Disclosed is a tool that is to be mounted on a handling device and can grip pallet-type flat bases, the tool including a frame and a gripper for the bases that is mounted on the frame. The gripper is movable in the frame in such a way as to cooperate with a single edge of a pallet. Also disclosed is a corresponding transfer apparatus and a corresponding method.

A holding nozzle is provided with a suction member including a suction portion which comes into contact with a panel and a shaft portion communicated with the suction portion, an accommodation portion in which the shaft portion is accommodated, a suction member support portion supporting the shaft portion such that the suction member is movable with respect to the accommodation portion, a negative pressure connection portion to which a negative pressure generator is connected, and a communication member accommodated in the accommodation portion between the negative pressure connection portion and the suction member support portion and has a hollow portion which is a portion of a flow path through which a fluid is flowed. The communication member includes a first connection portion connected to the negative pressure connection portion, a second connection portion connected to the shaft portion, and a contractible portion installed between the first and second connection portions.

Suction equipment 10 is provided with a swirl flow-forming body 1, a baffle plate 2, and connecting members 3 that connect swirl flow-forming body 1 and baffle plate 2. Baffle plate 2 obstructs a member W to which suction is applied from entering a concave part 12 provided in swirl flow-forming body 1. Connecting members 3 form, between end face 13 and baffle plate 2, a flow path for fluid to flow out of concave part 12.

Baffle plate to be attached to fluid flow-forming body includes baffle plate main body that is attachable to and detachable from fluid flow-forming body. Baffle plate main body allows a fluid to which suction is applied by negative pressure generated by fluid flow-forming body to pass through, while preventing a member from entering concave part of fluid flow-forming body. Baffle plate also includes support member that is attached to main body of fluid flow-forming body at one end thereof, and supports baffle plate main body at the other end thereof such that baffle plate main body opposes end face of fluid flow-forming body. Support member supports baffle plate main body such that a gap between end face and baffle plate main body is maintained, and a fluid path is formed that allows a fluid flowing out of concave part to flow.

A method includes indirectly engaging a surface of a moving ribbon of inorganic material with a non-contacting support unit. The ribbon is severed with a thermal separating unit while the non-contacting support unit is indirectly engaged with the ribbon.

The present disclosure provides a holding arrangement. The holding arrangement for holding a substrate includes: a body portion having a first side; a dry adhesive material provided on the first side of the body portion; a seal surrounding the dry adhesive material and configured to provide a vacuum region on the first side, wherein the dry adhesive material is provided in the vacuum region; and a conduit to evacuate the vacuum region.

Embodiments of the present application provide an apparatus for carrying a substrate by an off-line vacuum suction and a method for transporting a substrate. The apparatus includes a carrying frame provided with a clamper, a vacuum suction device and a detaching device arranged on the carrying frame, wherein the vacuum suction device is arranged to suck and fix a substrate and is connectable to and detachable from a vacuum pipeline and the detaching device is arranged to detach the vacuum suction device and the vacuum pipeline from each other while keeping the vacuum suction device to continuously suck the substrate to be transported. The apparatus and the method can improve fixing of the substrate and achieve off-line suction to the substrate.

Device (1) for carrying an object (2) having a smooth surface, which device comprises a first frame (3) that is arranged to be able to manipulate the device and the object to be carried, as well as a second frame (5) onto which a number of suction cups (6) is attached. The second frame is planar rotatably with respect to the first frame. Furthermore a number of vacuum sources (8, 9) is provided for evacuating the suction cups. The vacuum sources and suction cups are interconnected by means of at least one spiral-shaped hose assembly (10) of which the hoses (11), each being connected to a vacuum source (8) and a suction cup (6), are in the same spiral plane (14).

Provided are a die pickup module and a die bonding apparatus including the same. The die pickup module includes a wafer stage for supporting a wafer including dies attached on a dicing tape, a die ejector arranged under the dicing tape and for separating a die to be picked up from the dicing tape, a non-contact picker for picking up the die in a non-contact manner so as not to contact a front surface of the die, a vertical driving unit for moving the non-contact picker in a vertical direction to pick up the die and an inverting driving unit for inverting the non-contact picker to invert a die picked up by the non-contact picker.

A substrate transfer apparatus includes a body portion having a holding region on a surface thereof corresponding to a substrate. The body portion moves so that the surface thereof approaches the substrate up to at least a first distance. A plurality of vacuum holes are distributed in the holding region and form negative pressure to provide suction force to the substrate disposed at the first distance. At least some of the plurality of vacuum holes are disposed at equal intervals at an edge of the holding region and have the same width. A plurality of air holes are distributed in the holding region and form positive pressure to provide a buoyancy force to the substrate close to the holding region at a second distance smaller than the first distance.