The inventive concept provides an apparatus for supporting a substrate. An apparatus for treating a substrate includes a process chamber that performs a predetermined process on the substrate and a reversing unit that reverses the substrate. The reverse unit includes a grip unit that grips the substrate and a drive unit that rotates the grip unit to reverse the substrate gripped by the grip unit. The grip unit includes a first body that supports one of an upper surface and a lower surface of the substrate and a second body that supports the other surface of the substrate. Each of the first body and the second body includes a support protrusion that is brought into contact with the substrate when the grip unit grips the substrate.

A storage rack is provided for storing glass sheets. The rack includes substantially horizontal and vertical portions. The substantially horizontal and/or vertical portion(s) of the rack include(s) one or more flexible supports, each including at least one channel. Arms are attached to the left and right sides of the rack. The rear legs have tabs attached thereto, with lower lips extending away from the rack. The rack is stackable with another rack, e.g., with the upper rack's rear sitting on the lower rack's arms, and with the upper rack's front supported by a support member extending upwardly from tubing provided in the lower rack that is accommodated in holes/recesses of the upper rack. The arms are sized, shaped, and arranged to reduce the likelihood of tipping of the upper rack, and the tabs help mitigate the effect of side-to-side movement of the upper rack relative to the lower rack.

A laser irradiation apparatus (1) according to one embodiment includes a laser generating device (14) that generates a laser beam, a flotation unit (10) that causes a workpiece (16) that is to be irradiated with the laser beam to float, and a conveying unit (11) that conveys the floating workpiece (16). The conveying unit (11) conveys the workpiece (16) with the conveying unit (11) holding the workpiece (16) at a position where the conveying unit (11) does not overlap an irradiation position (15) of the laser beam. The laser irradiation apparatus (1) according to one embodiment makes it possible to suppress uneven irradiation with a laser beam.

In a laser irradiation apparatus 1 according to one embodiment, each of first and second flotation units 30a, 30b includes a base 31, and a porous plate 32 bonded to an upper surface of the base 31 by an adhesive layer 34, the base 31 includes a rising portion 312 protruding upward at an outer periphery facing at least the gap, and the porous plate 32 includes a cutout portion 321 configured to fit to the rising portion 312, and the adhesive layer 34 is formed along an inner wall of the rising portion 312 having fitted to the cutout portion 321.

The present disclosure provides a holding arrangement. The holding arrangement for holding a substrate includes: a body portion having a first side; a dry adhesive material provided on the first side of the body portion; a seal surrounding the dry adhesive material and configured to provide a vacuum region on the first side, wherein the dry adhesive material is provided in the vacuum region; and a conduit to evacuate the vacuum region.

A swirl-flow forming body includes a through-hole; a jetting port that is formed on an inner periphery facing the through-hole; a fluid passage that allows fluid to be discharged into the through-hole via the jetting port so as to form a swirl flow that generates negative pressure for applying suction to a target object; and a flange portion that is formed so as to protrude from the inner periphery, the flange portion allowing passage of fluid to which suction is applied by the negative pressure while preventing the fluid discharged via the jetting port from flowing out of the through-hole towards the target object. The inner periphery is formed so as to guide the fluid discharged via the jetting port, in a direction away from the target object, to be discharged from the through-hole.

A conveying apparatus can comprise one or more support members defining an interior passage and a first plurality of apertures. A first cross-sectional area of the interior passage at a first end portion of a support area can be greater than a second cross-sectional area of the interior passage at a second end portion of the support area. A tube can extend within the interior passage and comprises a second plurality of apertures. Methods are also provided for conveying a ribbon with one or more support members.

A fabrication platform used for production lines of a display panel is provided. The fabrication platform includes: a jig, wherein the jig is configured to carry a glass substrate, and a plurality of via holes are defined on the jig; and an adsorption device, wherein the adsorption device includes a plurality of suction pads, the suction pads are disposed on a side of the jig away from the glass substrate and are disposed corresponding to the via holes, and the suction pads adsorb the glass substrate on the jig through the via holes. The provided fabrication platform effectively improves yield rate of the glass substrate in welding processes.

A flotation conveyance apparatus according to an embodiment includes a flotation unit for floating a substrate by ejecting a gas to a lower surface of the substrate. The flotation unit includes a plurality of ejecting ports provided on a surface facing the substrate and configured to eject the gas, and slits penetrating the flotation unit in a vertical direction. The flotation conveyance apparatus is configured in such a way that the gas staying between a surface of the flotation unit facing the substrate and the substrate is discharged to a lower surface side of the flotation unit through the slits.

A flotation conveyance apparatus according to an embodiment includes a flotation unit for floating a substrate by ejecting a gas to a lower surface of the substrate. The flotation unit includes a plurality of ejecting ports provided on a surface facing the substrate and configured to eject the gas, and slits penetrating the flotation unit in a vertical direction. The flotation conveyance apparatus is configured in such a way that the gas staying between a surface of the flotation unit facing the substrate and the substrate is discharged to a lower surface side of the flotation unit through the slits.