained silicon-containing germanium alloy fin portion and each tensile strained silicon-containing fin portion are then exposed. A functional gate structure is provided on the exposed sidewall surfaces of each compressively strained silicon-containing germanium alloy fin portion and each tensile strained silicon-containing fin portion.
DUAL CHANNEL MATERIAL FOR finFET FOR HIGH PERFORMANCE CMOS
Silicon fins are formed in a bulk silicon substrate and thereafter trench isolation regions are formed between each silicon fin. The silicon fins in nFET and pFET device regions are then recessed. A relaxed silicon germanium alloy fin portion is formed on a topmost surface of each recessed silicon fin portion or on exposed surface of the substrate. A compressively strained silicon germanium alloy fin portion is formed on each relaxed silicon germanium alloy fin portion within the pFET device region, and a strained silicon-containing fin portion is formed on each relaxed silicon germanium alloy fin portion within the nFET device region. Sidewall surfaces of each compressively strained silicon-containing germanium alloy fin portion and each tensile strained silicon-containing fin portion are then exposed. A functional gate structure is provided on the exposed sidewall surfaces of each compressively strained silicon-containing germanium alloy fin portion and each tensile strained silicon-containing fin portion.
MULTI-VT GATE STACK FOR III-V NANOSHEET DEVICES WITH REDUCED PARASITIC CAPACITANCE
A nanosheet field effect transistor design in which the threshold voltage is adjustable by adjusting the composition of the gate. The channel of the nanosheet field effect transistor may be composed of a III-V semiconductor material, and the gate, which may be separated from the channel by a high dielectric constant dielectric layer, may also be composed of a III-V semiconductor material. Adjusting the composition of the gate may result in a change in the affinity of the gate, in turn resulting in a change in the threshold voltage. In some embodiments the channel is composed, for example, of In.sub.xGa.sub.1-xAs, with x between 0.23 and 0.53, and the gate is composed of InAs.sub.1-yN.sub.y with y between 0.0 and 0.4, and the values of x and y may be adjusted to adjust the threshold voltage.
Lateral/vertical semiconductor device
A lateral semiconductor device and/or design including a space-charge generating layer and an electrode or a set of electrodes located on an opposite side of a device channel as contacts to the device channel is provided. The space-charge generating layer is configured to form a space-charge region to at least partially deplete the device channel in response to an operating voltage being applied to the contacts to the device channel.
FIELD EFFECT TRANSISTOR AND MANUFACTURING METHOD THEREOF
A field effect transistor comprising a substrate, at least one gate structure, spacers and strained source and drain regions is described. The at least one gate structure is disposed on the substrate and between the recesses and the isolation structures. The spacers are disposed on sidewalls of the at least one gate structure. The strained source and drain regions are disposed in the recesses and on two opposite sides of the at least one gate structure, and top edges of the strained source and drain regions are covered by the spacers and located beneath the spacers.
FIN FIELD EFFECT TRANSISTOR AND METHOD FOR FABRICATING THE SAME
A FinFET including a substrate, a plurality of insulators disposed on the substrate, a gate stack and a strained material is provided. The substrate includes a plurality of semiconductor fins. The semiconductor fins include at least one active fin and a plurality of dummy fins disposed at two opposite sides of the active fin. The insulators are disposed on the substrate and the semiconductor fins are insulated by the insulators. The gate stack is disposed over portions of the semiconductor fins and over portions of the insulators. The strained material covers portions of the active fin that are revealed by the gate stack. In addition, a method for fabricating the FinFET is provided.
Semiconductor device with modulated field element isolated from gate electrode
The current invention introduces a modulated field element incorporated into the semiconductor device outside the controlling electrode and active areas. This element changes its conductivity and/or dielectric properties depending on the electrical potentials of the interface or interfaces between the modulated field element and the semiconductor device and/or incident electromagnetic radiation. The element is either connected to only one terminal of the semiconductor device, or not connected to any terminal of a semiconductor device nor to its active area(s). Such an element can be used as modulated field plate, or a part of a field plate, as a passivation layer or its part, as a guard ring or its part, as a smart field or charge control element or its part, as a feedback element or its part, as a sensor element or its part, as an additional electrode or its part, as an electromagnetic signal path or its part, and/or for any other functions optimizing or modernizing device performance.
Silicene material layer and electronic device having the same
Provided are silicene material layers and electronic devices having a silicene material layer. The silicene material layer contains silicon atoms in a 2-dimensional honeycomb structure formed as one of a monolayer and a double layer. The silicene material layer includes a doping region doped with at least one material from the group of Group 1, Group 2, Group 16 and Group 17 and at least one of a p-type dopant or an n-type dopant.
SEMICONDUCTOR APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR APPARATUS
A semiconductor apparatus includes an electron transit layer formed of a nitride semiconductor over a substrate; an electron supply layer formed of a nitride semiconductor including In over the electron transit layer; a cap layer formed of a nitride semiconductor over the electron supply layer; an insulation film formed over the cap layer; a source electrode and a drain electrode formed over the electron transit layer or the electron supply layer; and a gate electrode formed over the cap layer. A quantum well is formed by the cap layer.
Methods of forming a protection layer on a semiconductor device and the resulting device
One illustrative method disclosed herein includes, among other things, forming a first high-k protection layer on the source/drain regions and adjacent the sidewall spacers of a transistor device, removing a sacrificial gate structure positioned between the sidewall spacers so as to thereby define a replacement gate cavity, forming a replacement gate structure in the replacement gate cavity, forming a second high-k protection layer above an upper surface of the spacers, above an upper surface of the replacement gate structure and above the first high-k protection layer, and removing portions of the second high-k protection layer positioned above the first high-k protection layer.