Various embodiments of an interconnect device and modules and systems that utilize such interconnect device are disclosed. In one or more embodiments, the interconnect device can include a printed circuit board (PCB). The PCB can include a substrate forming a resiliently deflectable element, a conductive material disposed on the substrate, and an electrical contact disposed on the resiliently deflectable element and electrically coupled to the conductive material. The interconnect device can also include a connector that includes a connecting pin configured to electrically couple with the electrical contact of the resiliently deflectable element of the PCB and cause the resiliently deflectable element to deflect when the element contacts the connecting pin.

A displacement magnification device has a first link portion including a first rigid body and a first plate spring that couples the first rigid body to a supporting portion and a movable portion. A second link portion includes a second rigid body and a second plate spring that couples the second rigid body to the supporting portion and the movable portion. In this structure, the first rigid body and the second rigid body play roles to suppress the bending of the first plate spring and the second plate spring. In addition, a connection portion between the first plate spring and the supporting portion, a connection portion between the second plate spring and the supporting portion, a connection portion between the first plate spring and the movable portion, and a connection portion between the second plate spring and the movable portion play roles of elastic hinges.

The MEMS actuator is formed by a substrate, which surrounds a cavity; by a deformable structure suspended on the cavity; by an actuation structure formed by a first piezoelectric region of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure formed by a second piezoelectric region of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.

A force sensing device is mounted on a tool to sense force, particularly quasi-static and static forces. The force sensing device includes at least one a sensor. A piezoelectric element in the sensor includes a driving portion and a sensing portion. A first voltage is input to the driving portion to generate a vibration in the piezoelectric element and a second voltage in response to the vibration is output from the sensing portion. The second voltage output from the sensing portion is changed as the vibration in the piezoelectric element is suppressed by an external force acting on the force sensing device so variation of the second voltage can be used to measure the external force.

The proposed device comprises a plurality of electroactive material actuator units arranged as a set. Control data for driving individual units is transferred over three shared power lines. The electroactive material actuator of each unit is driven depending on control data received from the power lines via a demodulator, a controller, and a driver.

A piezoelectric micromachined ultrasound transducer (PMUT) device may include a plurality of layers including a structural layer, a piezoelectric layer, and electrode layers located on opposite sides of the piezoelectric layer. Conductive barrier layers may be located between the piezoelectric layer and the electrodes to the prevent diffusion of the piezoelectric layer into the electrode layers.

Aspects of the subject technology relate to an apparatus including a housing, one or more piezoresistive elements and a magnetic actuator. The housing includes a membrane, and the piezoresistive elements are disposed on the membrane to sense a displacement due to a deflection of the membrane. The magnetic actuator is disposed inside a cavity of the housing. The magnetic actuator exerts a repulsive force onto the membrane to reduce the deflection of the membrane.

The present invention relates to a cantilever for a piezoelectric energy harvesting system, wherein the cantilever (2,20,30) comprises two layers (21,22,31,32) formed of polyvinylidene fluoride, and wherein a core layer (23,33) formed of a shim material is sandwiched between the two layers (21,22,31,32) formed of polyvinylidene fluoride

In a vibration unit, a first electrode of a sensor circuit of a control unit is electrically connected to a first external electrode of a first piezoelectric element, a second electrode of the sensor circuit is electrically connected to a second external electrode of the first piezoelectric element, a first electrode of a drive circuit is electrically connected to a first external electrode of a second piezoelectric element, and a second electrode of the drive circuit is electrically connected to a second external electrode of the second piezoelectric element. Only a relatively small voltage induced by an electromotive force occurring due to the flexure of the first piezoelectric element is applied to the sensor circuit. In addition, only a relatively large drive voltage to be applied to the second piezoelectric element is applied to the drive circuit.

A device including a piezoelectric actuator that can detect the actuation force and provide haptic feedback. The longitudinal extension of the actuator, generated for this purpose, can be reinforced in the desired direction by a deformable metal sheet. The deformable metal sheet is adhered on and has a borehole for pressure equalization.