A substrate processing apparatus including a frame, a SCARA arm mounted to the frame at a shoulder joint having two links with at least one end effector dependent therefrom, the links defining an upper arm and a forearm, each end effector pivotally joined to the forearm at a wrist to rotate about a wrist axis, and a drive section with at least one degree of freedom operably coupled to the arm to rotate the arm about a shoulder axis articulating extension and retraction, wherein the end effector is coupled to a wrist joint pulley so that extension and retraction effects rotation of the pulley and end effector as a unit about the wrist axis, and wherein a height of the end effector is within a stack height profile of the wrist joint so that a total stack height is sized to conform with and pass through a pass-through of a slot valve.

A device for maintaining cleanliness in a vacuum environment during semiconductor manufacture in a device storing and transferring wafers into etching and other manufacturing processes includes a transferring chamber storing wafers, a vacuum system to extract particles from the transferring chamber, and a thermoelectric device for temperature control. The vacuum system includes an extracting pipe, the thermoelectric device includes a cooling apparatus to cool the transferring chamber, and a monitoring device to detect particle concentrations in the transferring chamber. The cooling apparatus includes Peltier elements arranged on the extracting pipe to cool and thus cause the descent of fumes and particles towards a low-set extraction area.

A device for maintaining cleanliness in a vacuum environment during semiconductor manufacture in a device storing and transferring wafers into etching and other manufacturing processes includes a transferring chamber storing wafers, a vacuum system to extract particles from the transferring chamber, and a thermoelectric device for temperature control. The vacuum system includes an extracting pipe, the thermoelectric device includes a cooling apparatus to cool the transferring chamber, and a monitoring device to detect particle concentrations in the transferring chamber. The cooling apparatus includes Peltier elements arranged on the extracting pipe to cool and thus cause the descent of fumes and particles towards a low-set extraction area.

A conveyor system includes a first robot singulator, a second robot singulator, and a picking area from which parcels of a bulk flow of parcels can be engaged and transferred by the first robot singulator or the second robot singulator. The conveyor system further includes a first place conveyor positioned downstream of the picking area and configured to receive parcels transferred by the first robot singulator. The conveyor system further includes a second place conveyor positioned downstream of the picking area and the first place conveyor, the second place conveyor configured to receive parcels transferred by the second robot singulator and to receive parcels from the first place conveyor. A buffering conveyor is positioned between the first place conveyor and the second place conveyor for regulating a rate at which parcels offloaded by the first place conveyor are transferred to the second place conveyor.

The present invention relates to a picking system for a job-related picking of goods in output bins, said picking system comprising a plurality of automated picking cells; comprising a first conveying system for the supply and/or discharge of the supply bins to and/or from the picking cells; and a second conveying system for the supply and/or discharge of the output bins to and/or from the picking cells, and a job management control for working through a plurality of picking jobs by controlling the first and second conveying systems and the plurality of picking cells, wherein at least one first picking cell has different goods handling properties than a second picking cell; and/or in that the job management control uses at least one first picking cell for working through different jobs and/or partial jobs than a second picking cell.

A transfer robot includes a movable mechanism, a support base moved by the movable mechanism, a horizontal arm pivotable relative to the support base around a first vertical axis, a motor in the horizontal arm to pivot the arm, and a hand disposed above the arm and rotatable relative to the arm around a second axis parallel to the first axis. The hand holds a planar workpiece placed thereon. The arm includes a rotation stage for holding the planar workpiece placed thereon. The rotation stage is rotatable around a third axis parallel to the first axis and movable vertically along the third axis. The hand has a holding center corresponding to the center of the planar workpiece, where the holding center is moved along a rotational trajectory extending across the third axis in plan view. The rotation stage is rotated by the motor provided in the horizontal arm.

A transfer robot includes a movable mechanism, a support base moved by the movable mechanism, a horizontal arm pivotable relative to the support base around a first vertical axis, a motor in the horizontal arm to pivot the arm, and a hand disposed above the arm and rotatable relative to the arm around a second axis parallel to the first axis. The hand holds a planar workpiece placed thereon. The arm includes a rotation stage for holding the planar workpiece placed thereon. The rotation stage is rotatable around a third axis parallel to the first axis and movable vertically along the third axis. The hand has a holding center corresponding to the center of the planar workpiece, where the holding center is moved along a rotational trajectory extending across the third axis in plan view. The rotation stage is rotated by the motor provided in the horizontal arm.

A storage, retrieval and processing system for processing objects includes: a plurality of bins including objects to be distributed, said plurality of bins being provided on an input conveyance system; a programmable motion device that includes an end effector for grasping and moving any of the objects, a perception system for providing perception data regarding a selected object that is presented to the perception system by the programmable motion device, and a routing conveyance system for receiving the selected object, and for moving the selected object in each of horizontal and vertical directions toward a selected destination container responsive to the perception data, the routing conveyance system including at least one object conveyor for urging the selected object toward the selected destination container in a third direction that is generally orthogonal to the horizontal and vertical directions.

A storage, retrieval and processing system for processing objects includes: a plurality of bins including objects to be distributed, said plurality of bins being provided on an input conveyance system; a programmable motion device that includes an end effector for grasping and moving any of the objects, a perception system for providing perception data regarding a selected object that is presented to the perception system by the programmable motion device, and a routing conveyance system for receiving the selected object, and for moving the selected object in each of horizontal and vertical directions toward a selected destination container responsive to the perception data, the routing conveyance system including at least one object conveyor for urging the selected object toward the selected destination container in a third direction that is generally orthogonal to the horizontal and vertical directions.

A tray-type component supply device includes an exchanging table configured to lift and lowered between an upper position and a lower position, a conveyance section configured to receive a tray from the exchanging table and convey the tray, and a control section configured to receive a detection signal from the detection sensor and cause the driving section to operate the exchanging table, the control section including an abnormality detecting section configured to detect an abnormal state in which a height position of the exchanging table becomes unidentified, a retraction operating section configured to cause the exchanging table to move to the retraction position at a low speed when the abnormal state is detected, and a calibration and restoration section configured to calibrate the height position of the exchanging table to restore a normal state.