There is provided a conveyance system that conveys a workpiece to each of plural processing apparatuses. The conveyance system includes a conveyance passage, an automated workpiece conveying vehicle that travels on the conveyance passage, a stock unit, and a control unit. The conveyance passage is set in a space directly above the processing apparatus across the plural processing apparatus. The stock unit includes a placement base on which a workpiece stocker capable of housing plural workpieces is placed, two temporary putting bases on which the workpiece carried out from the workpiece stocker on the placement base is temporarily put, a temporary putting base movement part that moves the two temporary putting bases in such a manner as to interchange the two temporary putting bases between a first position that faces the placement base and a second position adjacent to the first position.

A substrate processing system including at least two vertically stacked transport chambers, each of the vertically stacked transport chambers including a plurality of openings arranged to form vertical stacks of openings configured for coupling to vertically stacked process modules, at least one of the vertically stacked transport chambers includes at least one transport chamber module arranged for coupling to another transport chamber module to form a linear transport chamber and another of the at least two stacked transport chambers including at least one transport chamber module arranged for coupling to another transport chamber module to form another linear transport chamber, and a transport robot disposed in each of the transport chamber modules, where a joint of the transport robot is locationally fixed along a linear path formed by the respective linear transport chamber.

Exemplary substrate processing systems may include a transfer region housing defining a transfer region, and including substrate supports and a transfer apparatus. The transfer apparatus may include a central hub having a housing, and including a first shaft and a second shaft. The housing may be coupled with the second shaft, and may define an internal housing volume. The transfer apparatus may include a plurality of arms equal to a number of substrate supports of the plurality of substrate supports. Each arm of the plurality of arms may be coupled about an exterior of the housing. The transfer apparatus may include a plurality of arm hubs disposed within the internal housing volume. Each arm hub of the plurality of arm hubs may be coupled with an arm of the plurality of arms through the housing. The arm hubs may be coupled with the first shaft of the central hub.

A control unit that controls a transport apparatus executes selection control to select one accommodation portion as a selected accommodation portion, movement control to control the transport apparatus so as to move a transport support portion to a corresponding position, determination control to determine whether or not a detection target portion is detected by a detecting portion, transfer control to control the transport apparatus so as to transfer an article from the transport support portion to an accommodation support member, and update setting control to set the selected accommodation portion and related accommodation portions as prohibited accommodation portions if it is determined, in the determination control, that the detection target portion is not detected, and after the update setting control, the control unit again executes the selection control to newly select a selected accommodation portion, and executes the movement control so as to move the transport support portion to a corresponding position corresponding to the newly selected accommodation portion.

Provided is a transport vehicle system SYS1 in which: an overhead transport vehicle includes a main body, a holder, a lift driver, and a lateral extender; a port pitch P is less than the overall length VL of the overhead transport vehicle in an extending direction D; and a first portion, which is raised or lowered by the lift driver moved in a lateral direction by a lateral extender, of an overhead transport vehicle stopped at a first position P1 on a first track for transferring an article W to a first transfer location S1 is offset in the extending direction D from a second portion, which is moved in a lateral direction by means of the drive of a lateral extender, of an overhead transport vehicle stopped at a second position P2 on the second track for transferring an article W to a second transfer location S2.

An overhead transport vehicle includes an elevator including a base and a first support supporting the base to be vertically movable from below in a vertical direction through a vibration isolator. The vibration isolator includes a first biasing portion in contact with both of the support and the base to urge a first body and the base in a direction away from each other, and a second biasing portion at one of the first body and the base to come into contact with both of the first body and the base and urge the first body and the base in a direction away from each other when a load equal to or greater than a predetermined value is applied to the first biasing portion.

The disclosure relates to substrate processing apparatus, with a first and second reactor, each reactor configured for processing a plurality of substrates; and, a substrate handling robot constructed and arranged to transfer substrates between a substrate cassette at a substrate transfer position and the first and second reactor. The apparatus is constructed and arranged with a maintenance area between the first and second reactors to allow maintenance of the reactors from the maintenance area to both the first and second reactor.

A transfer vehicle system in which transfer vehicles travel on a track includes a measurement portion in a portion of a path continuing to the track to measure a measurement target portion included in the transfer vehicle on the path, an identifier to identify the transfer vehicle for which the measurement target portion has been measured by the measurement portion, a storage to store a measurement result measured by the measurement portion and an identification result identified by the identifier in association with each other, and a display to provide notification of information concerning a state of the measurement target portion determined based on the measurement result and a reference value.

An apparatus for storage of a carrying material, includes: a body frame; a plurality of loading members installed on the body frame and disposed such that a carrying material forms a plurality of layers in upper and lower directions; a driving unit connected to at least one of the plurality of loading members; and an auxiliary coupling unit provided in a portion of the plurality of loading members for attachment and detachment to and from a neighboring loading member, wherein the plurality of loading members are provided with a plurality of first loading members fixedly installed at a lower end portion of the body frame, and a plurality of second loading members disposed above the first loading member and movably installed on the body frame, wherein the driving unit is connected to at least one of the plurality of second loading members, wherein the auxiliary coupling unit includes an electromagnet installed at one end of the second loading members, and a magnetic body installed at the other end of the second loading members and the body frame to correspond to the electromagnet.

Provided are an interface apparatus for resolving congestion through a non-stop interface between a transporting device and a logistics automation storage device, and a container transporting system having the same. The interface apparatus includes a saddle for receiving a container from a container transporting device; and a circulating path for providing a route for transporting the container seated on the saddle to a container storage device, wherein the saddle receives the container while moving together with the container transporting device.