Disclosed are a MEMS chip and an electronic device. The chip can include a substrate having a back cavity, as well as a back electrode and an induction membrane both disposed on the substrate, wherein the back electrode and the induction membrane are located on the back cavity and constitute a capacitor structure, the induction membrane comprises an active area opposite to the back cavity, an inactive area disposed outside the active area, and an isolation area located between the active area and the inactive area, and the isolation area comprises two insulation loops connected to the active area and the inactive area respectively, and a buffer area connected between the two insulation loops, both of the insulation loops being disposed around the active area.

A contact sensor for monitoring breathing of a subject, comprising: a microphone housing defining a first acoustic cavity, a MEMS microphone disposed within the first acoustic cavity; a second acoustic cavity separated from the first acoustic cavity by a cavity wall having a front surface and a rear surface, the second acoustic cavity at least partially defined by the front surface of the cavity wall; an acoustic conduit formed between the first acoustic cavity and the second acoustic cavity through the cavity wall; and a pressure relief vent having a first end terminating at the second acoustic cavity and a second end terminating outside of the second acoustic cavity.

Disclosed herein are aspects of a multiple-mass, multi-axis microelectromechanical systems (MEMS) accelerometer sensor device with a fully differential sensing design that applies differential drive signals to movable proof masses and senses differential motion signals at sense fingers coupled to a substrate. In some embodiments, capacitance signals from different sense fingers are combined together at a sensing signal node disposed on the substrate supporting the proof masses. In some embodiments, a split shield may be provided, with a first shield underneath a proof mass coupled to the same drive signal applied to the proof mass and a second shield electrically isolated from the first shield provided underneath the sense fingers and biased with a constant voltage to provide shielding for the sense fingers.

A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator including a multi-morph piezoelectric actuator; an optoelectronic device coupled to the in-plane MEMS actuator; and a lens barrel assembly coupled to the out-of-plane MEMS actuator.

Proposed is a MEMS device comprising a layer stack having at least one second layer formed between a first layer and a third layer. At least one first cavity is formed in the second layer. The MEMS device further comprises a laterally deflectable member having an end connected to a sidewall of the first cavity and a free end. Further, the MEMS device includes a passive element rigidly tethered to the free end of the laterally deflectable element to follow movement of the laterally deflectable element. The laterally deflectable element and the passive element divide the first cavity into a first sub-cavity and a second sub-cavity. The first sub-cavity is in contact with an ambient fluid of the MEMS device via at least a first opening. Further, the second subcavity is in contact with the ambient fluid of the MEMS device via at least a second opening. The at least one first opening is formed in a different layer of the first layer and the third layer than the at least one second opening.

An electromechanical microsystem including two electromechanical transducers, a first deformable diaphragm and a cavity hermetically containing a deformable medium keeping a constant volume under the action of a change in the external pressure. The first diaphragm forms at least one portion of a first wall of the cavity and has a freely deformable area. The free area cooperates with an external member so that its deformation induces, or is induced by, a movement of the external member. The electromechanical transducers are configured so that a first electromechanical transducer forms a portion of the first wall of the cavity, and a second electromechanical transducer forms at least one portion of the wall opposite to the first wall of the cavity.

An electromechanical microsystem including an electromechanical transducer, a deformable diaphragm and a cavity hermetically containing a deformable medium keeping a constant volume under the action of an external pressure change. The deformable diaphragm forms a wall of the cavity and has at least one free area so as to be elastically deformed. The electromechanical transducer is configured so that its movement depends on the change in the external pressure, and vice versa. The free area cooperates with an external member so that its deformation induces, or is induced by, a movement of the external member. Thus, the electromechanical microsystem is adapted to displace the external member or to detect a movement of this member, the electromechanical microsystem includes at least one pin, configured to bear on a peripheral portion of the free area so that a deformation of the free rea causes an inclination of the pin.

An electromechanical microsystem including an electromechanical transducer, a deformable diaphragm, a first cavity hermetically containing a deformable medium keeping a substantially constant volume under the action of an external pressure change and a second cavity. The deformable diaphragm forms a wall of the cavity and has at least one area freely deformable elastically. The free area also forms a wall of the second cavity. The electromechanical transducer is configured so that its movement depends on the external pressure change, and vice versa. A change in the external pressure in the first cavity induces a variation of the volume of the second cavity, or vice versa. Thus, the proposed electromechanical microsystem enables gripping of an object obstructing the opening of the second cavity and forms a microbarometer capable of converting at least one ambient pressure change into an electrical signal.

A piezoelectric micromachined ultrasound transducer (PMUT) array may comprise PMUT devices with respective piezoelectric layers and electrode layers. Parasitic capacitance can be reduced when an electrode layer is not shared across PMUT devices but may expose the devices to electromagnetic interference (EMI). A conductive layer located within the structural layer or on a shared plane with the electrode layers may reduce EMI affecting the PMUT array operation.

A piezoelectric actuator comprises a substrate, an insulator layer on the substrate, and a piezo actuator stack on the insulator layer. The piezo actuator stack comprises an insulator-adjacent electrode on the insulator layer. A piezo layer having a tapered sidewall resides on a portion of the insulator-adjacent electrode. An insulator-distal electrode on the piezo layer having a taper-adjacent edge offset from an intersection of the tapered sidewall of the piezo layer and the insulator-adjacent electrode.