Various embodiments of the disclosure provide a semiconductor device structure. In one embodiment, the semiconductor device structure includes a first dielectric wall disposed over a substrate, and a first metal gate structure portion and a second metal gate structure portion disposed on opposing sides of the first dielectric wall, each comprising a plurality of semiconductor layers vertically stacked and separated from each other; a high-k dielectric layer surrounding at least three surfaces of each semiconductor layer, a gate electrode layer disposed between adjacent semiconductor layers, and a second dielectric wall disposed adjacent to the first metal gate structure portion, the second dielectric wall having a top surface at an elevation lower than a top surface of the first dielectric wall, and a metal layer disposed over the second dielectric wall and in contact with the gate electrode layer of the first and second metal gate structure portions.

A continuous metal on diffusion edge (CMODE) may be used to form a CMODE structure in a semiconductor device after a replacement gate process that is performed to replace the polysilicon dummy gate structures of the semiconductor device with metal gate structures. The CMODE process described herein includes removing a portion of a metal gate structure (as opposed to removing a portion of a polysilicon dummy gate structure) to enable formation of the CMODE structure in a recess left behind by removal of the portion of the metal gate structure.

An integrated circuit includes a transistor including a plurality of stacked channels. A first dielectric wall structure is positioned on a first lateral side of the stacked channels. A second dielectric wall structure is positioned on a second lateral side of the stacked channels. A dielectric home structure is positioned above the top channel. A gate electrode includes a vertical column extending vertically between the second dielectric wall structure and the stacked channels. The gate electrode includes finger portions extending laterally from the vertical column between the stacked channels.

A semiconductor device and a method of fabricating the semiconductor device are disclosed. The semiconductor device includes a substrate, first and second nanostructured channel regions disposed on the substrate, a gate structure surrounding the first and second nanostructured channel regions, an inner gate spacer disposed along a sidewall of the gate structure and between the first and second nanostructured channel regions, and a source/drain (S/D) region. The S/D region includes an epitaxial liner disposed along sidewalls of the first and second nanostructured channel regions and the inner gate spacer and a germanium-based epitaxial region disposed on the epitaxial liner. The semiconductor further includes an isolation structure disposed between the germanium-based epitaxial region and the substrate.

The present disclosure describes a semiconductor device having a dielectric fin structure. The semiconductor device includes a channel structure on a substrate and a dielectric fin structure on the substrate and adjacent to the channel structure. The channel structure extends along a first direction. The dielectric fin structure includes a stiff dielectric material and extends along a second direction parallel to the first direction. The semiconductor device further includes an isolation structure extending through the channel structure. The isolation structure is in contact with the dielectric fin structure.

An integrated circuit includes a transistor having a plurality of stacked channels each extending between the source/drain regions of the transistor. The transistor also includes a hard mask nanostructure above the highest channel and extending between the source/drain regions of the transistor. A gate dielectric and gate metals wrap around the channels and the hard mask nanostructure.

An example semiconductor device includes a substrate, a channel layer disposed on the substrate, a gate structure surrounding the channel layer, source/drain patterns connected with both sides of the channel layer, a lower wiring structure disposed below the substrate, and an insulating pattern extending through the substrate and disposed between the source/drain patterns below the gate structure. The insulating pattern includes a sub-insulating pattern disposed below the gate structure and a main insulating pattern disposed between the sub-insulating pattern and the lower wiring structure. The sub-insulating pattern and the main insulating pattern include different insulating materials.

The present disclosure describes a semiconductor device having a contact structure isolated from a source/drain structure. The semiconductor structure includes a gate structure on a substrate, first and second source/drain (S/D) structures on opposite sides of the gate structure, an isolation layer on the second S/D structure, a third S/D structure adjacent to and separate from the second S/D structure, and a S/D contact structure on the isolation layer and the third S/D structure. The isolation layer separates the S/D contact structure from the second S/D structure.

A deep trench resistor structure and methods of forming the same are described. The structure includes a first trench located in a first dielectric material, a first layer disposed over the first dielectric material, a second layer disposed on the first layer, a second dielectric material disposed over the second layer, and a tunable device in contact with the first layer. The tunable device includes a semiconductor-containing layer in contact with the first layer, a dielectric layer disposed on the semiconductor-containing layer, and a metal-containing layer disposed on the dielectric layer.

Embodiments with present disclosure provides a gate-all-around FET device including a patterned or lowered bottom dielectric layer. The bottom dielectric layer prevents the subsequently formed epitaxial source/drain region from volume loss and induces compressive strain in the channel region to prevent strain loss and channel resistance degradation.