Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
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3/00
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
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B81B3/0002
Arrangements for avoiding sticking of the flexible or moving parts
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B81B3/001
Structures having a reduced contact area, e.g. with bumps or with a textured surface
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