A substrate processing apparatus includes a frame and a transport apparatus connected to the frame. The transport apparatus has an upper arm link, a forearm link rotatably coupled to the upper arm link about an elbow axis, at least a third arm link rotatably coupled to the forearm about a wrist axis, and an end effector rotatably coupled to the third arm link about a knuckle axis. A two degree of freedom drive system is operably connected to at least one of the upper arm link, the forearm link, and the third arm link for effecting extension and retraction of the end effector wherein a height of the end effector is within the stack height profile of the wrist axis so that a total stack height of the end effector and wrist axis is sized to conform within a pass through of a slot valve.

There is provided a substrate processing apparatus, including: a mounting part on which a carrier having a plurality of slots capable of accommodating a plurality of substrates is mounted; a transfer part configured to load and unload the substrates to and from the plurality of slots based on a reference accommodation position set in the mounting part; a detection part configured to detect a position of each of the plurality of substrates accommodated in the plurality of slots; and a correction part configured to correct the reference accommodation position based on port accumulation information in which detection results obtained by the detection part from a plurality of carriers which has been mounted on the mounting part in the past are accumulated.

There is provided a substrate processing apparatus, including: a mounting part on which a carrier having a plurality of slots capable of accommodating a plurality of substrates is mounted; a transfer part configured to load and unload the substrates to and from the plurality of slots based on a reference accommodation position set in the mounting part; a detection part configured to detect a position of each of the plurality of substrates accommodated in the plurality of slots; and a correction part configured to correct the reference accommodation position based on port accumulation information in which detection results obtained by the detection part from a plurality of carriers which has been mounted on the mounting part in the past are accumulated.

The present invention aims at providing a workpiece transfer method and a workpiece transfer system that enable stable transfer of workpieces with a simple structure. The workpiece transfer system includes two workpiece holding members that hold workpieces such as to be inserted and pulled out in a vertical direction, a picking device having a claw member operable to open and close, and a temporary workpiece holding member. The workpiece transfer method includes: grasping and transferring a workpiece that is held by one workpiece holding member to a temporary workpiece holding member, and transferring the workpiece from the temporary workpiece holding member to another workpiece holding member after the workpiece has been grasped again at a point where the workpiece is held in a stable posture.

The present invention aims at providing a workpiece transfer method and a workpiece transfer system that enable stable transfer of workpieces with a simple structure. The workpiece transfer system includes two workpiece holding members that hold workpieces such as to be inserted and pulled out in a vertical direction, a picking device having a claw member operable to open and close, and a temporary workpiece holding member. The workpiece transfer method includes: grasping and transferring a workpiece that is held by one workpiece holding member to a temporary workpiece holding member, and transferring the workpiece from the temporary workpiece holding member to another workpiece holding member after the workpiece has been grasped again at a point where the workpiece is held in a stable posture.

A wafer suspension fork has a body and a cover. The body has a connection portion having multiple inlets and two arms being symmetrical in shape and protruding from the connection portion. Each arm has a holding surface, a flowing surface, multiple inner and outer inclined holes formed in the holding surface arranged along a protruding direction, an inner flowing channel formed in the flowing surface and communicating with the inner inclined holes and the inlets, and an outer flowing channel formed in the flowing surface and communicating with the outer inclined holes and the inlets. The cover is fixed to a bottom surface of the body. A wafer is able to be suspended and held above the two arms by adjusting pressure of gas flowing out from the inner and outer inclined holes and is able to be moved free from being scratched.

A wafer suspension fork has a body and a cover. The body has a connection portion having multiple inlets and two arms being symmetrical in shape and protruding from the connection portion. Each arm has a holding surface, a flowing surface, multiple inner and outer inclined holes formed in the holding surface arranged along a protruding direction, an inner flowing channel formed in the flowing surface and communicating with the inner inclined holes and the inlets, and an outer flowing channel formed in the flowing surface and communicating with the outer inclined holes and the inlets. The cover is fixed to a bottom surface of the body. A wafer is able to be suspended and held above the two arms by adjusting pressure of gas flowing out from the inner and outer inclined holes and is able to be moved free from being scratched.

The invention relates to a device for gripping a container preform having a base, a spindle which is mounted on the base, and an ejector at least partially surrounding the spindle. The spinner includes a spindle mounted such that it pivots in a sliding manner in relation to the base and a spinner tip removably fixed to the spindle. The ejector partially surrounds the spinner and is able to occupy a working position in which it is secured to the base. The spinner tip and the ejector are respectively provided with an imprint and a complementary counter-imprint. The ejector can be removed from the base and can occupy a tooling position in which the counterpart thereof cooperates with the cavity of the spinner tip so that they rotate together.

The invention relates to a device for gripping a container preform having a base, a spindle which is mounted on the base, and an ejector at least partially surrounding the spindle. The spinner includes a spindle mounted such that it pivots in a sliding manner in relation to the base and a spinner tip removably fixed to the spindle. The ejector partially surrounds the spinner and is able to occupy a working position in which it is secured to the base. The spinner tip and the ejector are respectively provided with an imprint and a complementary counter-imprint. The ejector can be removed from the base and can occupy a tooling position in which the counterpart thereof cooperates with the cavity of the spinner tip so that they rotate together.

A transport vehicle (2) that travels along a container shelf (1) is provided with a plurality of levels of shelf portions (11) arranged in a vertical direction (Z) and configured to support containers (W), thereby transporting the containers (W). The transport vehicle (2) is provided with a support region where a container (W) is supported, a first transfer apparatus (23) that inserts/takes the container (W) into/out of the container shelf (1), and a second transfer apparatus (24) that loads/unloads the container (W) on/from the support region. The second transfer apparatus (24) is configured such that a container (W) can be moved to the support region so as to allow a plurality of the containers (W) to be supported in a stacked state in the support region.