A photoelectric conversion apparatus includes a plurality of photoelectric conversion circuits configured to be arranged in a semiconductor layer having a first plane and a second plane. The plurality of photoelectric conversion circuits is individually isolated by an isolation structure. The semiconductor layer includes a plurality of trench portions arranged on the first plane of each of the photoelectric conversion circuits. The plurality of trench portions is configured of a first trench portion extending in a first direction as an in-plane direction of the first plane and a second trench portion extending in a second direction as an in-plane direction of the first plane intersecting with the first direction. A filler member and an airgap are arranged in an interior of a trench portion at a position where the first trench portion and the second trench portion intersect with each other.

A photoelectric conversion apparatus includes a plurality of photoelectric conversion circuits configured to be arranged in a semiconductor layer having a first plane and a second plane. The plurality of photoelectric conversion circuits is individually isolated by an isolation structure. The semiconductor layer includes a plurality of trench portions arranged on the first plane of each of the photoelectric conversion circuits. The plurality of trench portions is configured of a first trench portion extending in a first direction as an in-plane direction of the first plane and a second trench portion extending in a second direction as an in-plane direction of the first plane intersecting with the first direction. A filler member and an airgap are arranged in an interior of a trench portion at a position where the first trench portion and the second trench portion intersect with each other.

There is provided a two-terminal device, including a substrate comprising a first cell having a first characteristic resistance, and a second cell, spaced apart from the first cell along the web direction of the substrate, having a second characteristic resistance; a first terminal and a second terminal, each terminal being formed towards or at opposing edges of the substrate across the transverse direction, and each terminal being in electrical communication with the first cell and the second cell; and a connecting portion, between the first cell and the second cell, the connecting portion having a third characteristic resistance; wherein the third characteristic resistance is greater than or equal to at least one of the first characteristic resistance and the second characteristic resistance. There is also provided a method of forming such a two-terminal device).

There is provided a two-terminal device, including a substrate comprising a first cell having a first characteristic resistance, and a second cell, spaced apart from the first cell along the web direction of the substrate, having a second characteristic resistance; a first terminal and a second terminal, each terminal being formed towards or at opposing edges of the substrate across the transverse direction, and each terminal being in electrical communication with the first cell and the second cell; and a connecting portion, between the first cell and the second cell, the connecting portion having a third characteristic resistance; wherein the third characteristic resistance is greater than or equal to at least one of the first characteristic resistance and the second characteristic resistance. There is also provided a method of forming such a two-terminal device).

There is provided a two-terminal device, including a substrate comprising a first cell having a first characteristic resistance, and a second cell, spaced apart from the first cell along the web direction of the substrate, having a second characteristic resistance; a first terminal and a second terminal, each terminal being formed towards or at opposing edges of the substrate across the transverse direction, and each terminal being in electrical communication with the first cell and the second cell; and a connecting portion, between the first cell and the second cell, the connecting portion having a third characteristic resistance; wherein the third characteristic resistance is greater than or equal to at least one of the first characteristic resistance and the second characteristic resistance. There is also provided a method of forming such a two-terminal device).

There is provided a two-terminal device, including a substrate comprising a first cell having a first characteristic resistance, and a second cell, spaced apart from the first cell along the web direction of the substrate, having a second characteristic resistance; a first terminal and a second terminal, each terminal being formed towards or at opposing edges of the substrate across the transverse direction, and each terminal being in electrical communication with the first cell and the second cell; and a connecting portion, between the first cell and the second cell, the connecting portion having a third characteristic resistance; wherein the third characteristic resistance is greater than or equal to at least one of the first characteristic resistance and the second characteristic resistance. There is also provided a method of forming such a two-terminal device).

A photoelectric conversion element manufacturing method according to the present disclosure includes: (A) forming a first electrode layer on a gas barrier layer; (B) removing a part of the first electrode layer using a pulsed laser to form a through hole penetrating the first electrode layer and including a plurality of holes partially overlapping each other; (C) forming a light absorbing layer on the first electrode layer and on the gas barrier layer exposed by the through hole; and (D) forming a second electrode layer on the light absorbing layer.

A photoelectric conversion element manufacturing method according to the present disclosure includes: (A) forming a first electrode layer on a gas barrier layer; (B) removing a part of the first electrode layer using a pulsed laser to form a through hole penetrating the first electrode layer and including a plurality of holes partially overlapping each other; (C) forming a light absorbing layer on the first electrode layer and on the gas barrier layer exposed by the through hole; and (D) forming a second electrode layer on the light absorbing layer.