A cap made of metal includes a first surface, a second surface, and a third surface. The first surface includes an outer ceiling surface, an outer sidewall surface, and a flange outer peripheral end surface. The second surface includes an inner ceiling surface parallel to the outer ceiling surface and an inner sidewall surface parallel to the outer sidewall surface. The second surface is a side facing the base plate. The third surface connects the flange outer peripheral end surface to the inner sidewall surface. The third surface is bonded to the base plate with the eutectic alloy. The third surface includes a first curved surface having a first curvature from one end of the third surface to the flange outer peripheral end surface and a second curved surface having a second curvature from another end of the third surface to the inner sidewall surface.

A composite substrate has a first substrate having a surface; a second substrate having a first surface and a second surface opposite to the first surface in a thickness direction and facing the surface of the first substrate with a gap therebetween, the second substrate extending in a longitudinal direction perpendicular to the thickness direction, the second substrate having first and second ends in the longitudinal direction, and a driver circuit being provided on the first surface; a flexible print circuit board has a portion bonded a position on the first substrate between the first end and the driver circuit, the bonding region being defined on the first surface, and a support member positioned between the surface of the first substrate and the second surface of the second substrate, the support member overlapping all of the bonding region, as viewed in the thickness direction.

Methods of etching metal by depositing a material reactive with a metal to be etched and a halogen to form a volatile species and exposing the substrate to a halogen-containing gas and activation gas to etch the substrate are provided. Deposited materials may include silicon, germanium, titanium, carbon, tin, and combinations thereof. Methods are suitable for fabricating MRAM structures and may involve integrating ALD and ALE processes without breaking vacuum.

The invention provides equipment for manufacturing a torque sensor shaft by forming a magnetostrictive region including a metallic glass coating in a predetermined pattern on a side face of a shaft-shaped workpiece. The shaft-shaped workpiece is rotatably attached on a conveying pallet. The conveying pallet is successively conveyed to each of work devices including a preheating device for the shaft-shaped workpiece, a thermal spraying device for forming a metallic glass coating on a side face of the shaft-shaped workpiece, a masking device configured to provide a covering corresponding to the pattern on the coating, and a shot blasting device configured to provide shot blasting directed toward the metallic glass coating including the covering. Preheating, thermal spraying, masking, and shot blasting are performed respectively on the shaft-shaped workpiece while rotating the shaft-shaped workpiece on the conveying pallet at each of the work devices. Therefore, the favorable manufacturing equipment can be provided.

Methods of etching metal by depositing a material reactive with a metal to be etched and a halogen to form a volatile species and exposing the substrate to a halogen-containing gas and activation gas to etch the substrate are provided. Deposited materials may include silicon, germanium, titanium, carbon, tin, and combinations thereof. Methods are suitable for fabricating MRAM structures and may involve integrating ALD and ALE processes without breaking vacuum.

Embodiments of a magnetic field sensor of the present disclosure includes magnetoelectric nanowires suspended above a substrate across electrodes without substrate clamping. This results in enhanced magnetoelectric coupling by reducing substrate clamping when compared to layered thin-film architectures. Accordingly, the magnetoelectric nanowires of the magnetic field sensor generate a voltage response in the presence of a magnetic field.

A magneto-electric converter capable of converting a variation in magnetic field into a potential difference between two electrical terminals includes a support layer comprising two electrical terminals; a stack disposed on the support layer of a first layer made from a magnetostrictive material defining the reference plane and of a second layer made from a piezoelectric material having a polarization axis in the plane defined by the second layer, parallel to the reference plane; the second layer comprising electrodes; and a means for electrical connection of the electrodes to the electrical terminals.

A magneto-electric energy harvester/generator includes a piezoelectric layer, a conductive layer disposed on a first side of the piezoelectric layer, and a layer of magnetic material disposed on a second side of the piezoelectric material. The device may be fabricated by screen printing polyvinylidene fluoride (PVDF) ink onto a flexible magnetic alloy substrate. Silver ink may then be screen printed onto the PVD material to form a conductive layer. The printed PVDF and silver layers may be cured by heating, and the device is then poled by applying an electric field.

A high-sensitivity and ultra-low power consumption magnetic sensor using a magnetoelectric (ME) composite comprising of magnetostrictive and piezoelectric layers. This sensor exploits the magnetically driven resonance shift of a free-standing magnetoelectric micro-beam resonator. Also disclosed is the related method for making the magnetic sensor.

The present invention provides a magnetostrictive member with high performance, high reliability and high versatility. The magnetostrictive member is used in the vibration power generation as a power source for extracting electric energy from various vibrations.

The member made of the single crystal is manufactured cheaper than the conventional manufacturing method. The magnetostrictive member is formed by cutting a single crystal of FeGa alloy by using electric discharge machining in a state that <100> orientation of the crystal of the FeGa alloy is aligned in a direction in which magnetostriction of the magnetostrictive member is required.