A self-propelled unit for movable operation on a support structure along a first axis of movement and a second axis of movement that is transverse to the first axis of movement includes a carrier configured for movable displacement on the support structure. A first conveyor assembly is operable to move the carrier on the support structure along the first axis of movement. A second conveyor assembly is operable to move the carrier on the support structure along the second axis of movement. A light source can be attached to the carrier in an operable mode to provide illumination to an area in proximity to the carrier. At least one power contact is configured to maintain electrical contact between the carrier and the support structure.

An article transport facility includes a transport device which has a connecting portion connected to the storage device, and which is configured to transport an article. The connecting portion is located on the first side with respect to the first path whereas a subject path is located on the second side with respect to the first path. The transporting path of an article by the transport device is so located to cross the first path in plan view and to extend at least from the connecting portion and to the second side with respect to the first path. A first transfer portion to or from which an article is transferred by a transport vehicle traveling along the subject path is set in a portion of the transporting path that is located on the second side with respect to the first path.

An automated material handling system (AMHS) and a method of operating the AMHS are disclosed. In one aspect, the AMHS includes a network of rails and a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails. The AMHS also includes a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table. The AMHS further includes a hash rail connected to and overlapping the turn table. The hash rail is configured to rotate about the axis with the turn table.

An automated material handling system (AMHS) and a method of operating the AMHS are disclosed. In one aspect, the AMHS includes a network of rails and a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails. The AMHS also includes a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table. The AMHS further includes a hash rail connected to and overlapping the turn table. The hash rail is configured to rotate about the axis with the turn table.

An automated material handling system (AMHS) and a method of operating the AMHS are disclosed. In one aspect, the AMHS includes a network of rails and a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails. The AMHS also includes a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table. The AMHS further includes a hash rail connected to and overlapping the turn table. The hash rail is configured to rotate about the axis with the turn table.

An automated material handling system (AMHS) and a method of operating the AMHS are disclosed. In one aspect, the AMHS includes a network of rails and a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails. The AMHS also includes a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table. The AMHS further includes a hash rail connected to and overlapping the turn table. The hash rail is configured to rotate about the axis with the turn table.

The present invention relates to a cross rail structure for an OHT system and an OHT system using the same. According to the present invention, there is provided a cross rail structure for an OHT system, that is a point at which two orthogonal rails among rails that are installed in an OHT system and transport vehicles intersect with each other. The cross rail structure includes a pair of auxiliary rails that are installed at substantially the same height as the rail at the point at which the rails intersect with each other, and disposed parallel to each other at a predetermined distance; a movement unit that moves the auxiliary rails up and down; a rotation unit that rotates the auxiliary rail so that the auxiliary rails are disposed in any one of two directions orthogonal to each other; and a distance holding unit that holds a distance between the pair of auxiliary rails without an interference with the vehicle.

The present invention relates to a cross rail structure for an OHT system and an OHT system using the same. According to the present invention, there is provided a cross rail structure for an OHT system, that is a point at which two orthogonal rails among rails that are installed in an OHT system and transport vehicles intersect with each other. The cross rail structure includes a pair of auxiliary rails that are installed at substantially the same height as the rail at the point at which the rails intersect with each other, and disposed parallel to each other at a predetermined distance; a movement unit that moves the auxiliary rails up and down; a rotation unit that rotates the auxiliary rail so that the auxiliary rails are disposed in any one of two directions orthogonal to each other; and a distance holding unit that holds a distance between the pair of auxiliary rails without an interference with the vehicle.