The invention provides a microfluidic device (1), specifically a nozzle for an inhalation device, comprising at least two microfluidic structures (2A, 2A), each of said structures (2A, 2A) is located at a front end (1B) of the microfluidic device; characterized in that the microfluidic device (1) is made at least in part from a mono-crystalline material and wherein said front end (1B) of the microfluidic device (1) and the microfluidic structures (2A, 2A) are aligned with the crystal orientation line and methods producing said devices and uses thereof.

An intermediate structure for a microfluidic device and a method for manufacturing a microfluidic device are provided. The method includes: a) providing a first substrate having a first layer thereon, and a second layer on the first layer; b) forming a first nanopore in the second layer, in such a way that a part of the first layer coincides with a bottom of the first nanopore; c) exposing said part of the first layer to a liquid etchant, thereby forming a cavity under the first nanopore, the cavity having a larger width than a width of the bottom of the first nanopore; d) filling the first nanopore and the cavity with a filling material, thereby forming a first plug; e) forming a bottom fluidic access for the nanopore by removing part of the first substrate and part of the first layer so as to expose the plug; and f) removing the plug, thereby fluidly connecting the bottom fluidic access to the nanopore.