A method for manufacturing a piezoelectric device that includes a substrate and a vibration portion that can include a membrane or a beam that is directly or indirectly supported by the substrate and arranged above the substrate. Moreover, the vibration portion includes a piezoelectric layer and the method includes forming the vibration portion and adjusting a resonance frequency of the vibration portion by locally subjecting a region including the vibration portion to heat treatment.

A microelectromechanical system (MEMS) actuator device includes a substrate; a shape memory alloy over the substrate; and a reflective coating on the shape memory alloy. The shape memory alloy and the reflective coating form a bi-layer cantilever beam having a first end anchored to the substrate, and a second end released from the substrate. The second end of the cantilever beam articulates between a deflection configuration away from the substrate and a non-deflection configuration towards the substrate based on a thermal phase change in the shape memory alloy.

A pop-up laminate structure includes rigid layers, at least one flexible layer, at least one optical component, and an actuator. At least one of the rigid layers defines gaps extending there through to form a plurality of rigid segments separated by the gaps in the rigid layer. The flexible layer is bonded to the rigid segments to form joints for folding. The optical component is mounted to a rigid layer and configured to generate, capture or alter a light beam. The actuator is mounted to at least one of the rigid layers and configured to displace at least one rigid segment that, in turn, displaces the optical component. At least some of the layers are bonded to adjacent layers only at selected locations forming islands of inter-layer bonds to allow expansion of the laminate into an expanded three-dimensional structure.

A MEMS device comprising a body, having a first surface and a second surface; a diaphragm cavity in the body extending from the second surface of the body; a deformable portion in the body between the first surface and the diaphragm cavity; and a piezoelectric actuator, extending on the first surface of the body, over the deformable portion. The MEMS device is characterized in that it comprises a recess structure extending in the body and delimiting a stopper portion for the deformable portion.

A micromachined tunable capacitor. A pair of first and second MEMS fabricated flexures are flexibly coupled to a piezo actuator drive element configured wherein a stress or strain induced by the piezo actuator drive element urges a first movable capacitor plate element a predetermined distance toward or away from a second capacitor plate element proportional to a predetermined voltage signal.

A light deflector is provided including a mirror unit having a light reflection plane, a movable frame to support the mirror unit, a support frame disposed to surround the movable frame, a pair of serpentine beams each disposed between the movable frame and the support frame on both sides of the movable frame to form a turning shape, each of the serpentine beams having one end attached to the support frame, and another end attached to the movable frame, and a vibration damper provided on a portion that moves due to deformation of the serpentine beams caused by application of voltage being transferred.

A microelectromechanical systems (MEMS) scanner having actuator pairs adjacent to sides of a scanning mirror. Actuator pairs include individual actuators that are physically located adjacent to opposite sides of the scanning mirror and that, upon activation, induce angular rotation into the scanning mirror. Torsional beam flexures suspend the scanning mirror from a frame structure and facilitate rotation of the scanning mirror about a rotational axis. During operation of the MEMS scanner, a drive signal may be applied to the actuator pair to cause each individual actuator, of the actuator pair, to deform in unison, thereby generating some degree of tip deflection. Since the torsional beam flexures are connected to the tips of the actuators via the lever arms, this tip deflection serves as actuator stroke that induces torsional deformation into the torsional beam flexure—thereby causing rotation of the scanning mirror about the rotational axis.

According to an embodiment, a semiconductor device includes a first actuator, a second actuator, a first frame provided between the first actuator and the second actuator, a first connection member connecting the first actuator and the first frame to each other, a second connection member connecting the first actuator and the first frame to each other at a position different from a position at which the first connection member connects the first actuator and the first frame to each other, a third connection member connecting the second actuator and the first frame to each other, a fourth connection member connecting the second actuator and the first frame to each other at a position different from a position at which the third connection member connects the second actuator and the first frame to each other.

A wearable glove for interacting with virtual objects is described herein. An example wearable glove includes a fabric material to be worn on a user's hand. The wearable glove also includes a matrix made of an elastic polymer, the matrix including a plurality of voids, each respective void (i) including at least one fluidic actuator and (ii) not being fluidically coupled with a positionally adjacent void. The wearable glove additionally includes a non-fluidic actuator configured to restrict movement of one of the user's digits; and one or more position sensors for monitoring positional data used to a determine a position of the wearable glove within a three-dimensional space. The wearable device can control the at least one fluidic actuator and the at least one non-fluidic actuator to simulate real-world interactions in the artificial-reality environment based on the position of the wearable device as compared to respective positions of virtual objects.

A transducer includes a piezoelectric element that includes a piezoelectric membrane which is interposed between a pair of electrodes, a membrane body that includes a vibration membrane displaceable in a membrane thickness direction, the piezoelectric element being laminated on the vibration membrane, a package that includes an internal space which houses the piezoelectric element and the membrane body, and an abutment pad that is disposed in the internal space and limits displacement of the vibration membrane by abutting the piezoelectric element or the vibration membrane when the vibration membrane is displaced in the membrane thickness direction.