A semiconductor device including a group III-V barrier and a method of manufacturing the semiconductor device, the semiconductor device including: a substrate, insulation layers formed to be spaced apart on the substrate, a group III-V material layer for filling the space between the insulation layers and having a portion protruding higher than the insulation layers, a barrier layer for covering the side and upper surfaces of the protruding portion of the group III-V material layer and having a bandgap larger than that of the group III-V material layer, a gate insulation film for covering the surface of the barrier layer, a gate electrode formed on the gate insulation film, and source and drain electrodes formed apart from the gate electrode. The overall composition of the group III-V material layer is uniform. The barrier layer may include a group III-V material for forming a quantum well.

A semiconductor device includes a semiconductor-on-insulator substrate having an insulator layer, and at least one silicon germanium (SiGe) fin having a superlattice structure. The SiGe fin is formed on an upper surface of the insulator layer. A gate stack is formed on an upper surface of the at least one silicon germanium fin. The gate stack includes first and second opposing spacers defining a gate length therebetween. First and second epitaxial source/drain structures are formed on the insulator layer. The first and second epitaxial source/drain structures extend beneath the spacer to define a silicon germanium gate channel beneath the gate stack.

A semiconductor structure, such as a group III nitride-based semiconductor structure is provided. The semiconductor structure includes a cavity containing semiconductor layer. The cavity containing semiconductor layer can have a thickness greater than two monolayers and a multiple cavities. The cavities can have a characteristic size of at least one nanometer and a characteristic separation of at least five nanometers.

The present invention provides a method for forming a quantum well device having high mobility and high breakdown voltage with enhanced performance and reliability. A method for fabrication of a Vertical Cylindrical GaN Quantum Well Power Transistor for high power application is disclosed. Compared with the prior art, the method of forming a quantum well device disclosed in the present invention has the beneficial effects of high mobility and high breakdown voltage with better performance and reliability.

The present invention provides a thin film transistor comprising an active layer, the active layer has a superlattice structure, and comprises a plurality of semiconductor layers and an insulating layer between every two adjacent semiconductor layers, a thickness of each of the semiconductor layers and the insulating layers is in nanometer range, and the plurality of semiconductor layers are made of at least one of metal oxide semiconductor and metal nitride oxide semiconductor. The present invention further provides an array substrate and a manufacturing method thereof, and a display device. The thin film transistor has excellent electrical characteristics and reliability, such as higher carrier mobility, lower turn-off leak current and better stability of threshold voltage.

An SiC semiconductor device has a p type region including a low concentration region and a high concentration region filled in a trench formed in a cell region. A p type column is provided by the low concentration region, and a p.sup.+ type deep layer is provided by the high concentration region. Thus, since a SJ structure can be made by the p type column and the n type column provided by the n type drift layer, an on-state resistance can be reduced. As a drain potential can be blocked by the p.sup.+ type deep layer, at turnoff, an electric field applied to the gate insulation film can be alleviated and thus breakage of the gate insulation film can be restricted. Therefore, the SiC semiconductor device can realize the reduction of the on-state resistance and the restriction of breakage of the gate insulation film.

A method of manufacturing a semiconductor device includes forming a superjunction field effect transistor by: forming trenches in a semiconductor body from a first side: forming charge compensation layers by doping parts of the semiconductor body via sidewalls of the trenches by introducing dopants by plasma doping; after forming the charge compensation layers, widening a profile of the dopants introduced by plasma doping by diffusion caused by a thermal heating process; and forming a drain contact at a second side opposite to the first side. A surface concentration of the dopants introduced by plasma doping via a unit area of the sidewalls is at least five times larger than a concentration of dopants in a mesa region of the semiconductor body between neighboring trenches which corresponds to N, wherein N is a net doping of the semiconductor body between the neighboring trenches.

According to one embodiment, a nitride structure includes a base, a nitride member, and a semiconductor member including Ga and N. The nitride member is provided between the base and the semiconductor member in a first direction. The nitride member includes a first nitride region, a second nitride region, and a third nitride region. The first nitride region is provided between the base and the third nitride region. The second nitride region is provided between the first nitride region and the third nitride region. The first nitride region includes AlN. The second nitride region includes Al.sub.x2Ga.sub.1-x2N (0<x2<1). The third nitride region includes Al.sub.x3Ga.sub.1-x3N (0<x31, x2<x3). A second thickness of the second nitride region along the first direction is thinner than a third thickness of the third nitride region along the first direction.

A semiconductor device includes; a substrate including a first region and a second region, a first active pattern extending upward from the first region, a first superlattice pattern on the first active pattern, a first active fin centrally disposed on the first active pattern, a first gate electrode disposed on the first active fin, and first source/drain patterns disposed on opposing sides of the first active fin and on the first active pattern. The first superlattice pattern includes at least one first semiconductor layer and at least one first blocker-containing layer, and the first blocker-containing layer includes at least one of oxygen, carbon, fluorine and nitrogen.

Embodiments described herein generally relate to methods and apparatus for horizontal gate all around (hGAA) isolation. A superlattice structure comprising different materials arranged in an alternatingly stacked formation may be formed on a substrate. The different materials may be silicon containing materials and one or more III/V materials. In one embodiment, at least one of the layers of the superlattice structure may be oxidized to form a buried oxide layer adjacent the substrate.