H01L41/297

METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE
20170217182 · 2017-08-03 ·

A method is provided for manufacturing a piezoelectric device including a piezoelectric element that is disposed above a diaphragm and that has a multilayer structure including a first electrode disposed above the diaphragm, a piezoelectric layer disposed on the first electrode, and a second electrode disposed on the piezoelectric layer. The method includes forming the multilayer structure including the first electrode, the piezoelectric layer, and the second electrode above the diaphragm, forming a voltage application electrode extending outwardly from an end of the second electrode to cover a region located above the piezoelectric layer in an inactive section having no second electrode, applying a voltage between the first electrode and the second electrode, and removing the voltage application electrode.

ACTUATOR WITH VARIABLE CYLINDER

An actuator may be integrated into an optical element such as a liquid lens and configured to create spherical curvature as well as a variable cylinder radius and axis in a surface of the optical element. An example actuator may include a stack of electromechanical layers, and electrodes configured to apply an electric field independently across each of the electromechanical layers. Within the stack, an orientation of neighboring electromechanical layers may differ, e.g., stepwise, by at least approximately 10°.

ELECTRONIC COMPONENT AND MANUFACTURING METHOD FOR THE SAME

In an electronic component, a first outer electrode includes a first conductive layer provided on a first end surface. A second outer electrode includes a second conductive layer provided on a second end surface. A first inner electrode passes through the first conductive layer. A second inner electrode passes through the second conductive layer.

Consensus-based multi-piezoelectric microcantilever sensor

Systems and methods are disclosed that describe a MEMS device and a method of sensing based on a consensus algorithm. The MEMS device is a sensor comprising multiple piezoelectric layers attached to a microcantilever. It can be used to sense deflections or variations in corresponding parameters of systems in micro- and nano-scales. Multiple piezoelectric elements on a microcantilever can provide a more accurate measurement of the microcantilever's deflection. The device can eliminate bulky laser sensors in SPMs and provide additional use as a biosensor, or chemical sensor at the micro- and nano-scale. The consensus sensing algorithm can provide added robustness into the system. If one of the sensing elements or electrodes fails during a sensing process, other elements can compensate and allow for near zero-error measurement.

Stepped piezoelectric actuator

A bender beam actuator includes a first layer of piezoelectric material and a second layer of piezoelectric material overlying a portion of the first layer of piezoelectric material, where a length of the first layer of piezoelectric material is at least 2% greater than a length of the second layer of piezoelectric material.

ELECTROACTIVE POLYMER DEVICE AND METHOD FOR MANUFACTURING SUCH AN ELECTROACTIVE POLYMER DEVICE
20210391527 · 2021-12-16 ·

A method for manufacturing an electroactive polymer device which includes a layered structure including a dielectric polymer layer and an electrode layer, wherein the electrode layer is arranged on a surface of the dielectric polymer layer. The method includes: providing the dielectric polymer layer; determining a surface area location of a defect on a first surface of the dielectric polymer layer; creating an electrode layer including an area void of electrode layer material surrounding the surface area location, and the electrode layer includes a patch of electrode material covering the surface area location and a remainder part of the surface of the dielectric polymer layer surrounding the area void of electrode layer material, in which the patch and the remainder part are electrically isolated from one another.

DIELECTRIC ELASTOMER TRANSDUCER

A dielectric elastomer transducer A1 includes a plurality of dielectric elastomer elements each including a dielectric elastomer layer 11 and a pair of electrode layers 12 and 13 flanking the dielectric elastomer layer 11. The plurality of dielectric elastomer elements include adjacent dielectric elastomer elements 1. One electrode layer 12 of one of the adjacent dielectric elastomer elements and one electrode layer 12 of the other one of the adjacent dielectric elastomer element have the same potential. Such a configuration ensures more stable use of the dielectric elastomer elements.

PIEZOELECTRIC ELEMENT AND METHOD FOR PRODUCING THE SAME

A piezoelectric element includes a piezoelectric layer, a first electrode layer, a second electrode layer, and a coupling electrode. At least a portion of the second electrode layer faces the first electrode layer with the piezoelectric layer interposed therebetween. The second electrode layer includes a coupling area. The coupling area meets a through hole in a region of the second electrode layer not facing the first electrode layer. The coupling electrode is on the coupling area. Between the coupling area and the surface of the second electrode layer on the piezoelectric layer side excluding the coupling area, the difference in position is about 5 nm or less.

MANUFACTURING METHOD FOR PIEZOELECTRIC CERAMIC CHIP, PIEZOELECTRIC CERAMIC CHIP ASSEMBLY AND DISPLAY DEVICE
20220158079 · 2022-05-19 ·

The present disclosure provides a manufacturing method for a piezoelectric ceramic chip, a piezoelectric ceramic chip assembly and a display device. The manufacturing method includes: transferring a piezoelectric ceramic layer and a bottom electrode covering the piezoelectric ceramic layer formed on a substrate to a base plate, forming an insulating layer with an opening on the base plate, so that edges of the piezoelectric ceramic layer and the bottom electrode are covered by the insulating layer, and the piezoelectric ceramic layer is exposed from the opening; etching the base plate by immersing the base plate in an etching solution for etching a material of the bottom electrode; and forming a top electrode in the opening of the insulating layer, so that the top electrode is spaced apart from the insulating layer.

Multilayer ultrasonic transducer and ultrasonic inspection device

A multilayer ultrasonic transducer of an embodiment includes: a plurality of stacked oscillators; external electrodes disposed on outer exposed surfaces of two oscillators disposed in the outermost layers out of the plurality of oscillators; and a plurality of internal electrodes each disposed between two of the plurality of oscillators. There are provided electrode regions in which the plurality of internal electrodes are arranged such that the number of layers of the internal electrodes in a direction in which the oscillators are stacked gradiently increases from an inner region toward an outer peripheral region of the plurality of oscillators, and ultrasonic waves emitted from the plurality of oscillators are focused toward at least the inner region.