A non-contact support platform with open-loop control, including: a surface, to support a workpiece by fluid-bearing of fluid flowing through a plurality of nozzles, a supply system, connected to the surface and configured to maintain the fluid-bearing by applying pressure to cause flow of the fluid out of a subset of the plurality of nozzles, and a controller, to control fluid flow in the supply system with an open-loop circuit to support the workpiece while it moves over the non-contact support platform, wherein the fluid flow is controlled based on at least parameter of a group of workpiece parameters consisting of a position of the workpiece, dimenions of the workpiece and a velocity of the workpiece while supported by the surface.

An article conveying system includes a tray that is disposed on a floor surface and on which an article to be conveyed is mounted, a robot provided with a force sensor that detects an external force, a frictional force reduction device provided in at least one of the floor surface or the tray, to adjust a frictional force between the floor surface and the tray, and a controller that controls the robot to apply a lateral load to the tray and thereby slide the tray on the floor surface, and controls the frictional force reduction device based on a magnitude of the external force in a direction of the lateral load that is detected by the force sensor when the lateral load is applied.

An article conveying system includes a tray that is disposed on a floor surface and on which an article to be conveyed is mounted, a robot provided with a force sensor that detects an external force, a frictional force reduction device provided in at least one of the floor surface or the tray, to adjust a frictional force between the floor surface and the tray, and a controller that controls the robot to apply a lateral load to the tray and thereby slide the tray on the floor surface, and controls the frictional force reduction device based on a magnitude of the external force in a direction of the lateral load that is detected by the force sensor when the lateral load is applied.

A flotation conveyance apparatus according to an embodiment includes a flotation unit for floating a substrate by ejecting a gas to a lower surface of the substrate. The flotation unit includes a plurality of ejecting ports provided on a surface facing the substrate and configured to eject the gas, and slits penetrating the flotation unit in a vertical direction. The flotation conveyance apparatus is configured in such a way that the gas staying between a surface of the flotation unit facing the substrate and the substrate is discharged to a lower surface side of the flotation unit through the slits.

A flotation conveyance apparatus according to an embodiment includes a flotation unit for floating a substrate by ejecting a gas to a lower surface of the substrate. The flotation unit includes a plurality of ejecting ports provided on a surface facing the substrate and configured to eject the gas, and slits penetrating the flotation unit in a vertical direction. The flotation conveyance apparatus is configured in such a way that the gas staying between a surface of the flotation unit facing the substrate and the substrate is discharged to a lower surface side of the flotation unit through the slits.

A flotation conveyance apparatus according to an embodiment is for conveying a substrate while floating the substrate by ejecting a gas to a lower surface of the substrate. The flotation conveyance apparatus includes a plurality of ejecting ports configured to eject the gas to the substrate, a downstream flow-path configured to supply the gas to the plurality of ejecting ports, a upstream flow-path configured to supply the gas to the downstream flow-path, and a gas supply port configured to supply the gas to the downstream flow-path. A cross-sectional area of the upstream flow-path is configured to be larger than a cross-sectional area of the downstream flow-path.

A flotation conveyance apparatus according to an embodiment is for conveying a substrate while floating the substrate by ejecting a gas to a lower surface of the substrate. The flotation conveyance apparatus includes a plurality of ejecting ports configured to eject the gas to the substrate, a downstream flow-path configured to supply the gas to the plurality of ejecting ports, a upstream flow-path configured to supply the gas to the downstream flow-path, and a gas supply port configured to supply the gas to the downstream flow-path. A cross-sectional area of the upstream flow-path is configured to be larger than a cross-sectional area of the downstream flow-path.

Methods and systems for determination of warpage in a workpiece supported by a non-contact support platform, including a surface with a plurality of pressure ports and a plurality of fluid evacuation ports on the surface, a supply system with a pressure supply connected to the plurality of pressure ports on the surface and configured to supply pressure at a substantially constant level and cause a fluid to flow out of the plurality of pressure ports, so as to support a workpiece by fluid-bearing formed under the workpiece, and at least one flowmeter, coupled to a controller and configured to measure the flowrate at the surface, wherein the workpiece is determined to be warped when the measured flowrate is outside a predefined flowrate range.

Methods and systems for determination of warpage in a workpiece supported by a non-contact support platform, including a surface with a plurality of pressure ports and a plurality of fluid evacuation ports on the surface, a supply system with a pressure supply connected to the plurality of pressure ports on the surface and configured to supply pressure at a substantially constant level and cause a fluid to flow out of the plurality of pressure ports, so as to support a workpiece by fluid-bearing formed under the workpiece, and at least one flowmeter, coupled to a controller and configured to measure the flowrate at the surface, wherein the workpiece is determined to be warped when the measured flowrate is outside a predefined flowrate range.

Apparatus for transporting plastic preforms, has a sorting device configured for sorting plastic preforms and a transport device arranged after the sorting device in a transport direction. The transport device includes a first support rail and a second support rail for carrying the plastic preforms between the first and second support rails along the direction of transport. The sorting device has two rollers spaced apart from one another, between which the plastic performs are guided.

The apparatus has an adjustment mechanism for adjusting at least one lateral spacing of the support rails, wherein this adjustment mechanism has several adjustment units which are arranged one behind the other along the transport direction, wherein these adjustment units each enable an adjustment of the lateral spacing and wherein these adjustment units are mechanically coupled such that the adjustment units can be adjusted together.