A controllable polymer actuator (1) comprising a dielectric elastomeric film (2); a first (3) and a second (4) deformable electrode arranged on opposite sides of the dielectric elastomeric film such that application of a voltage between the electrodes causes an active portion (7) of the controllable polymer actuator to change topography. The controllable polymer actuator (1) further comprises a deformation controlling layer (5, 6) connected to the dielectric elastomeric film. The deformation controlling layer at least locally has a higher stiffness than the dielectric elastomeric film, and exhibits a spatially varying stiffness across the active portion (7). This may enable surface topographies that could not at all be achieved using previously known controllable polymer actuators and/or may enable a certain surface topography to be achieved with a simpler electrode pattern and/or fewer individually controllable electrodes.

In a piezoelectric device, an ultrasound probe, and a droplet discharge unit of the present invention, each of a pair of first and second electrodes is placed on a piezoelectric member having a single orientation in a direction perpendicular to a thickness direction thereof to extend in a direction perpendicular to the thickness direction or along the thickness direction and in a direction perpendicular to the direction of the orientation. Therefore, the piezoelectric device of the present invention has excellent piezoelectric properties. Further, the ultrasound probe and the droplet discharge unit of the present invention have good efficiency.

Systems and methods for growing hexagonal crystal structure piezoelectric material with a c-axis that is tilted (e.g., 25 to 50 degrees) relative to normal of a face of a substrate are provided. A deposition system includes a linear sputtering apparatus, a translatable multi-aperture collimator, and a translatable substrate table arranged to hold multiple substrates, with the substrate table and/or the collimator being electrically biased to a nonzero potential. An enclosure includes first and second deposition stations each including a linear sputtering apparatus, a collimator, and a deposition aperture.

A dynamic strain sensor includes a strain sensitive transistor and a light emitting diode coupled to the strain sensitive transistor. The dynamic strain sensor can include a piezoelectric layer incorporated into the structure of the strain sensitive transistor. The dynamic strain sensor can sense dynamic strain and can measure and monitor the dynamic strain wirelessly.

A polymeric piezoelectric material is provided that includes an aliphatic polyester (A) with a weight-average molecular weight of from 50,000 to 1,000,000 and having optical activity, and a stabilizing agent (B) with a weight-average molecular weight of from 200 to 60,000 having at least one kind of functional group selected from the group consisting of a carbodiimide group, an epoxy group and an isocyanate group, wherein the crystallinity of the material obtained by a DSC method is from 20% to 80%, a content of the stabilizing agent (B) is from 0.01 part by mass to 10 parts by mass with respect to 100 parts by mass of the aliphatic polyester (A), and internal haze with respect to visible light is 50% or less, as well as a process for producing the same.